High-resolution scanning x-ray diffraction microscopy
High-resolution scanning x-ray diffraction microscopy
Coherent diffractive imaging (CDI) and scanning transmission x-ray microscopy (STXM) are two popular microscopy techniques that have evolved quite independently. CDI promises to reach resolutions below 10 nanometers, but the reconstruction procedures put stringent requirements on data quality and sample preparation. In contrast, STXM features straightforward data analysis, but its resolution is limited by the spot size on the specimen. We demonstrate a ptychographic imaging method that bridges the gap between CDI and STXM by measuring complete diffraction patterns at each point of a STXM scan. The high penetration power of x-rays in combination with the high spatial resolution will allow investigation of a wide range of complex mesoscopic life and material science specimens, such as embedded semiconductor devices or cellular networks.
379-382
Thibault, Pierre
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Dierolf, Martin
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Menzel, Andreas
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Bunk, Oliver
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David, Christian
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Pfeiffer, Franz
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July 2008
Thibault, Pierre
975a4c7b-6ca9-4958-b362-9eba10ab926b
Dierolf, Martin
81ac7cac-fc48-4d39-8154-6788b06c2478
Menzel, Andreas
82ceca70-40ae-40f2-81c4-07c3f485bc15
Bunk, Oliver
9833fa0b-2541-49c4-8e4b-9770064d2806
David, Christian
0725e4ff-9343-435f-a450-475b5e4768cb
Pfeiffer, Franz
90bfb684-c442-458c-8f10-64d0e89cbef1
Thibault, Pierre, Dierolf, Martin, Menzel, Andreas, Bunk, Oliver, David, Christian and Pfeiffer, Franz
(2008)
High-resolution scanning x-ray diffraction microscopy.
Science, 321 (5887), .
(doi:10.1126/science.1158573).
Abstract
Coherent diffractive imaging (CDI) and scanning transmission x-ray microscopy (STXM) are two popular microscopy techniques that have evolved quite independently. CDI promises to reach resolutions below 10 nanometers, but the reconstruction procedures put stringent requirements on data quality and sample preparation. In contrast, STXM features straightforward data analysis, but its resolution is limited by the spot size on the specimen. We demonstrate a ptychographic imaging method that bridges the gap between CDI and STXM by measuring complete diffraction patterns at each point of a STXM scan. The high penetration power of x-rays in combination with the high spatial resolution will allow investigation of a wide range of complex mesoscopic life and material science specimens, such as embedded semiconductor devices or cellular networks.
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Accepted/In Press date: 13 June 2008
e-pub ahead of print date: 18 July 2008
Published date: July 2008
Identifiers
Local EPrints ID: 419327
URI: http://eprints.soton.ac.uk/id/eprint/419327
ISSN: 0036-8075
PURE UUID: e6a8e11e-ce81-4f0f-8c21-fa48d68b7032
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Date deposited: 10 Apr 2018 16:30
Last modified: 15 Mar 2024 19:07
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Contributors
Author:
Pierre Thibault
Author:
Martin Dierolf
Author:
Andreas Menzel
Author:
Oliver Bunk
Author:
Christian David
Author:
Franz Pfeiffer
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