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New deep glass etching technology

New deep glass etching technology
New deep glass etching technology
A new masking technology useful for wet etching of glass, to a depth of more than 300µm, is reported; multilayers of metal in combination with thick SPRT220 photoresist, are used. This new method was successfully developed for fabricating a 200µm thick diaphragm for a micro peristaltic pump. Various mask materials, which can be patterned by standard photolithography and metal etching processes, were investigated. The main advantage of this newly developed method was the application of hydrofluoric acid etching to create deep cavities with a uniform membrane without pinholes, and to minimize lateral undercutting of the glass.
Bu, M.
62faacb5-690b-45af-8ee9-0c9378b48abf
Melvin, T.
fd87f5eb-2bb9-48fa-b7be-7100ace9c50f
Ensell, G.
48fe0996-1c6b-4816-8bd0-0a3234d36ae8
Wilkinson, James
73483cf3-d9f2-4688-9b09-1c84257884ca
Evans, A.G.R.
082f720d-3830-46d7-ba87-b058af733bc3
Bu, M.
62faacb5-690b-45af-8ee9-0c9378b48abf
Melvin, T.
fd87f5eb-2bb9-48fa-b7be-7100ace9c50f
Ensell, G.
48fe0996-1c6b-4816-8bd0-0a3234d36ae8
Wilkinson, James
73483cf3-d9f2-4688-9b09-1c84257884ca
Evans, A.G.R.
082f720d-3830-46d7-ba87-b058af733bc3

Bu, M., Melvin, T., Ensell, G., Wilkinson, James and Evans, A.G.R. (2003) New deep glass etching technology. Eurosensors XVII, Portugal. 21 - 24 Sep 2003. 4 pp .

Record type: Conference or Workshop Item (Paper)

Abstract

A new masking technology useful for wet etching of glass, to a depth of more than 300µm, is reported; multilayers of metal in combination with thick SPRT220 photoresist, are used. This new method was successfully developed for fabricating a 200µm thick diaphragm for a micro peristaltic pump. Various mask materials, which can be patterned by standard photolithography and metal etching processes, were investigated. The main advantage of this newly developed method was the application of hydrofluoric acid etching to create deep cavities with a uniform membrane without pinholes, and to minimize lateral undercutting of the glass.

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More information

Published date: 2003
Venue - Dates: Eurosensors XVII, Portugal, 2003-09-21 - 2003-09-24

Identifiers

Local EPrints ID: 41595
URI: http://eprints.soton.ac.uk/id/eprint/41595
PURE UUID: 3311aa6c-6271-4ca0-a737-1601fbf9b3e5
ORCID for James Wilkinson: ORCID iD orcid.org/0000-0003-4712-1697

Catalogue record

Date deposited: 05 Oct 2006
Last modified: 06 Jun 2018 13:19

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