Material,Repetition rate [Hz],Particles > 20 nm ,Sa roughness [nm],Thickness [µm],Deposition rate [µm /hour]
YAG,20,110,4.138,2,4
,100,83,0.5,2,20
Er(1%):YGG,20,28,1.537,2,4
,100,2,0.469,2,20