20 Hz,,100 Hz,
Distance [µm],Height [nm],Distance [µm],Height [µm]
0,0.00069,0,-0.00044
0.128839,0.000451,0.128916,-0.000386
0.257679,0.000404,0.257832,-0.000311
0.386518,0.00064,0.386747,-0.000222
0.515357,0.001048,0.515663,-0.000193
0.644197,0.001359,0.644579,-0.000247
0.773036,0.001445,0.773495,-0.00035
0.901875,0.001473,0.90241,-0.000404
1.03071,0.001556,1.03133,-0.000283
1.15955,0.001802,1.16024,-0.000401
1.28839,0.002124,1.28916,-0.000722
1.41723,0.002253,1.41807,-0.000783
1.54607,0.002307,1.54699,-0.000629
1.67491,0.002468,1.67591,-0.000461
1.80375,0.002518,1.80482,-0.000397
1.93259,0.002249,1.93374,-0.000232
2.06143,0.00196,2.06265,-0.000036
2.19027,0.002096,2.19157,-0.000021
2.31911,0.002393,2.32048,-0.000014
2.44795,0.002342,2.4494,-0.000064
2.57679,0.002142,2.57832,-0.000007
2.70563,0.002017,2.70723,0.00015
2.83447,0.001963,2.83615,0.000004
2.9633,0.002067,2.96506,-0.000157
3.09214,0.002056,3.09398,-0.000032
3.22098,0.001867,3.22289,0.000122
3.34982,0.001667,3.35181,0.000064
3.47866,0.001541,3.48073,-0.000136
3.6075,0.001667,3.60964,-0.000018
3.73634,0.001906,3.73856,0.00034
3.86518,0.001892,3.86747,0.000454
3.99402,0.001813,3.99639,0.000418
4.12286,0.001684,4.1253,0.000408
4.2517,0.001291,4.25422,0.000358
4.38054,0.000844,4.38314,0.000354
4.50938,0.000526,4.51205,0.000418
4.63822,0.00024,4.64097,0.000397
4.76706,-0.000029,4.76988,0.00029
4.89589,-0.000107,4.8988,0.000336
5.02473,-0.000197,5.02772,0.000472
5.15357,-0.000422,5.15663,0.000504
5.28241,-0.000497,5.28555,0.000561
5.41125,-0.000551,5.41446,0.000672
5.54009,-0.000519,5.54338,0.000658
5.66893,-0.000318,5.67229,0.000522
5.79777,-0.000368,5.80121,0.000426
5.92661,-0.000612,5.93013,0.000347
6.05545,-0.000662,6.05904,0.000268
6.18429,-0.00054,6.18796,0.00024
6.31313,-0.000418,6.31687,0.000286
6.44197,-0.000372,6.44579,0.000325
6.57081,-0.000354,6.5747,0.000343
6.69965,-0.000329,6.70362,0.000451
6.82848,-0.000397,6.83254,0.000472
6.95732,-0.00044,6.96145,0.000465
7.08616,-0.000293,7.09037,0.000401
7.215,-0.000172,7.21928,0.0002
7.34384,-0.000079,7.3482,0.000265
7.47268,0.000157,7.47711,0.000461
7.60152,0.000311,7.60603,0.000447
7.73036,0.000283,7.73495,0.000336
7.8592,0.000182,7.86386,0.000261
7.98804,0.000086,7.99278,0.000114
8.11688,0.000018,8.12169,0.000068
8.24572,0.000046,8.25061,0.00019
8.37456,0.000165,8.37953,0.000254
8.5034,0.00015,8.50844,0.000336
8.63224,0.000054,8.63736,0.000443
8.76107,0.000079,8.76627,0.000483
8.88991,0.000118,8.89519,0.000411
9.01875,0.000057,9.0241,0.000308
9.14759,0.000072,9.15302,0.000147
9.27643,0.000272,9.28194,-0.000025
9.40527,0.000254,9.41085,0.000061
9.53411,0.000118,9.53977,0.000232
9.66295,0.00019,9.66868,0.00024
9.79179,0.00024,9.7976,0.000186
9.92063,0.000293,9.92651,0.000222
10.0495,0.000318,10.0554,0.000175
10.1783,0.000168,10.1843,-0.000025
10.3071,0.000118,10.3133,-0.000043
10.436,0.000186,10.4422,0.000118
10.5648,0.000325,10.5711,0.000097
10.6937,0.000508,10.7,-0.000068
10.8225,0.000465,10.8289,0.000061
10.9513,0.000343,10.9578,0.000343
11.0802,0.000461,11.0868,0.000368
11.209,0.000665,11.2157,0.000308
11.3379,0.000665,11.3446,0.000236
11.4667,0.000561,11.4735,0.000193
11.5955,0.000536,11.6024,0.000308
11.7244,0.000422,11.7313,0.000333
11.8532,0.0003,11.8603,0.000143
11.9821,0.000272,11.9892,0
