Description of data relating to dataset 'Using an Intensity Spatial Light Modulator for Surface Relief Structuring via Multiple Pulse Femtosecond Ablation': Dataset contains supporting data for paper 'Ultrafast Multi-Layer Subtractive Patterning' published in Optics Express CorelDraw 2017 .cdr files used to generate figures in paper, .jpg exports of same .zip files contain ascii data associated with Zescope profilometer depth measurements of samples, scanning electron microscope images of samples, Matlab scripts used to generate original experimental automation code to produce samples, Matlab plotted 3D views of depth data in some cases, line profiles of depth measurements in some cases saveAsciiAsFigs_idealAve20180308 is Matlab script used to produce line profiles from ascii data