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Pulse energy packing effects on material transport during laser processing of < 1 | 1 | 1 > silicon

Pulse energy packing effects on material transport during laser processing of < 1 | 1 | 1 > silicon
Pulse energy packing effects on material transport during laser processing of < 1 | 1 | 1 > silicon

The effects of energy pulse packing on material transport during single-pulse laser processing of < 1 | 1 | 1 > silicon is studied using temporarily shaped pulses with durations from 50 to 150 ns. Six regimes of material transport were identified and disambiguated through energy packing considerations over a range of pulse durations. Energy packing has been shown to shift the interaction to energetically costlier regimes without appreciable benefit in either depth, material removal or crater morphology and quality.

0947-8396
Pangovski, Krste
a878311f-44ed-4a29-bedd-d3486fd82e42
Teh, Peh Siong
ec22f853-00e2-42a7-9e68-8b1c5eee1271
Lin, Dejiao
3f549d76-a6b0-47a7-a1be-c0daa7d47468
Alam, Shaiful
2b6bdbe5-ddcc-4a88-9057-299360b93435
Richardson, David J.
ebfe1ff9-d0c2-4e52-b7ae-c1b13bccdef3
O’Neill, William
47dca119-3604-4013-aa82-cf83228c3476
Pangovski, Krste
a878311f-44ed-4a29-bedd-d3486fd82e42
Teh, Peh Siong
ec22f853-00e2-42a7-9e68-8b1c5eee1271
Lin, Dejiao
3f549d76-a6b0-47a7-a1be-c0daa7d47468
Alam, Shaiful
2b6bdbe5-ddcc-4a88-9057-299360b93435
Richardson, David J.
ebfe1ff9-d0c2-4e52-b7ae-c1b13bccdef3
O’Neill, William
47dca119-3604-4013-aa82-cf83228c3476

Pangovski, Krste, Teh, Peh Siong, Lin, Dejiao, Alam, Shaiful, Richardson, David J. and O’Neill, William (2018) Pulse energy packing effects on material transport during laser processing of < 1 | 1 | 1 > silicon. Applied Physics A: Materials Science & Processing, 124 (1). (doi:10.1007/s00339-017-1415-2).

Record type: Article

Abstract

The effects of energy pulse packing on material transport during single-pulse laser processing of < 1 | 1 | 1 > silicon is studied using temporarily shaped pulses with durations from 50 to 150 ns. Six regimes of material transport were identified and disambiguated through energy packing considerations over a range of pulse durations. Energy packing has been shown to shift the interaction to energetically costlier regimes without appreciable benefit in either depth, material removal or crater morphology and quality.

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More information

Accepted/In Press date: 16 November 2017
e-pub ahead of print date: 28 November 2017
Published date: 1 January 2018

Identifiers

Local EPrints ID: 417486
URI: https://eprints.soton.ac.uk/id/eprint/417486
ISSN: 0947-8396
PURE UUID: 186de0d6-4dfa-4c64-8202-c1fd6f846ad4

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Date deposited: 01 Feb 2018 17:30
Last modified: 24 May 2018 16:31

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