12.1109,0.000154,12.1181,0.000082
12.2397,0.000054,12.247,0.00024
12.3686,0.000046,12.3759,0.000304
12.4974,-0.000046,12.5048,0.000329
12.6263,-0.000043,12.6337,0.000354
12.7551,0.000068,12.7627,0.000336
12.8839,-0.000007,12.8916,0.000286
13.0128,0.000025,13.0205,0.000186
13.1416,0.000125,13.1494,0.000154
13.2705,0.000018,13.2783,0.0002
13.3993,-0.000114,13.4072,0.000118
13.5281,-0.000218,13.5362,0.000265
13.657,-0.000272,13.6651,0.000458
13.7858,-0.000175,13.794,0.000694
13.9146,-0.000025,13.9229,0.00069
14.0435,-0.000021,14.0518,0.000379
14.1723,-0.000118,14.1807,0.000265
14.3012,-0.000168,14.3097,0.000415
14.43,-0.000114,14.4386,0.000479
14.5588,0.000086,14.5675,0.00039
14.6877,0.000215,14.6964,0.000325
14.8165,0.000139,14.8253,0.000343
14.9454,0.00005,14.9542,0.000472
15.0742,0.000068,15.0831,0.000522
15.203,0.000125,15.2121,0.000494
15.3319,0.0003,15.341,0.000533
15.4607,0.000454,15.4699,0.000476
15.5896,0.000501,15.5988,0.000436
15.7184,0.000368,15.7277,0.000712
15.8472,0.0002,15.8566,0.001066
15.9761,0.000036,15.9856,0.001245
16.1049,-0.000143,16.1145,0.001305
16.2338,-0.000229,16.2434,0.001141
16.3626,-0.000114,16.3723,0.000862
16.4914,0.000021,16.5012,0.000705
16.6203,0.000036,16.6301,0.000519
16.7491,0.000082,16.7591,0.000279
16.878,0.000029,16.888,0.000193
17.0068,-0.000168,17.0169,0.000358
17.1356,-0.000308,17.1458,0.000633
17.2645,-0.000236,17.2747,0.000722
17.3933,-0.000168,17.4036,0.000604
17.5221,-0.000408,17.5325,0.000519
17.651,-0.000622,17.6615,0.000601
17.7798,-0.000519,17.7904,0.000715
17.9087,-0.000422,17.9193,0.00069
18.0375,-0.000501,18.0482,0.000594
18.1663,-0.000451,18.1771,0.000468
18.2952,-0.000333,18.306,0.000268
18.424,-0.0002,18.435,0.000082
18.5529,0.000064,18.5639,0.000093
18.6817,0.000254,18.6928,0.000179
18.8105,0.000386,18.8217,0.000111
18.9394,0.000436,18.9506,0.000143
19.0682,0.000476,19.0795,0.000333
19.1971,0.000583,19.2084,0.000468
19.3259,0.000529,19.3374,0.000536
19.4547,0.000336,19.4663,0.000465
19.5836,0.000215,19.5952,0.000308
19.7124,0.000186,19.7241,0.000193
19.8413,0.000093,19.853,0.00015
19.9701,-0.000079,19.9819,0.000107
20.0989,-0.000154,20.1109,0.000157
20.2278,-0.000075,20.2398,0.000279
20.3566,-0.000118,20.3687,0.000275
20.4855,-0.00019,20.4976,0.000286
20.6143,-0.000139,20.6265,0.000372
20.7431,-0.000179,20.7554,0.000426
20.872,-0.000161,20.8844,0.000451
21.0008,-0.000089,21.0133,0.000472
21.1297,-0.000118,21.1422,0.000551
21.2585,-0.000147,21.2711,0.000587
21.3873,-0.000007,21.4,0.000526
21.5162,0.000172,21.5289,0.000519
21.645,0.000143,21.6578,0.000551
21.7738,0.000125,21.7868,0.000429
21.9027,0.000175,21.9157,0.000318
22.0315,0.000165,22.0446,0.00029
22.1604,0.000243,22.1735,0.000186
22.2892,0.000383,22.3024,0.00015
22.418,0.00054,22.4313,0.000136
22.5469,0.000719,22.5603,0.000122
22.6757,0.000654,22.6892,0.000175
22.8046,0.000479,22.8181,0.000229
22.9334,0.000461,22.947,0.000322
23.0622,0.000393,23.0759,0.000497
23.1911,0.000272,23.2048,0.000622
23.3199,0.000368,23.3338,0.000561
23.4488,0.000436,23.4627,0.000497
23.5776,0.000318,23.5916,0.000454
23.7064,0.000247,23.7205,0.000468
23.8353,0.000122,23.8494,0.00059
23.9641,-0.000075,23.9783,0.000594
24.093,-0.000061,24.1072,0.00054
24.2218,0.000068,24.2362,0.000547
24.3506,0.00015,24.3651,0.000551
24.4795,0.000243,24.494,0.000637
