Figure_1.csv contains the data for XRD spectra in figure 1 in the paper, with comma separated values for XRD spectra of Er(1%):YGG and YAG films grown at 20 and 100 Hz.
Figure_2.csv contains the data for surface profile slice in figure 2 in the paper, with comma separated values for surface profile of the YAG films grown at 20 and 100 Hz.
Figure_3.csv contains the data for figure 3 in the paper, with comma separated values for the XRD peak position as a function of repetition rate for YGG films.
Figure_4.csv contains the data for figure 4 in the paper, with comma separated values for the centre of the interefence peaks in the X and Y direction for 2d profile of a YGG film. 
Table_1.csv contains the data for table 1 in the paper, with comma separated values for the surface metrology of the YAG and YGG films grown at 20 and 100 Hz repetition rate.