Particulate reduction in ternary-compound film growth via pulsed laser deposition from segmented binary-targets
Particulate reduction in ternary-compound film growth via pulsed laser deposition from segmented binary-targets
We present the hetero-epitaxial growth of high-quality crystalline Y3Ga5O12 onto a <100>-oriented YAG substrate via pulsed laser deposition, using mixed ternary-compound and segmented binary-compound targets. We observe that a Y3Ga5O12 film fabricated using a segmented target (Y2O3/Ga2O3) contained ~ 100 times fewer scattering points than a film grown using a mixed Y3Ga5O12 target. We show that following ablation, the surface of the mixed compound (ternary) target had laser-induced cone structures, whereas the surface of single compound (binary) targets did not. It is concluded that the different ablation dynamics of the oxide constituents in the respective targets plays a significant role in the origin of the scattering points in the resultant films.
Grant-Jacob, James A.
c5d144d8-3c43-4195-8e80-edd96bfda91b
Prentice, Jake J.
a053f4e8-3ebd-4625-a703-fc7b03f54e9c
Beecher, Stephen J.
b3664adc-d6b5-4a5a-a09a-8e1415c6d3f5
Shepherd, David P.
9fdd51c4-39d6-41b3-9021-4c033c2f4ead
Eason, Robert W.
e38684c3-d18c-41b9-a4aa-def67283b020
Mackenzie, Jacob I.
1d82c826-fdbf-425b-ac04-be43ccf12008
7 March 2018
Grant-Jacob, James A.
c5d144d8-3c43-4195-8e80-edd96bfda91b
Prentice, Jake J.
a053f4e8-3ebd-4625-a703-fc7b03f54e9c
Beecher, Stephen J.
b3664adc-d6b5-4a5a-a09a-8e1415c6d3f5
Shepherd, David P.
9fdd51c4-39d6-41b3-9021-4c033c2f4ead
Eason, Robert W.
e38684c3-d18c-41b9-a4aa-def67283b020
Mackenzie, Jacob I.
1d82c826-fdbf-425b-ac04-be43ccf12008
Grant-Jacob, James A., Prentice, Jake J., Beecher, Stephen J., Shepherd, David P., Eason, Robert W. and Mackenzie, Jacob I.
(2018)
Particulate reduction in ternary-compound film growth via pulsed laser deposition from segmented binary-targets.
Materials Research Express.
(doi:10.1088/2053-1591/aab0ef).
Abstract
We present the hetero-epitaxial growth of high-quality crystalline Y3Ga5O12 onto a <100>-oriented YAG substrate via pulsed laser deposition, using mixed ternary-compound and segmented binary-compound targets. We observe that a Y3Ga5O12 film fabricated using a segmented target (Y2O3/Ga2O3) contained ~ 100 times fewer scattering points than a film grown using a mixed Y3Ga5O12 target. We show that following ablation, the surface of the mixed compound (ternary) target had laser-induced cone structures, whereas the surface of single compound (binary) targets did not. It is concluded that the different ablation dynamics of the oxide constituents in the respective targets plays a significant role in the origin of the scattering points in the resultant films.
Text
IOP_submitted_MRX-106285
- Accepted Manuscript
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Accepted/In Press date: 20 February 2018
e-pub ahead of print date: 20 February 2018
Published date: 7 March 2018
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Local EPrints ID: 418309
URI: http://eprints.soton.ac.uk/id/eprint/418309
PURE UUID: 7432cb5e-1e17-4b4b-a7b3-cdf77b3b3daf
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Date deposited: 27 Feb 2018 17:32
Last modified: 16 Mar 2024 04:05
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