24.6083,0.00029,24.6229,0.000765
24.7372,0.000168,24.7518,0.000683
24.866,0.000018,24.8807,0.000522
24.9948,-0.000004,25.0097,0.00039
25.1237,-0.000004,25.1386,0.000268
25.2525,0.000057,25.2675,0.000268
25.3813,0.000229,25.3964,0.000279
25.5102,0.000343,25.5253,0.000132
25.639,0.000418,25.6542,0.000039
25.7679,0.000472,25.7832,0.000157
25.8967,0.000501,25.9121,0.000143
26.0255,0.000583,26.041,0.000129
26.1544,0.000604,26.1699,0.000297
26.2832,0.000468,26.2988,0.000333
26.4121,0.000418,26.4277,0.000293
26.5409,0.000501,26.5566,0.000361
26.6697,0.00069,26.6856,0.000558
26.7986,0.001248,26.8145,0.000565
26.9274,0.002339,26.9434,0.000393
27.0563,0.003769,27.0723,0.000283
27.1851,0.005257,27.2012,0.00025
27.3139,0.00638,27.3301,0.000322
27.4428,0.006394,27.4591,0.000461
27.5716,0.005254,27.588,0.000476
27.7005,0.003837,27.7169,0.000311
27.8293,0.002664,27.8458,0.000175
27.9581,0.001709,27.9747,0.000118
28.087,0.001123,28.1036,0.000143
28.2158,0.000873,28.2326,0.000093
28.3447,0.000672,28.3615,-0.000011
28.4735,0.000619,28.4904,0.000064
28.6023,0.000808,28.6193,0.000114
28.7312,0.000948,28.7482,0.000218
28.86,0.001005,28.8771,0.000243
28.9888,0.00108,29.006,0.0002
29.1177,0.001091,29.135,0.000211
29.2465,0.00108,29.2639,0.000265
29.3754,0.001159,29.3928,0.000236
29.5042,0.001248,29.5217,0.000186
29.633,0.001287,29.6506,0.000143
29.7619,0.001448,29.7795,-0.000011
29.8907,0.001817,29.9085,-0.00019
30.0196,0.002217,30.0374,-0.000068
30.1484,0.002425,30.1663,0.000265
30.2772,0.002307,30.2952,0.000333
30.4061,0.001917,30.4241,0.000075
30.5349,0.00157,30.553,-0.000082
30.6638,0.001409,30.682,0.000136
30.7926,0.001509,30.8109,0.0003
30.9214,0.001813,30.9398,0.000372
31.0503,0.001895,31.0687,0.000447
31.1791,0.001688,31.1976,0.000429
31.308,0.001384,31.3265,0.000511
31.4368,0.001012,31.4554,0.000504
31.5656,0.000722,31.5844,0.000426
31.6945,0.000619,31.7133,0.000558
31.8233,0.000504,31.8422,0.000719
31.9522,0.000501,31.9711,0.000772
32.081,0.000608,32.1,0.000744
32.2098,0.000529,32.2289,0.000572
32.3387,0.000404,32.3579,0.000265
32.4675,0.000383,32.4868,0.000046
32.5964,0.000265,32.6157,0.000093
32.7252,0.000114,32.7446,0.0002
32.854,0.000132,32.8735,0.000229
32.9829,0.00024,33.0024,0.000297
33.1117,0.0003,33.1314,0.000411
33.2405,0.000383,33.2603,0.000408
33.3694,0.00044,33.3892,0.000304
33.4982,0.000383,33.5181,0.000247
33.6271,0.00025,33.647,0.00024
33.7559,0.000154,33.7759,0.000358
33.8847,0.000104,33.9048,0.000497
34.0136,0.000165,34.0338,0.000454
34.1424,0.000361,34.1627,0.000343
34.2713,0.000333,34.2916,0.000257
34.4001,0.000204,34.4205,0.000207
34.5289,0.000229,34.5494,0.000125
34.6578,0.000318,34.6783,0.000057
34.7866,0.000433,34.8073,0.000118
34.9155,0.000404,34.9362,0.00005
35.0443,0.000215,35.0651,-0.000154
35.1731,-0.000072,35.194,-0.000157
35.302,-0.000393,35.3229,-0.000114
35.4308,-0.000672,35.4518,-0.000129
35.5597,-0.00074,35.5808,-0.000072
35.6885,-0.000376,35.7097,0.000004
35.8173,0.000032,35.8386,-0.000054
35.9462,0.000254,35.9675,-0.000197
36.075,0.000526,36.0964,-0.000132
36.2039,0.000819,36.2253,0.000064
36.3327,0.000933,36.3542,0.000218
36.4615,0.000901,36.4832,0.000261
36.5904,0.000819,36.6121,0.000182
36.7192,0.000708,36.741,0.000111
36.848,0.000561,36.8699,0.000046
36.9769,0.000508,36.9988,0.000068
