READ ME File For 'Dataset for: Ion implantation in silicon for trimming the operating wavelength of ring resonators'

Dataset DOI: 10.5258/SOTON/D0417

ReadMe Author: M. M. Milosevic et. al., University of Southampton

This dataset supports the publication: Ion implantation in silicon for trimming the operating wavelength of ring resonators (DOI: 10.1109/JSTQE.2018.2799660)



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For example

This dataset contains which are used for generating Fig.3 to Fig.9 (except Fig. 7). These figures are plotted using GLE (Graphics Layout Engine). The scripts of Gle are also included in the folds for each figures. In order to generate these figures, you should install Gle
http://glx.sourceforge.net/

The figures are as follows:

Fig. 3  Simulation results of implanted devices showing a transmission spectrum of an un-implanted and Ge ion implanted ring resonator (?=6o).
Fig. 4  Transmission spectra of fabricated ring resonators. (a) As implantation length increases resonant wavelength peak shifts to longer wavelengths (un-annealed samples). (b) As annealing temperatures increases the resonant wavelength peak shifts to shorter wavelengths (?=18o).
Fig. 5  Changes in resonant wavelength shift as a function of implantation length at different annealing temperatures.
Fig. 6  Trimming stability of implanted ring resonators. Changes in resonant wavelength as a function of implantation length, whilst held at an elevated temperature of 220 oC during a period of up to 8 days.
Fig. 8  Transmission spectra of fabricated ring resonators before and after laser annealing (?=18o).
Fig. 9  Changes in resonant wavelength shift per implanted length as a function of laser power used for localized annealing.


Geographic location of data collection: University of Southampton, U.K.

Related projects:
This work was funded by EPSRC project under the “Silicon Photonics for Future Systems”, “Electronic-Photonic convergence”, “Laser-Engineered Silicon” and “CORNERSTONE” projects. Reed is a Royal Society Wolfson Research Merit Award holder. He is grateful to the Wolfson Foundation and the Royal Society for funding of the award. Thomson acknowledges funding from the Royal Society for his University Research Fellowship. CGL acknowledges funding from National Research Foundation of Singapore (NRF-CRP12-2013-04).


Dataset available under a CC BY 4.0 licence


Publisher: University of Southampton, U.K.


Date: January 2018