Suspended silicon waveguides for long-wave infrared wavelengths
Suspended silicon waveguides for long-wave infrared wavelengths
In this Letter, we report suspended silicon waveguides operating at a wavelength of 7.67 μm with a propagation loss of 3.1± 0.3 dB∕cm. To our knowledge, this is the first demonstration of low-loss silicon waveguides at such a long wavelength, with loss comparable to other platforms that use more exotic materials. The suspended Si waveguide core is supported by a sub-wavelength grating that provides lateral optical confinement while also allowing access to the buried oxide layer so that it can be wet etched using hydrofluoric acid. We also demonstrate low-loss waveguide bends and s-bends.
Integrated optics, Infrared, Semiconductors, Subwavelength structures, Gratings
795-798
Soler Penadés, J.
f18f3619-0d71-4547-95fd-dd38c37b7adb
Sánchez-Postigo, A.
e4f124db-3f45-426d-879d-02d22ea15adc
Nedeljković, M.
b64e21c2-1b95-479d-a35c-3456dff8c796
Ortega-Moñux, A.
1ddc0007-ad93-424f-909e-1891ebd4973e
Wangüemert-Pérez, J. G.
28f10fc0-17b9-44f0-bad0-dab421273c95
Xu, Y.
061a29cf-0df1-4c62-b133-65256100bcef
Halir, R.
e3f8d90b-0067-4e1a-a6b1-0217c342dd55
Qu, Z.
ff376b43-4352-4bd2-8420-c1c6cfccd45c
Khokhar, A. Z.
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Osman, A.
eb387b50-c718-47df-ac90-97b2efd3e335
Cao, W.
5202fa2b-a471-45d4-84e9-9104dffdbbfc
Littlejohns, C. G.
d2837f04-0a83-4bf9-acb2-618aa42a0cad
Cheben, P.
9a2e25a5-6aa0-414e-a061-23416efedebc
Molina-Fernández, I.
9a123b9e-a12a-417e-b35d-f55d589af32b
Mashanovich, G.Z.
c806e262-af80-4836-b96f-319425060051
9 February 2018
Soler Penadés, J.
f18f3619-0d71-4547-95fd-dd38c37b7adb
Sánchez-Postigo, A.
e4f124db-3f45-426d-879d-02d22ea15adc
Nedeljković, M.
b64e21c2-1b95-479d-a35c-3456dff8c796
Ortega-Moñux, A.
1ddc0007-ad93-424f-909e-1891ebd4973e
Wangüemert-Pérez, J. G.
28f10fc0-17b9-44f0-bad0-dab421273c95
Xu, Y.
061a29cf-0df1-4c62-b133-65256100bcef
Halir, R.
e3f8d90b-0067-4e1a-a6b1-0217c342dd55
Qu, Z.
ff376b43-4352-4bd2-8420-c1c6cfccd45c
Khokhar, A. Z.
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Osman, A.
eb387b50-c718-47df-ac90-97b2efd3e335
Cao, W.
5202fa2b-a471-45d4-84e9-9104dffdbbfc
Littlejohns, C. G.
d2837f04-0a83-4bf9-acb2-618aa42a0cad
Cheben, P.
9a2e25a5-6aa0-414e-a061-23416efedebc
Molina-Fernández, I.
9a123b9e-a12a-417e-b35d-f55d589af32b
Mashanovich, G.Z.
c806e262-af80-4836-b96f-319425060051
Soler Penadés, J., Sánchez-Postigo, A., Nedeljković, M., Ortega-Moñux, A., Wangüemert-Pérez, J. G., Xu, Y., Halir, R., Qu, Z., Khokhar, A. Z., Osman, A., Cao, W., Littlejohns, C. G., Cheben, P., Molina-Fernández, I. and Mashanovich, G.Z.
(2018)
Suspended silicon waveguides for long-wave infrared wavelengths.
Optics Letters, 43 (4), .
(doi:10.1364/OL.43.000795).
Abstract
In this Letter, we report suspended silicon waveguides operating at a wavelength of 7.67 μm with a propagation loss of 3.1± 0.3 dB∕cm. To our knowledge, this is the first demonstration of low-loss silicon waveguides at such a long wavelength, with loss comparable to other platforms that use more exotic materials. The suspended Si waveguide core is supported by a sub-wavelength grating that provides lateral optical confinement while also allowing access to the buried oxide layer so that it can be wet etched using hydrofluoric acid. We also demonstrate low-loss waveguide bends and s-bends.
Text
Suspended silicon waveguides for long-wave infrared wavelengths
- Accepted Manuscript
Text
ol-43-4-795
- Version of Record
More information
Accepted/In Press date: 14 December 2017
e-pub ahead of print date: 18 December 2017
Published date: 9 February 2018
Keywords:
Integrated optics, Infrared, Semiconductors, Subwavelength structures, Gratings
Identifiers
Local EPrints ID: 416727
URI: http://eprints.soton.ac.uk/id/eprint/416727
ISSN: 0146-9592
PURE UUID: 5bdf7283-1989-4283-96b1-80a09d0b96b1
Catalogue record
Date deposited: 05 Jan 2018 17:30
Last modified: 21 Nov 2024 05:02
Export record
Altmetrics
Contributors
Author:
J. Soler Penadés
Author:
A. Sánchez-Postigo
Author:
M. Nedeljković
Author:
A. Ortega-Moñux
Author:
J. G. Wangüemert-Pérez
Author:
Y. Xu
Author:
R. Halir
Author:
Z. Qu
Author:
A. Z. Khokhar
Author:
A. Osman
Author:
W. Cao
Author:
C. G. Littlejohns
Author:
P. Cheben
Author:
I. Molina-Fernández
Author:
G.Z. Mashanovich
Download statistics
Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.
View more statistics