37.1057,0.00073,37.1277,0.000222
37.2346,0.000948,37.2567,0.000329
37.3634,0.000987,37.3856,0.000354
37.4922,0.001062,37.5145,0.000304
37.6211,0.001094,37.6434,0.000204
37.7499,0.000951,37.7723,0.000089
37.8788,0.000783,37.9012,0.00005
38.0076,0.000837,38.0302,0.000122
38.1364,0.000905,38.1591,0.000129
38.2653,0.000865,38.288,0.000014
38.3941,0.000898,38.4169,0.00005
38.523,0.001016,38.5458,0.000354
38.6518,0.001334,38.6747,0.00054
38.7806,0.001713,38.8036,0.000519
38.9095,0.001845,38.9326,0.000526
39.0383,0.001935,39.0615,0.000343
39.1672,0.001981,39.1904,0.000086
39.296,0.001895,39.3193,0.000161
39.4248,0.001845,39.4482,0.000204
39.5537,0.001727,39.5771,0.000147
39.6825,0.001681,39.7061,0.000097
39.8114,0.001663,39.835,-0.000007
39.9402,0.001488,39.9639,0.000061
40.069,0.001363,40.0928,0.000104
40.1979,0.001348,40.2217,0.000025
40.3267,0.001252,40.3506,-0.000025
40.4556,0.001166,40.4796,-0.000086
40.5844,0.001212,40.6085,-0.000043
40.7132,0.001169,40.7374,0.000064
40.8421,0.001059,40.8663,0.000122
40.9709,0.000994,40.9952,0.000132
41.0997,0.001055,41.1241,0.000093
41.2286,0.00123,41.253,0.000093
41.3574,0.001352,41.382,0.000129
41.4863,0.001359,41.5109,0.000147
41.6151,0.001237,41.6398,0.000136
41.7439,0.001148,41.7687,0.000132
41.8728,0.001184,41.8976,0.000143
42.0016,0.001184,42.0265,0.000215
42.1305,0.001001,42.1555,0.000272
42.2593,0.000808,42.2844,0.000093
42.3881,0.000651,42.4133,-0.00005
42.517,0.000526,42.5422,0.00005
42.6458,0.00054,42.6711,0.000154
42.7747,0.000504,42.8,0.000125
42.9035,0.000358,42.929,0.000021
43.0323,0.000386,43.0579,-0.000043
43.1612,0.000515,43.1868,0.000118
43.29,0.000522,43.3157,0.000079
43.4189,0.000454,43.4446,0.000265
43.5477,0.000347,43.5735,0.000293
43.6765,0.000175,43.7024,0.000265
43.8054,0.000064,43.8314,0.000336
43.9342,0.000172,43.9603,0.000247
44.0631,0.000293,44.0892,0.000179
44.1919,0.000275,44.2181,0.000311
44.3207,0.000293,44.347,0.000379
44.4496,0.0002,44.4759,0.000454
44.5784,0.000068,44.6049,0.000576
44.7072,0.000118,44.7338,0.000597
44.8361,0.000161,44.8627,0.000572
44.9649,0.000261,44.9916,0.000587
45.0938,0.000418,45.1205,0.000497
45.2226,0.000397,45.2494,0.000318
45.3514,0.000304,45.3784,0.000265
45.4803,0.000297,45.5073,0.00015
45.6091,0.000318,45.6362,0.000004
45.738,0.000293,45.7651,0.000021
45.8668,0.000272,45.894,0.000046
45.9956,0.00034,46.0229,0.000072
46.1245,0.000426,46.1518,0.000125
46.2533,0.00035,46.2808,0.00015
46.3822,0.00029,46.4097,0.000222
46.511,0.000333,46.5386,0.000243
46.6398,0.000329,46.6675,0.00019
46.7687,0.000404,46.7964,0.000236
46.8975,0.000587,46.9253,0.000182
47.0264,0.000712,47.0543,0.000036
47.1552,0.000694,47.1832,0.000143
47.284,0.00054,47.3121,0.000322
47.4129,0.000426,47.441,0.00025
47.5417,0.000476,47.5699,0.000032
47.6706,0.000451,47.6988,0.000043
47.7994,0.000257,47.8278,0.000172
47.9282,0.000197,47.9567,0.000111
48.0571,0.000443,48.0856,0.000068
48.1859,0.000579,48.2145,0.000336
48.3147,0.000504,48.3434,0.000701
48.4436,0.000551,48.4723,0.00079
48.5724,0.000583,48.6012,0.000576
48.7013,0.000504,48.7302,0.000376
48.8301,0.000368,48.8591,0.000397
48.9589,0.000275,48.988,0.000433
49.0878,0.000333,49.1169,0.000318
49.2166,0.000343,49.2458,0.000225
49.3455,0.000268,49.3747,0.000358
49.4743,0.000279,49.5037,0.000401
