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Ductile mode dicing for integrated optics facet preparation

Ductile mode dicing for integrated optics facet preparation
Ductile mode dicing for integrated optics facet preparation
We report a ductile dicing process capable of producing optical quality facets in lithium niobate waveguides with an average surface roughness of 0.29 nm. This result represents a nine fold reduction in surface roughness when compared to previous results.
Carpenter, Lewis Glynn
0daa548e-0d42-4b06-b914-45bfbec41759
Berry, Sam
0f768f48-36c4-4599-8917-7aae657378a7
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Gates, James
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, Peter
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Gawith, Corin
926665c0-84c7-4a1d-ae19-ee6d7d14c43e
Carpenter, Lewis Glynn
0daa548e-0d42-4b06-b914-45bfbec41759
Berry, Sam
0f768f48-36c4-4599-8917-7aae657378a7
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Gates, James
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, Peter
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Gawith, Corin
926665c0-84c7-4a1d-ae19-ee6d7d14c43e

Carpenter, Lewis Glynn, Berry, Sam, Holmes, Christopher, Gates, James, Smith, Peter and Gawith, Corin (2018) Ductile mode dicing for integrated optics facet preparation. IEEE ICP2018: 2018 7th IEEE International Conference on Photonics, Langkawi Island, Malaysia. 09 - 11 Apr 2018.

Record type: Conference or Workshop Item (Paper)

Abstract

We report a ductile dicing process capable of producing optical quality facets in lithium niobate waveguides with an average surface roughness of 0.29 nm. This result represents a nine fold reduction in surface roughness when compared to previous results.

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More information

Published date: 9 April 2018
Venue - Dates: IEEE ICP2018: 2018 7th IEEE International Conference on Photonics, Langkawi Island, Malaysia, 2018-04-09 - 2018-04-11

Identifiers

Local EPrints ID: 417960
URI: https://eprints.soton.ac.uk/id/eprint/417960
PURE UUID: 725083a2-e1fb-4fd1-90ee-6bb75ba71784
ORCID for Sam Berry: ORCID iD orcid.org/0000-0002-9538-8655
ORCID for Christopher Holmes: ORCID iD orcid.org/0000-0001-9021-3760
ORCID for James Gates: ORCID iD orcid.org/0000-0001-8671-5987
ORCID for Peter Smith: ORCID iD orcid.org/0000-0003-0319-718X
ORCID for Corin Gawith: ORCID iD orcid.org/0000-0002-3502-3558

Catalogue record

Date deposited: 19 Feb 2018 17:30
Last modified: 17 Oct 2019 00:38

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