Laser-assisted microstructuring for Ti:sapphire channel-waveguide fabrication
Laser-assisted microstructuring for Ti:sapphire channel-waveguide fabrication
We report on the fabrication of Ti:sapphire channel waveguides. Such channel waveguides are of interest, e.g., as low-threshold tunable lasers. We investigated several structuring methods including ion beam implantation followed by wet chemical etching strip loading by polyimide spin coating and subsequent laser micro-machining, direct laser ablation or reactive ion etching through laser-structured polyimide contact masks. The later two methods result in ribs having different widths and heights up to ~5 µm. By reactive ion etching we have obtained channel waveguides with strong confinement of the Ti:sapphire fluorescence emission.
363-369
Crunteanu, A.
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Pollnau, M.
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Jänchen, G.
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Hibert, C.
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Hoffmann, P.
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Salathé, R.P.
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Eason, R.W.
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Shepherd, David
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Weber, Heinz P.
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Konov, Vitali I.
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Graf, Thomas
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Crunteanu, A.
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Pollnau, M.
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Jänchen, G.
31d185ec-234e-439e-82a9-455515096860
Hibert, C.
515ac1ee-e7c6-4e28-b288-0dc58d74d1de
Hoffmann, P.
495ac254-80a3-4627-88c9-20f601582bc2
Salathé, R.P.
ea67db6b-9d3a-4221-bb07-fc20064d2758
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020
Shepherd, David
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Weber, Heinz P.
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Konov, Vitali I.
a79654fd-a3f3-44a0-af76-94919fc171c6
Graf, Thomas
a8f9f5c7-fae6-459b-a970-2b8a25f412cb
Crunteanu, A., Pollnau, M., Jänchen, G., Hibert, C., Hoffmann, P., Salathé, R.P., Eason, R.W. and Shepherd, David
(2002)
Laser-assisted microstructuring for Ti:sapphire channel-waveguide fabrication.
Weber, Heinz P., Konov, Vitali I. and Graf, Thomas
(eds.)
ALT'02 International Conference on Advanced Laser Technologies, Adelboden, Switzerland.
15 - 20 Sep 2002.
.
(doi:10.1117/12.543706).
Record type:
Conference or Workshop Item
(Paper)
Abstract
We report on the fabrication of Ti:sapphire channel waveguides. Such channel waveguides are of interest, e.g., as low-threshold tunable lasers. We investigated several structuring methods including ion beam implantation followed by wet chemical etching strip loading by polyimide spin coating and subsequent laser micro-machining, direct laser ablation or reactive ion etching through laser-structured polyimide contact masks. The later two methods result in ribs having different widths and heights up to ~5 µm. By reactive ion etching we have obtained channel waveguides with strong confinement of the Ti:sapphire fluorescence emission.
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e-pub ahead of print date: 2002
Venue - Dates:
ALT'02 International Conference on Advanced Laser Technologies, Adelboden, Switzerland, 2002-09-15 - 2002-09-20
Identifiers
Local EPrints ID: 41560
URI: http://eprints.soton.ac.uk/id/eprint/41560
PURE UUID: 800de3be-f40a-4328-8280-431af147eeb9
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Date deposited: 02 Oct 2006
Last modified: 16 Mar 2024 02:39
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Contributors
Author:
A. Crunteanu
Author:
M. Pollnau
Author:
G. Jänchen
Author:
C. Hibert
Author:
P. Hoffmann
Author:
R.P. Salathé
Author:
R.W. Eason
Author:
David Shepherd
Editor:
Heinz P. Weber
Editor:
Vitali I. Konov
Editor:
Thomas Graf
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