49.6031,0.000386,49.6326,0.000308
49.732,0.000526,49.7615,0.000243
49.8608,0.000587,49.8904,0.0001
49.9897,0.000551,50.0193,0.000129
50.1185,0.000679,50.1482,0.000114
50.2473,0.000851,50.2772,0.000014
50.3762,0.000755,50.4061,0.000139
50.505,0.000544,50.535,0.00025
50.6339,0.000415,50.6639,0.000354
50.7627,0.000379,50.7928,0.000447
50.8915,0.000272,50.9217,0.000325
51.0204,0.000086,51.0506,0.000175
51.1492,0.000118,51.1796,0.000293
51.2781,0.000297,51.3085,0.000404
51.4069,0.000426,51.4374,0.000197
51.5357,0.000594,51.5663,0.00005
51.6646,0.000683,51.6952,-0.000011
51.7934,0.000651,51.8241,-0.000036
51.9223,0.000569,51.9531,0
52.0511,0.000497,52.082,-0.000168
52.1799,0.00054,52.2109,-0.000222
52.3088,0.000551,52.3398,-0.000182
52.4376,0.000526,52.4687,-0.000215
52.5664,0.000472,52.5976,0.000011
52.6953,0.000365,52.7265,0.000111
52.8241,0.000354,52.8555,-0.000057
52.953,0.000358,52.9844,-0.000039
53.0818,0.000304,53.1133,0.0001
53.2106,0.000372,53.2422,0.000232
53.3395,0.000551,53.3711,0.000325
53.4683,0.000697,53.5,0.000365
53.5972,0.000665,53.629,0.000401
53.726,0.000604,53.7579,0.000426
53.8548,0.000619,53.8868,0.000597
53.9837,0.000361,54.0157,0.000758
54.1125,0.000025,54.1446,0.000862
54.2414,-0.000089,54.2735,0.001227
54.3702,-0.000118,54.4025,0.001416
54.499,-0.000061,54.5314,0.00133
54.6279,0.000097,54.6603,0.001409
54.7567,0.000207,54.7892,0.001509
54.8856,0.0001,54.9181,0.001509
55.0144,-0.000064,55.047,0.001481
55.1432,-0.000107,55.1759,0.00137
55.2721,-0.000086,55.3049,0.001127
55.4009,-0.000064,55.4338,0.000744
55.5298,-0.000046,55.5627,0.000494
55.6586,0.000132,55.6916,0.000594
55.7874,0.000397,55.8205,0.000622
55.9163,0.000629,55.9494,0.000526
56.0451,0.000712,56.0784,0.000476
56.1739,0.000558,56.2073,0.000436
56.3028,0.000379,56.3362,0.000501
56.4316,0.00034,56.4651,0.000615
56.5605,0.000329,56.594,0.000665
56.6893,0.000257,56.7229,0.000622
56.8181,0.000161,56.8519,0.000554
56.947,0.000165,56.9808,0.000426
57.0758,0.000279,57.1097,0.000343
57.2047,0.000297,57.2386,0.000583
57.3335,0.000197,57.3675,0.000776
57.4623,0.000179,57.4964,0.00073
57.5912,0.000257,57.6253,0.00069
57.72,0.000343,57.7543,0.000526
57.8489,0.000318,57.8832,0.000361
57.9777,0.00025,58.0121,0.000333
58.1065,0.00025,58.141,0.000315
58.2354,0.000139,58.2699,0.000519
58.3642,-0.000125,58.3988,0.000601
58.4931,-0.00029,58.5278,0.000308
58.6219,-0.000243,58.6567,0.00029
58.7507,-0.000165,58.7856,0.000533
58.8796,-0.000175,58.9145,0.00044
59.0084,-0.000143,59.0434,0.000265
59.1373,-0.000032,59.1723,0.000311
59.2661,-0.000064,59.3013,0.000254
59.3949,-0.000179,59.4302,0.000111
59.5238,-0.000147,59.5591,0.000118
59.6526,0.000004,59.688,0.000111
59.7814,0.000222,59.8169,0.000036
59.9103,0.000583,59.9458,0.000021
60.0391,0.000994,60.0747,0.000093
60.168,0.001352,60.2037,0.000104
60.2968,0.001774,60.3326,0.000043
60.4256,0.002285,60.4615,0.000107
60.5545,0.002611,60.5904,0.000293
60.6833,0.002643,60.7193,0.000429
60.8122,0.002546,60.8482,0.000422
60.941,0.002235,60.9772,0.000397
61.0698,0.001674,61.1061,0.000497
61.1987,0.001109,61.235,0.000504
61.3275,0.000772,61.3639,0.000229
61.4564,0.000601,61.4928,0.000004
61.5852,0.000368,61.6217,0.000014
61.714,0.000257,61.7507,0.000068
61.8429,0.000401,61.8796,0.000229
61.9717,0.000526,62.0085,0.000401
