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Laser-assisted material composition engineering of SiGe planar waveguides

Laser-assisted material composition engineering of SiGe planar waveguides
Laser-assisted material composition engineering of SiGe planar waveguides
We report the compositional engineering of silicon-germanium planar microstructures through laser processing. The effects of the laser treatment are assessed through microscope imaging and Raman spectroscopy. Our results reveal that the laser-exposed regions display a significant change in the material composition.
Runge, Antoine
874cec37-209b-4c7a-97a5-56d05596dd2b
Franz, Yohann
edb6208c-9f65-42c4-965e-b6bc54945602
Littlejohns, Callum
0fd6585d-030d-4d8f-a411-6fc03e083efa
Grabska, Katarzyna, Monika
5f82b736-08ad-4ddb-9f6a-01eea5f9975f
Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Gardes, Frederic
7a49fc6d-dade-4099-b016-c60737cb5bb2
Peacock, Anna
685d924c-ef6b-401b-a0bd-acf1f8e758fc
Runge, Antoine
874cec37-209b-4c7a-97a5-56d05596dd2b
Franz, Yohann
edb6208c-9f65-42c4-965e-b6bc54945602
Littlejohns, Callum
0fd6585d-030d-4d8f-a411-6fc03e083efa
Grabska, Katarzyna, Monika
5f82b736-08ad-4ddb-9f6a-01eea5f9975f
Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Gardes, Frederic
7a49fc6d-dade-4099-b016-c60737cb5bb2
Peacock, Anna
685d924c-ef6b-401b-a0bd-acf1f8e758fc

Runge, Antoine, Franz, Yohann, Littlejohns, Callum, Grabska, Katarzyna, Monika, Mailis, Sakellaris, Gardes, Frederic and Peacock, Anna (2017) Laser-assisted material composition engineering of SiGe planar waveguides. CLEO-Pacific Rim 2017, Singapore, Singapore. 31 Jul - 04 Aug 2017.

Record type: Conference or Workshop Item (Poster)

Abstract

We report the compositional engineering of silicon-germanium planar microstructures through laser processing. The effects of the laser treatment are assessed through microscope imaging and Raman spectroscopy. Our results reveal that the laser-exposed regions display a significant change in the material composition.

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PGC_2017_abstract - Accepted Manuscript
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CLEO_PACIFIC_poster_v4
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More information

Published date: August 2017
Venue - Dates: CLEO-Pacific Rim 2017, Singapore, Singapore, 2017-07-31 - 2017-08-04

Identifiers

Local EPrints ID: 415700
URI: https://eprints.soton.ac.uk/id/eprint/415700
PURE UUID: cf0eadf3-cefa-4c7d-9bb5-11379503d27c
ORCID for Sakellaris Mailis: ORCID iD orcid.org/0000-0001-8100-2670
ORCID for Anna Peacock: ORCID iD orcid.org/0000-0002-1940-7172

Catalogue record

Date deposited: 20 Nov 2017 17:30
Last modified: 14 Mar 2019 01:49

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