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Sub-micron period grating structures in Ta thin oxide films patterned using UV laser post-exposure chemically assisted selective etching

Pissadakis, S., Ikiades, A., Tai, C.Y., Sessions, N.P. and Wilkinson, J.S. (2003) Sub-micron period grating structures in Ta thin oxide films patterned using UV laser post-exposure chemically assisted selective etching At E-MRS 2003 Spring Meeting. 10 - 13 Jun 2003. 1 pp.

Record type: Conference or Workshop Item (Other)


Thin polycrystalline films of Ta films to pulsed UV radiation (quadrupled Nd:YAG laser at 266nm) at fluences below the ablation threshold, for the creation of volume damage in the exposed areas. Subsequent immersion of the exposed sample in a KOH solution results in selective etching of the UV-exposed areas, developing relief structures of high quality. Interferometric exposure was used for the patterning of such gratings with periods shorter than 500nm in films of thickness between 100nm and 500nm. The behaviour of the patterning process is studied using diffraction efficiency measurements, AFM and SEM scans. Diffraction efficiency increases by a factor of 66, compared to the undeveloped structure, were obtained for gratings exposed with 1000 pulses of 30mJ/cm energy density, which were developed in a KOH solution of 50% weight concentration at a temperature of 55°C for 165mins. The etching method presented is being applied to the fabrication of optical waveguide gratings for telecommunication applications. Potential development of 2-D photonic crystal structures using this process is under investigation.

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e-pub ahead of print date: 2003
Additional Information: Symposium title: Photonic Processing of Surfaces, Thin Films and Devices
Venue - Dates: E-MRS 2003 Spring Meeting, 2003-06-10 - 2003-06-13


Local EPrints ID: 41616
PURE UUID: ba7e0393-36a2-497e-ad17-8e0634835143
ORCID for J.S. Wilkinson: ORCID iD

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Date deposited: 06 Oct 2006
Last modified: 17 Jul 2017 15:29

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Author: S. Pissadakis
Author: A. Ikiades
Author: C.Y. Tai
Author: N.P. Sessions
Author: J.S. Wilkinson ORCID iD

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