62.1006,0.000504,62.1374,0.000397
62.2294,0.000479,62.2663,0.00044
62.3582,0.000615,62.3952,0.000522
62.4871,0.000898,62.5241,0.00049
62.6159,0.001055,62.6531,0.000397
62.7448,0.001069,62.782,0.0003
62.8736,0.000905,62.9109,0.00024
63.0024,0.000579,63.0398,0.00015
63.1313,0.000383,63.1687,0.000125
63.2601,0.000361,63.2976,0.000418
63.389,0.000393,63.4266,0.000651
63.5178,0.00044,63.5555,0.000433
63.6466,0.000447,63.6844,0.000232
63.7755,0.000515,63.8133,0.000261
63.9043,0.000587,63.9422,0.000222
64.0331,0.000401,64.0711,0.000122
64.162,0.000215,64.2001,0.000004
64.2908,0.000232,64.329,-0.000064
64.4197,0.000172,64.4579,0.000111
64.5485,-0.000021,64.5868,0.000361
64.6773,-0.000072,64.7157,0.000519
64.8062,0.000021,64.8446,0.000497
64.935,0.000093,64.9735,0.000297
65.0639,0.000211,65.1025,0.000211
65.1927,0.000454,65.2314,0.000283
65.3215,0.000572,65.3603,0.000218
65.4504,0.000587,65.4892,0.000125
65.5792,0.000665,65.6181,0.000161
65.7081,0.000672,65.747,0.000215
65.8369,0.000604,65.876,0.000129
65.9657,0.000558,66.0049,0.000132
66.0946,0.00044,66.1338,0.000147
66.2234,0.000315,66.2627,0.000036
66.3523,0.00029,66.3916,0.000036
66.4811,0.000318,66.5205,0.000014
66.6099,0.000404,66.6495,0.000061
66.7388,0.000511,66.7784,0.000136
66.8676,0.000465,66.9073,0.000125
66.9965,0.000361,67.0362,0.000114
67.1253,0.00025,67.1651,0.00005
67.2541,0.000086,67.294,0.000007
67.383,0.000057,67.4229,-0.000032
67.5118,0.000061,67.5519,-0.000011
67.6406,0.000025,67.6808,0.000046
67.7695,0.000114,67.8097,0.00005
67.8983,0.000161,67.9386,0.000032
68.0272,0.000186,68.0675,0.000036
68.156,0.000272,68.1964,0.000154
68.2848,0.00024,68.3254,0.000154
68.4137,0.000197,68.4543,-0.0001
68.5425,0.000193,68.5832,-0.000236
68.6714,0.000143,68.7121,-0.000139
68.8002,0.00025,68.841,-0.000079
68.929,0.000336,68.9699,-0.000097
69.0579,0.000132,69.0989,-0.000129
69.1867,-0.000054,69.2278,-0.000197
69.3156,-0.000011,69.3567,-0.000376
69.4444,0.000079,69.4856,-0.000519
69.5732,0.000086,69.6145,-0.000415
69.7021,0.000097,69.7434,-0.000358
69.8309,0.000165,69.8723,-0.000429
69.9598,0.000229,70.0013,-0.000204
70.0886,0.00029,70.1302,0.000043
70.2174,0.000347,70.2591,-0.000014
70.3463,0.000501,70.388,-0.000007
70.4751,0.000765,70.5169,0.000007
70.604,0.000894,70.6458,-0.00015
70.7328,0.000855,70.7748,-0.000343
70.8616,0.000751,70.9037,-0.000361
70.9905,0.000637,71.0326,-0.000279
71.1193,0.000519,71.1615,-0.000165
71.2482,0.000501,71.2904,-0.000014
71.377,0.000476,71.4193,-0.000036
71.5058,0.000426,71.5483,-0.000193
71.6347,0.000454,71.6772,-0.000275
71.7635,0.000497,71.8061,-0.000129
71.8923,0.000483,71.935,0
72.0212,0.0003,72.0639,-0.000072
72.15,0.000132,72.1928,-0.000093
72.2789,0.000186,72.3217,-0.000154
72.4077,0.000379,72.4507,-0.000283
72.5365,0.000454,72.5796,-0.000304
72.6654,0.000315,72.7085,-0.000218
72.7942,0.000215,72.8374,-0.000186
72.9231,0.000097,72.9663,-0.000304
73.0519,-0.000039,73.0952,-0.000458
73.1807,0.000018,73.2242,-0.000426
73.3096,0.000172,73.3531,-0.000329
73.4384,0.000383,73.482,-0.000165
73.5673,0.000508,73.6109,-0.000086
73.6961,0.000418,73.7398,-0.000265
73.8249,0.000386,73.8687,-0.0003
73.9538,0.000443,73.9977,-0.000139
74.0826,0.000454,74.1266,-0.000079
74.2115,0.000519,74.2555,-0.000014
74.3403,0.000533,74.3844,-0.000021
