The University of Southampton
University of Southampton Institutional Repository

Enhancement of bulk second-harmonic generation from silicon nitride films by material composition

Enhancement of bulk second-harmonic generation from silicon nitride films by material composition
Enhancement of bulk second-harmonic generation from silicon nitride films by material composition
We present a comprehensive tensorial characterization of second-harmonic generation from silicon nitride films with varying composition. The samples were fabricated using plasma-enhanced chemical vapor deposition, and the material composition was varied by the reactive gas mixture in the process. We found a six-fold enhancement between the lowest and highest second-order susceptibility, with the highest value of approximately 5 pm/V from the most silicon-rich sample. Moreover, the optical losses were found to be sufficiently small (below 6 dB/cm) for applications. The tensorial results show that all samples retain in-plane isotropy independent of silicon content, highlighting the controllability of the fabrication process.
0146-9592
5030-5033
Koskinen, K.
969d1840-717a-43d5-a9f3-26aa2e2fc829
Czaplicki, R.
0c3126f1-4709-41c9-b084-0b0ad42a22c4
Slablab, A.
5a74f359-4d8b-4ca7-8b97-d4a38caf9652
Ning, T.
7d18b497-a8c9-4e15-b8f1-d30a1cd58c4b
Hermans, A.
33af2568-5db8-42dd-8b9d-14e95b366804
Kuyken, B.
5380929a-28f5-4ece-b980-606d10064a5d
Mittal, V.
fd5ee9dd-7770-416f-8f47-50ca158b39b0
Murugan, G.S.
a867686e-0535-46cc-ad85-c2342086b25b
Niemi, T.
33fc3014-ef3a-4db6-bf57-cf25d1259e00
Baets, R.
1ff88d17-2b5a-4db9-b955-08a061d8b208
Kauranen, M.
b8de7feb-4720-40bd-8cd8-db0db8792742
Koskinen, K.
969d1840-717a-43d5-a9f3-26aa2e2fc829
Czaplicki, R.
0c3126f1-4709-41c9-b084-0b0ad42a22c4
Slablab, A.
5a74f359-4d8b-4ca7-8b97-d4a38caf9652
Ning, T.
7d18b497-a8c9-4e15-b8f1-d30a1cd58c4b
Hermans, A.
33af2568-5db8-42dd-8b9d-14e95b366804
Kuyken, B.
5380929a-28f5-4ece-b980-606d10064a5d
Mittal, V.
fd5ee9dd-7770-416f-8f47-50ca158b39b0
Murugan, G.S.
a867686e-0535-46cc-ad85-c2342086b25b
Niemi, T.
33fc3014-ef3a-4db6-bf57-cf25d1259e00
Baets, R.
1ff88d17-2b5a-4db9-b955-08a061d8b208
Kauranen, M.
b8de7feb-4720-40bd-8cd8-db0db8792742

Koskinen, K., Czaplicki, R., Slablab, A., Ning, T., Hermans, A., Kuyken, B., Mittal, V., Murugan, G.S., Niemi, T., Baets, R. and Kauranen, M. (2017) Enhancement of bulk second-harmonic generation from silicon nitride films by material composition. Optics Letters, 42 (23), 5030-5033. (doi:10.1364/OL.42.005030).

Record type: Article

Abstract

We present a comprehensive tensorial characterization of second-harmonic generation from silicon nitride films with varying composition. The samples were fabricated using plasma-enhanced chemical vapor deposition, and the material composition was varied by the reactive gas mixture in the process. We found a six-fold enhancement between the lowest and highest second-order susceptibility, with the highest value of approximately 5 pm/V from the most silicon-rich sample. Moreover, the optical losses were found to be sufficiently small (below 6 dB/cm) for applications. The tensorial results show that all samples retain in-plane isotropy independent of silicon content, highlighting the controllability of the fabrication process.

Text
Enhancement of bulk second-harmonic generation from silicon nitride films by material composition - Accepted Manuscript
Download (1MB)

More information

Accepted/In Press date: 5 November 2017
e-pub ahead of print date: 1 December 2017

Identifiers

Local EPrints ID: 416175
URI: http://eprints.soton.ac.uk/id/eprint/416175
ISSN: 0146-9592
PURE UUID: c9dd5290-1f7a-4abf-8cd3-c36411f7f78a
ORCID for V. Mittal: ORCID iD orcid.org/0000-0003-4836-5327
ORCID for G.S. Murugan: ORCID iD orcid.org/0000-0002-2733-3273

Catalogue record

Date deposited: 06 Dec 2017 17:30
Last modified: 16 Mar 2024 03:46

Export record

Altmetrics

Contributors

Author: K. Koskinen
Author: R. Czaplicki
Author: A. Slablab
Author: T. Ning
Author: A. Hermans
Author: B. Kuyken
Author: V. Mittal ORCID iD
Author: G.S. Murugan ORCID iD
Author: T. Niemi
Author: R. Baets
Author: M. Kauranen

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×