Pulsed laser deposition of crystalline garnet waveguides at a growth rate of 20 µm per hour
Pulsed laser deposition of crystalline garnet waveguides at a growth rate of 20 µm per hour
We report pulsed laser deposition of high-quality crystalline yttrium aluminium oxide and yttrium gallium oxide with a growth rate approaching 20 μm per hour by using an excimer laser operating at a repetition rate of 100 Hz. This result demonstrates the capability of PLD at 100 Hz for upscaling deposition speeds to a rate that is industrially relevant. In addition, we show that use of this high repetition rate can cause additional heating of the substrate, which in turn affects the film composition. This effect is used as an additional control parameter on the composition, and thus refractive index, of the grown material.
Grant-Jacob, James A.
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Beecher, Stephen J.
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Prentice, Jake J.
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Shepherd, David P.
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Mackenzie, Jacob I.
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Eason, Robert W.
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Grant-Jacob, James A.
c5d144d8-3c43-4195-8e80-edd96bfda91b
Beecher, Stephen J.
b3664adc-d6b5-4a5a-a09a-8e1415c6d3f5
Prentice, Jake J.
a053f4e8-3ebd-4625-a703-fc7b03f54e9c
Shepherd, David P.
9fdd51c4-39d6-41b3-9021-4c033c2f4ead
Mackenzie, Jacob I.
1d82c826-fdbf-425b-ac04-be43ccf12008
Eason, Robert W.
e38684c3-d18c-41b9-a4aa-def67283b020
Grant-Jacob, James A., Beecher, Stephen J., Prentice, Jake J., Shepherd, David P., Mackenzie, Jacob I. and Eason, Robert W.
(2017)
Pulsed laser deposition of crystalline garnet waveguides at a growth rate of 20 µm per hour.
Surface and Coatings Technology.
(doi:10.1016/j.surfcoat.2017.12.008).
Abstract
We report pulsed laser deposition of high-quality crystalline yttrium aluminium oxide and yttrium gallium oxide with a growth rate approaching 20 μm per hour by using an excimer laser operating at a repetition rate of 100 Hz. This result demonstrates the capability of PLD at 100 Hz for upscaling deposition speeds to a rate that is industrially relevant. In addition, we show that use of this high repetition rate can cause additional heating of the substrate, which in turn affects the film composition. This effect is used as an additional control parameter on the composition, and thus refractive index, of the grown material.
Text
SaCT_2017_Submitted_JAGJ_Corrected
- Accepted Manuscript
More information
Accepted/In Press date: 3 December 2017
e-pub ahead of print date: 5 December 2017
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Local EPrints ID: 418733
URI: http://eprints.soton.ac.uk/id/eprint/418733
PURE UUID: 0bc535b8-d197-4a35-8e8a-9a88dde5d70e
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Date deposited: 20 Mar 2018 17:30
Last modified: 16 Mar 2024 05:28
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