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Chemical modification and patterning of Si(100) using interference photolithography

Chemical modification and patterning of Si(100) using interference photolithography
Chemical modification and patterning of Si(100) using interference photolithography
Yin, H.B.
80f33a1f-d886-4f09-adab-bc65e9125c29
Brown, T.
65b220ab-5839-4e03-b923-97694339baaf
Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Wilkinson, James
73483cf3-d9f2-4688-9b09-1c84257884ca
Melvin, T.
fd87f5eb-2bb9-48fa-b7be-7100ace9c50f
Yin, H.B.
80f33a1f-d886-4f09-adab-bc65e9125c29
Brown, T.
65b220ab-5839-4e03-b923-97694339baaf
Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Wilkinson, James
73483cf3-d9f2-4688-9b09-1c84257884ca
Melvin, T.
fd87f5eb-2bb9-48fa-b7be-7100ace9c50f

Yin, H.B., Brown, T., Mailis, Sakellaris, Wilkinson, James and Melvin, T. (2003) Chemical modification and patterning of Si(100) using interference photolithography. MNE 2003: Micro and Nano Engineering. 22 - 25 Sep 2003.

Record type: Conference or Workshop Item (Other)

Full text not available from this repository.

More information

Published date: 2003
Venue - Dates: MNE 2003: Micro and Nano Engineering, 2003-09-22 - 2003-09-25

Identifiers

Local EPrints ID: 41558
URI: https://eprints.soton.ac.uk/id/eprint/41558
PURE UUID: f28dedb1-5e6c-49ac-a92b-cf9dc7cbd2cf
ORCID for Sakellaris Mailis: ORCID iD orcid.org/0000-0001-8100-2670
ORCID for James Wilkinson: ORCID iD orcid.org/0000-0003-4712-1697

Catalogue record

Date deposited: 02 Oct 2006
Last modified: 06 Jun 2018 13:19

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