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Laser-assisted material composition engineering of SiGe planar waveguides

Laser-assisted material composition engineering of SiGe planar waveguides
Laser-assisted material composition engineering of SiGe planar waveguides
We report the compositional engineering of silicon-germanium planar microstructures through laser processing. The effects of the laser treatment are assessed through microscope imaging and Raman spectroscopy. Our results reveal that the laser-exposed regions display a significant change in the material composition.
Runge, Antoine
874cec37-209b-4c7a-97a5-56d05596dd2b
Franz, Yohann
edb6208c-9f65-42c4-965e-b6bc54945602
Littlejohns, Callum
d2837f04-0a83-4bf9-acb2-618aa42a0cad
Grabska, Katarzyna, Monika
5f82b736-08ad-4ddb-9f6a-01eea5f9975f
Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Gardes, Frederic
7a49fc6d-dade-4099-b016-c60737cb5bb2
Peacock, Anna
685d924c-ef6b-401b-a0bd-acf1f8e758fc
Runge, Antoine
874cec37-209b-4c7a-97a5-56d05596dd2b
Franz, Yohann
edb6208c-9f65-42c4-965e-b6bc54945602
Littlejohns, Callum
d2837f04-0a83-4bf9-acb2-618aa42a0cad
Grabska, Katarzyna, Monika
5f82b736-08ad-4ddb-9f6a-01eea5f9975f
Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Gardes, Frederic
7a49fc6d-dade-4099-b016-c60737cb5bb2
Peacock, Anna
685d924c-ef6b-401b-a0bd-acf1f8e758fc

Runge, Antoine, Franz, Yohann, Littlejohns, Callum, Grabska, Katarzyna, Monika, Mailis, Sakellaris, Gardes, Frederic and Peacock, Anna (2017) Laser-assisted material composition engineering of SiGe planar waveguides. 2017 Conference on Lasers and Electro-Optics Pacific Rim, , Singapore, Singapore. 31 Jul - 04 Aug 2017. 2 pp .

Record type: Conference or Workshop Item (Poster)

Abstract

We report the compositional engineering of silicon-germanium planar microstructures through laser processing. The effects of the laser treatment are assessed through microscope imaging and Raman spectroscopy. Our results reveal that the laser-exposed regions display a significant change in the material composition.

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More information

Published date: August 2017
Venue - Dates: 2017 Conference on Lasers and Electro-Optics Pacific Rim, , Singapore, Singapore, 2017-07-31 - 2017-08-04

Identifiers

Local EPrints ID: 415700
URI: http://eprints.soton.ac.uk/id/eprint/415700
PURE UUID: cf0eadf3-cefa-4c7d-9bb5-11379503d27c
ORCID for Sakellaris Mailis: ORCID iD orcid.org/0000-0001-8100-2670
ORCID for Frederic Gardes: ORCID iD orcid.org/0000-0003-1400-3272
ORCID for Anna Peacock: ORCID iD orcid.org/0000-0002-1940-7172

Catalogue record

Date deposited: 20 Nov 2017 17:30
Last modified: 16 Mar 2024 04:08

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Contributors

Author: Antoine Runge
Author: Yohann Franz
Author: Katarzyna, Monika Grabska
Author: Sakellaris Mailis ORCID iD
Author: Frederic Gardes ORCID iD
Author: Anna Peacock ORCID iD

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