The University of Southampton
University of Southampton Institutional Repository

Ductile dicing of LiNbO3 ridge waveguide facets to achieve 0.29 nm surface roughness in single process step

Ductile dicing of LiNbO3 ridge waveguide facets to achieve 0.29 nm surface roughness in single process step
Ductile dicing of LiNbO3 ridge waveguide facets to achieve 0.29 nm surface roughness in single process step
A single-step ductile dicing process capable of manufacturing optical quality facets in lithium niobate (LiNbO3) ridge waveguides with an average surface roughness of 0.29 nm is reported. This result is comparable with surface roughnesses achieved by lapping and polishing and represents an order of magnitude improvement over the prior state of the art in LiNbO3 waveguide facet dicing.
0013-5194
1672-1674
Carpenter, L.G.
0daa548e-0d42-4b06-b914-45bfbec41759
Berry, S.A.
0f768f48-36c4-4599-8917-7aae657378a7
Gawith, C.B.E.
926665c0-84c7-4a1d-ae19-ee6d7d14c43e
Carpenter, L.G.
0daa548e-0d42-4b06-b914-45bfbec41759
Berry, S.A.
0f768f48-36c4-4599-8917-7aae657378a7
Gawith, C.B.E.
926665c0-84c7-4a1d-ae19-ee6d7d14c43e

Carpenter, L.G., Berry, S.A. and Gawith, C.B.E. (2017) Ductile dicing of LiNbO3 ridge waveguide facets to achieve 0.29 nm surface roughness in single process step. Electronics Letters, 53 (25), 1672-1674. (doi:10.1049/el.2017.2863).

Record type: Article

Abstract

A single-step ductile dicing process capable of manufacturing optical quality facets in lithium niobate (LiNbO3) ridge waveguides with an average surface roughness of 0.29 nm is reported. This result is comparable with surface roughnesses achieved by lapping and polishing and represents an order of magnitude improvement over the prior state of the art in LiNbO3 waveguide facet dicing.

Text
ELL-2017-2863 - Accepted Manuscript
Download (584kB)

More information

Accepted/In Press date: 19 October 2017
e-pub ahead of print date: 30 October 2017

Identifiers

Local EPrints ID: 415988
URI: https://eprints.soton.ac.uk/id/eprint/415988
ISSN: 0013-5194
PURE UUID: 5fc011c8-4640-4f68-abef-85a5580694c9
ORCID for S.A. Berry: ORCID iD orcid.org/0000-0002-9538-8655
ORCID for C.B.E. Gawith: ORCID iD orcid.org/0000-0002-3502-3558

Catalogue record

Date deposited: 29 Nov 2017 17:30
Last modified: 10 Dec 2019 01:49

Export record

Altmetrics

Contributors

Author: L.G. Carpenter
Author: S.A. Berry ORCID iD
Author: C.B.E. Gawith ORCID iD

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of https://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×