74.4691,0.000347,74.5133,-0.000168
74.598,0.000165,74.6422,-0.000114
74.7268,0.000046,74.7711,0.000036
74.8557,0.000068,74.9001,0.000111
74.9845,0.000265,75.029,0.000232
75.1133,0.000447,75.1579,0.000147
75.2422,0.000536,75.2868,-0.000021
75.371,0.000715,75.4157,0.000011
75.4998,0.00098,75.5446,0.000093
75.6287,0.001084,75.6736,0.000089
75.7575,0.00098,75.8025,-0.000011
75.8864,0.000844,75.9314,-0.00005
76.0152,0.000783,76.0603,-0.000025
76.144,0.000787,76.1892,-0.000043
76.2729,0.000855,76.3181,-0.000068
76.4017,0.000873,76.4471,-0.000061
76.5306,0.000826,76.576,-0.000132
76.6594,0.000798,76.7049,-0.000207
76.7882,0.000762,76.8338,-0.000139
76.9171,0.00074,76.9627,0.000004
77.0459,0.000873,77.0916,0.000072
77.1748,0.000937,77.2205,0.000111
77.3036,0.000737,77.3495,0.000082
77.4324,0.000601,77.4784,-0.000075
77.5613,0.000594,77.6073,-0.000175
77.6901,0.00059,77.7362,-0.000157
77.819,0.000737,77.8651,-0.000025
77.9478,0.001152,77.994,0.000143
78.0766,0.001802,78.123,0.000293
78.2055,0.002471,78.2519,0.000225
78.3343,0.002968,78.3808,0.000111
78.4632,0.003204,78.5097,0.000311
78.592,0.003451,78.6386,0.000483
78.7208,0.003676,78.7675,0.000447
78.8497,0.00353,78.8965,0.000336
78.9785,0.00329,79.0254,0.000265
79.1073,0.003151,79.1543,0.000247
79.2362,0.00285,79.2832,0.000232
79.365,0.002457,79.4121,0.000161
79.4939,0.00231,79.541,0.000132
79.6227,0.002364,79.6699,0.000161
79.7515,0.002342,79.7989,0.000165
79.8804,0.002156,79.9278,0.000286
80.0092,0.001913,80.0567,0.000379
80.1381,0.001631,80.1856,0.000286
80.2669,0.001345,80.3145,0.000104
80.3957,0.001227,80.4434,0.000021
80.5246,0.001187,80.5724,0.000061
80.6534,0.001116,80.7013,0.000086
80.7823,0.000966,80.8302,0.00019
80.9111,0.000622,80.9591,0.000236
81.0399,0.000501,81.088,0.000165
81.1688,0.000594,81.2169,0.00019
81.2976,0.000483,81.3459,0.000165
81.4265,0.000304,81.4748,0.000093
81.5553,0.000132,81.6037,0.000175
81.6841,-0.000097,81.7326,0.000343
81.813,-0.000211,81.8615,0.000426
81.9418,-0.000111,81.9904,0.000443
82.0707,0.000089,82.1193,0.000597
82.1995,0.000136,82.2483,0.000762
82.3283,0.000229,82.3772,0.000705
82.4572,0.000386,82.5061,0.000658
82.586,0.000401,82.635,0.00079
82.7149,0.000411,82.7639,0.000701
82.8437,0.000408,82.8928,0.000418
82.9725,0.000293,83.0218,0.000447
83.1014,0.000111,83.1507,0.00059
83.2302,0.000132,83.2796,0.000494
83.359,0.000551,83.4085,0.000308
83.4879,0.000991,83.5374,0.000279
83.6167,0.001212,83.6663,0.000218
83.7456,0.001316,83.7953,-0.000032
83.8744,0.001245,83.9242,-0.000075
84.0032,0.001112,84.0531,0.000057
84.1321,0.001062,84.182,0.000143
84.2609,0.000955,84.3109,0.000229
84.3898,0.000862,84.4398,0.000143
84.5186,0.000808,84.5687,0.000143
84.6474,0.000744,84.6977,0.000265
84.7763,0.000722,84.8266,0.000165
84.9051,0.000679,84.9555,0.0002
85.034,0.000601,85.0844,0.000461
85.1628,0.000483,85.2133,0.000554
85.2916,0.000386,85.3422,0.000619
85.4205,0.000451,85.4712,0.000651
85.5493,0.000519,85.6001,0.000436
85.6782,0.000297,85.729,0.000354
85.807,0.000068,85.8579,0.000404
85.9358,0.000082,85.9868,0.000347
86.0647,0.000136,86.1157,0.000293
86.1935,0.000007,86.2447,0.000261
86.3224,-0.000254,86.3736,0.000257
86.4512,-0.000383,86.5025,0.000297
86.58,-0.000386,86.6314,0.000393
86.7089,-0.000315,86.7603,0.000558
86.8377,-0.000136,86.8892,0.000705
