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Mid-infrared sensor based on suspended microracetrack resonator with lateral sub-wavelength-grating metamaterial cladding

Mid-infrared sensor based on suspended microracetrack resonator with lateral sub-wavelength-grating metamaterial cladding
Mid-infrared sensor based on suspended microracetrack resonator with lateral sub-wavelength-grating metamaterial cladding

A mid-infrared (MIR) bio-chemical sensor based on a one-time Si etching suspended microracetrack resonator with lateral sub-wavelength-grating (SWG) metamaterial cladding is theoretically and experimentally demonstrated on a commercial 340 nm-thick-top-silicon silicon-on-insulator (SOI) platform. The suspended structure offers an increased interaction area between the mode field and the chemicals under investigation, as well as good sensitivity. The one-time Si etching process also eases the fabrication. The suspended waveguide is optimized to obtain a balance between propagation loss and sensitivity. The suspended microracetrack resonator is experimentally measured at 2 μm wavelength with an extinction ratio (ER) of 12.1 dB and a full-width-at-half-maximum (FWHM) of 0.13 nm, which corresponds to a quality factor (Q factor) of 15300. With the equivalent refractive index method and a specially developed numerical model, the sensing performance based on the waveguide structure has been simulated and analyzed. The simulation results show that the expected sensitivity of fundamental TE mode can achieve 337.5 nm/RIU. This one-time Si etching suspended microracetrack resonator shows great potential for ultra-sensitive MIR optical bio-chemical sensing applications.

Sensors, Silicon nanophotonics, Waveguide devices
1943-0655
1-8
Zhang, Zecen
bfd08efc-a02b-4052-a9f7-134e20b902f7
Ng, Geok Ing
b59f52c9-5da7-4b7b-92cf-25a7d0d79d93
Hu, Ting
4dce8d60-2550-42b0-9535-1e49e504ffab
Qiu, Haodong
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Guo, X.
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Wang, Wanjun
79108a43-c2a9-4a18-9aeb-8a9b45941dd0
Rouifed, Mohamed Said
c498264d-50f4-4003-9d18-b40f318160e2
Liu, Chongyang
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Xia, Jiaxu
4ad76168-d3b7-46a3-9d0f-5626428a23ef
Zhou, Jin
614f5ebf-cf64-4299-b6d3-aee0e91eba8b
Littlejohns, Callum G.
0fd6585d-030d-4d8f-a411-6fc03e083efa
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Wang, Hong
dfd0ec4f-682a-4596-a0d1-171313cc5733
Zhang, Zecen
bfd08efc-a02b-4052-a9f7-134e20b902f7
Ng, Geok Ing
b59f52c9-5da7-4b7b-92cf-25a7d0d79d93
Hu, Ting
4dce8d60-2550-42b0-9535-1e49e504ffab
Qiu, Haodong
1061098e-e16e-49ad-8068-26f68872db23
Guo, X.
941af9ec-ae51-4dd1-a3eb-85a2dc4058be
Wang, Wanjun
79108a43-c2a9-4a18-9aeb-8a9b45941dd0
Rouifed, Mohamed Said
c498264d-50f4-4003-9d18-b40f318160e2
Liu, Chongyang
28ec0e52-d3f6-4bc4-bce1-29d6842267df
Xia, Jiaxu
4ad76168-d3b7-46a3-9d0f-5626428a23ef
Zhou, Jin
614f5ebf-cf64-4299-b6d3-aee0e91eba8b
Littlejohns, Callum G.
0fd6585d-030d-4d8f-a411-6fc03e083efa
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Wang, Hong
dfd0ec4f-682a-4596-a0d1-171313cc5733

Zhang, Zecen, Ng, Geok Ing, Hu, Ting, Qiu, Haodong, Guo, X., Wang, Wanjun, Rouifed, Mohamed Said, Liu, Chongyang, Xia, Jiaxu, Zhou, Jin, Littlejohns, Callum G., Reed, Graham T. and Wang, Hong (2018) Mid-infrared sensor based on suspended microracetrack resonator with lateral sub-wavelength-grating metamaterial cladding. IEEE Photonics Journal, 1-8. (doi:10.1109/JPHOT.2018.2809662).

Record type: Article

Abstract

A mid-infrared (MIR) bio-chemical sensor based on a one-time Si etching suspended microracetrack resonator with lateral sub-wavelength-grating (SWG) metamaterial cladding is theoretically and experimentally demonstrated on a commercial 340 nm-thick-top-silicon silicon-on-insulator (SOI) platform. The suspended structure offers an increased interaction area between the mode field and the chemicals under investigation, as well as good sensitivity. The one-time Si etching process also eases the fabrication. The suspended waveguide is optimized to obtain a balance between propagation loss and sensitivity. The suspended microracetrack resonator is experimentally measured at 2 μm wavelength with an extinction ratio (ER) of 12.1 dB and a full-width-at-half-maximum (FWHM) of 0.13 nm, which corresponds to a quality factor (Q factor) of 15300. With the equivalent refractive index method and a specially developed numerical model, the sensing performance based on the waveguide structure has been simulated and analyzed. The simulation results show that the expected sensitivity of fundamental TE mode can achieve 337.5 nm/RIU. This one-time Si etching suspended microracetrack resonator shows great potential for ultra-sensitive MIR optical bio-chemical sensing applications.

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Accepted/In Press date: 24 February 2018
e-pub ahead of print date: 27 February 2018
Keywords: Sensors, Silicon nanophotonics, Waveguide devices

Identifiers

Local EPrints ID: 418666
URI: https://eprints.soton.ac.uk/id/eprint/418666
ISSN: 1943-0655
PURE UUID: 0901da0a-f8dc-46f7-be95-3441d2141a92

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Date deposited: 16 Mar 2018 17:30
Last modified: 02 Dec 2019 18:19

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Contributors

Author: Zecen Zhang
Author: Geok Ing Ng
Author: Ting Hu
Author: Haodong Qiu
Author: X. Guo
Author: Wanjun Wang
Author: Mohamed Said Rouifed
Author: Chongyang Liu
Author: Jiaxu Xia
Author: Jin Zhou
Author: Callum G. Littlejohns
Author: Graham T. Reed
Author: Hong Wang

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