Pulse energy packing effects on material transport during laser processing of < 1 | 1 | 1 > silicon
Pulse energy packing effects on material transport during laser processing of < 1 | 1 | 1 > silicon
The effects of energy pulse packing on material transport during single-pulse laser processing of < 1 | 1 | 1 > silicon is studied using temporarily shaped pulses with durations from 50 to 150 ns. Six regimes of material transport were identified and disambiguated through energy packing considerations over a range of pulse durations. Energy packing has been shown to shift the interaction to energetically costlier regimes without appreciable benefit in either depth, material removal or crater morphology and quality.
Pangovski, Krste
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Teh, Peh Siong
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Lin, Dejiao
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Alam, Shaiful
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Richardson, David J.
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O’Neill, William
47dca119-3604-4013-aa82-cf83228c3476
1 January 2018
Pangovski, Krste
a878311f-44ed-4a29-bedd-d3486fd82e42
Teh, Peh Siong
ec22f853-00e2-42a7-9e68-8b1c5eee1271
Lin, Dejiao
3f549d76-a6b0-47a7-a1be-c0daa7d47468
Alam, Shaiful
2b6bdbe5-ddcc-4a88-9057-299360b93435
Richardson, David J.
ebfe1ff9-d0c2-4e52-b7ae-c1b13bccdef3
O’Neill, William
47dca119-3604-4013-aa82-cf83228c3476
Pangovski, Krste, Teh, Peh Siong, Lin, Dejiao, Alam, Shaiful, Richardson, David J. and O’Neill, William
(2018)
Pulse energy packing effects on material transport during laser processing of < 1 | 1 | 1 > silicon.
Applied Physics A: Materials Science and Processing, 124 (1), [5].
(doi:10.1007/s00339-017-1415-2).
Abstract
The effects of energy pulse packing on material transport during single-pulse laser processing of < 1 | 1 | 1 > silicon is studied using temporarily shaped pulses with durations from 50 to 150 ns. Six regimes of material transport were identified and disambiguated through energy packing considerations over a range of pulse durations. Energy packing has been shown to shift the interaction to energetically costlier regimes without appreciable benefit in either depth, material removal or crater morphology and quality.
Text
s00339-017-1415-2
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More information
Accepted/In Press date: 16 November 2017
e-pub ahead of print date: 28 November 2017
Published date: 1 January 2018
Identifiers
Local EPrints ID: 417486
URI: http://eprints.soton.ac.uk/id/eprint/417486
ISSN: 0947-8396
PURE UUID: 186de0d6-4dfa-4c64-8202-c1fd6f846ad4
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Date deposited: 01 Feb 2018 17:30
Last modified: 06 Jun 2024 01:33
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Contributors
Author:
Krste Pangovski
Author:
Peh Siong Teh
Author:
Dejiao Lin
Author:
Shaiful Alam
Author:
William O’Neill
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