86.9665,-0.000089,87.0181,0.000751
87.0954,-0.000029,87.1471,0.000755
87.2242,0.000136,87.276,0.00079
87.3531,0.000061,87.4049,0.000762
87.4819,-0.000143,87.5338,0.000726
87.6107,-0.000168,87.6627,0.000869
87.7396,-0.000211,87.7916,0.00084
87.8684,-0.000368,87.9206,0.000733
87.9973,-0.000465,88.0495,0.000583
88.1261,-0.000447,88.1784,0.000483
88.2549,-0.00039,88.3073,0.000333
88.3838,-0.000293,88.4362,0.000197
88.5126,-0.000064,88.5651,0.000204
88.6415,0.000104,88.694,0.000118
88.7703,0.000036,88.823,0.000064
88.8991,-0.000032,88.9519,0.000261
89.028,0.000079,89.0808,0.000422
89.1568,0.00005,89.2097,0.000486
89.2857,-0.000272,89.3386,0.000501
89.4145,-0.000451,89.4675,0.000365
89.5433,-0.000336,89.5965,0.000279
89.6722,-0.000243,89.7254,0.000179
89.801,-0.000422,89.8543,0.000032
89.9299,-0.000429,89.9832,0.000211
90.0587,-0.000043,90.1121,0.000343
90.1875,0.000111,90.241,0.000157
90.3164,-0.000089,90.37,-0.000014
90.4452,-0.000193,90.4989,-0.000046
90.5741,-0.000082,90.6278,0.00015
90.7029,0.000043,90.7567,0.000304
90.8317,0.000046,90.8856,0.000222
90.9606,0.000136,91.0145,0.000265
91.0894,0.000379,91.1434,0.000501
91.2182,0.000426,91.2724,0.000633
91.3471,0.000265,91.4013,0.000572
91.4759,0.000254,91.5302,0.000619
91.6048,0.000311,91.6591,0.000876
91.7336,0.000089,91.788,0.000898
91.8624,-0.000154,91.9169,0.000694
91.9913,-0.000007,92.0459,0.000676
92.1201,0.000232,92.1748,0.000708
92.249,0.000329,92.3037,0.000583
92.3778,0.000361,92.4326,0.000404
92.5066,0.000254,92.5615,0.000426
92.6355,0.000068,92.6904,0.000551
92.7643,-0.000107,92.8194,0.000451
92.8932,-0.000193,92.9483,0.000215
93.022,-0.000222,93.0772,0.000082
93.1508,-0.00034,93.2061,0.000029
93.2797,-0.000522,93.335,-0.000057
93.4085,-0.000536,93.4639,-0.000036
93.5374,-0.000354,93.5928,0.000079
93.6662,-0.000161,93.7218,0.000161
93.795,0.000072,93.8507,0.000207
93.9239,0.000436,93.9796,0.000207
94.0527,0.000526,94.1085,0.00019
94.1816,0.000418,94.2374,0.0002
94.3104,0.000647,94.3663,0.00024
94.4392,0.001141,94.4953,0.00024
94.5681,0.001595,94.6242,0.000204
94.6969,0.001835,94.7531,0.000325
94.8257,0.001867,94.882,0.000572
94.9546,0.001699,95.0109,0.000422
95.0834,0.001352,95.1398,-0.000004
95.2123,0.000969,95.2688,-0.00015
95.3411,0.000494,95.3977,-0.00015
95.4699,0.000111,95.5266,-0.00019
95.5988,-0.000093,95.6555,-0.000125
95.7276,-0.000376,95.7844,0.000021
95.8565,-0.000536,95.9133,0.000082
95.9853,-0.000415,96.0422,0.000129
96.1141,-0.00044,96.1712,0.000311
96.243,-0.00054,96.3001,0.000404
96.3718,-0.00044,96.429,0.000193
96.5007,-0.000376,96.5579,-0.000011
96.6295,-0.000393,96.6868,0.000129
96.7583,-0.000354,96.8157,0.000354
96.8872,-0.000333,96.9447,0.000404
97.016,-0.000411,97.0736,0.000426
97.1449,-0.00054,97.2025,0.000561
97.2737,-0.000662,97.3314,0.000633
97.4025,-0.00084,97.4603,0.000333
97.5314,-0.000969,97.5892,-0.000154
97.6602,-0.000815,97.7182,-0.000315
97.7891,-0.000551,97.8471,-0.000218
97.9179,-0.000401,97.976,-0.0002
98.0467,-0.000236,98.1049,-0.000318
98.1756,-0.000054,98.2338,-0.000415
98.3044,0.000004,98.3627,-0.0003
98.4332,-0.000075,98.4916,-0.000186
98.5621,-0.000154,98.6206,-0.000125
98.6909,-0.000222,98.7495,-0.000021
98.8198,-0.000272,98.8784,-0.000032
98.9486,-0.000207,99.0073,-0.000182
99.0774,-0.000204,99.1362,-0.000175