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Suspended silicon waveguides for long-wave infrared wavelengths

Suspended silicon waveguides for long-wave infrared wavelengths
Suspended silicon waveguides for long-wave infrared wavelengths

In this Letter, we report suspended silicon waveguides operating at a wavelength of 7.67 μm with a propagation loss of 3.1± 0.3 dB∕cm. To our knowledge, this is the first demonstration of low-loss silicon waveguides at such a long wavelength, with loss comparable to other platforms that use more exotic materials. The suspended Si waveguide core is supported by a sub-wavelength grating that provides lateral optical confinement while also allowing access to the buried oxide layer so that it can be wet etched using hydrofluoric acid. We also demonstrate low-loss waveguide bends and s-bends.

Integrated optics, Infrared, Semiconductors, Subwavelength structures, Gratings
0146-9592
795-798
Soler Penadés, J.
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Sánchez-Postigo, A.
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Nedeljković, M.
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Ortega-Moñux, A.
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Wangüemert-Pérez, J. G.
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Xu, Y.
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Halir, R.
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Qu, Z.
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Khokhar, A. Z.
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Osman, A.
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Cao, W.
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Littlejohns, C. G.
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Cheben, P.
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Molina-Fernández, I.
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Mashanovich, G.Z.
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Soler Penadés, J.
f18f3619-0d71-4547-95fd-dd38c37b7adb
Sánchez-Postigo, A.
e4f124db-3f45-426d-879d-02d22ea15adc
Nedeljković, M.
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Ortega-Moñux, A.
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Wangüemert-Pérez, J. G.
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Xu, Y.
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Halir, R.
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Qu, Z.
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Khokhar, A. Z.
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Osman, A.
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Cao, W.
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Littlejohns, C. G.
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Cheben, P.
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Molina-Fernández, I.
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Mashanovich, G.Z.
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Soler Penadés, J., Sánchez-Postigo, A., Nedeljković, M., Ortega-Moñux, A., Wangüemert-Pérez, J. G., Xu, Y., Halir, R., Qu, Z., Khokhar, A. Z., Osman, A., Cao, W., Littlejohns, C. G., Cheben, P., Molina-Fernández, I. and Mashanovich, G.Z. (2018) Suspended silicon waveguides for long-wave infrared wavelengths. Optics Letters, 43 (4), 795-798. (doi:10.1364/OL.43.000795).

Record type: Letter

Abstract

In this Letter, we report suspended silicon waveguides operating at a wavelength of 7.67 μm with a propagation loss of 3.1± 0.3 dB∕cm. To our knowledge, this is the first demonstration of low-loss silicon waveguides at such a long wavelength, with loss comparable to other platforms that use more exotic materials. The suspended Si waveguide core is supported by a sub-wavelength grating that provides lateral optical confinement while also allowing access to the buried oxide layer so that it can be wet etched using hydrofluoric acid. We also demonstrate low-loss waveguide bends and s-bends.

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Accepted/In Press date: 14 December 2017
e-pub ahead of print date: 18 December 2017
Published date: 9 February 2018
Keywords: Integrated optics, Infrared, Semiconductors, Subwavelength structures, Gratings

Identifiers

Local EPrints ID: 416727
URI: https://eprints.soton.ac.uk/id/eprint/416727
ISSN: 0146-9592
PURE UUID: 5bdf7283-1989-4283-96b1-80a09d0b96b1
ORCID for J. Soler Penadés: ORCID iD orcid.org/0000-0002-1706-8533
ORCID for A. Osman: ORCID iD orcid.org/0000-0001-6575-3861
ORCID for W. Cao: ORCID iD orcid.org/0000-0003-1431-7060

Catalogue record

Date deposited: 05 Jan 2018 17:30
Last modified: 20 Jul 2019 04:38

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Contributors

Author: A. Sánchez-Postigo
Author: M. Nedeljković
Author: A. Ortega-Moñux
Author: J. G. Wangüemert-Pérez
Author: Y. Xu
Author: R. Halir
Author: Z. Qu
Author: A. Z. Khokhar
Author: A. Osman ORCID iD
Author: W. Cao ORCID iD
Author: C. G. Littlejohns
Author: P. Cheben
Author: I. Molina-Fernández

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