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A Quasi-Concertina force-displacement MEMS probe for measuring biomechanical properties

A Quasi-Concertina force-displacement MEMS probe for measuring biomechanical properties
A Quasi-Concertina force-displacement MEMS probe for measuring biomechanical properties
In this work the development of a novel Quasi-Concertina (QC) microelectromechanical systems (MEMS) force - displacement (F-D) sensor is presented. The developed sensor has a resolution as small as 5.6 nN and 1.25 nm and a range of as much as 5.5 mN and 1000 μm. The performance of the microfabricated proof-of-concept QC MEMS device is in good agreement with our analytical and numerical estimates. Force sensors with these attributes will enable the mechanical properties of biological phenomena to be continuously measured over large F-D ranges without the need to change the measurement instrument. Thus, this sensor will appeal to biologists, biochemists, life scientists, clinicians, engineers, and physicist researchers working to understand the fundamentals of cell biology, the onset and progression of diseases such as cancer, and for the development of tools for the diagnostics, prophylactics and therapeutics of diseases.
0924-4247
67-74
Grech, David
f44a3fe2-5f50-4192-9018-3fccd1612ceb
Tarazona, Antulio
c6ae87c5-c746-4f89-9ff0-9e7b6874e94f
De Leon, Maria Theresa
779b393c-38ac-47dd-b960-818eda45de2c
Kiang, Kian S.
fdb609c6-75aa-4893-85c8-8e50edfda7fe
Zekonyte, Jurgita
c40df725-5ce3-4692-b638-bbb4d847b5ea
Wood, Robert J.K.
d9523d31-41a8-459a-8831-70e29ffe8a73
Chong, Harold M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Grech, David
f44a3fe2-5f50-4192-9018-3fccd1612ceb
Tarazona, Antulio
c6ae87c5-c746-4f89-9ff0-9e7b6874e94f
De Leon, Maria Theresa
779b393c-38ac-47dd-b960-818eda45de2c
Kiang, Kian S.
fdb609c6-75aa-4893-85c8-8e50edfda7fe
Zekonyte, Jurgita
c40df725-5ce3-4692-b638-bbb4d847b5ea
Wood, Robert J.K.
d9523d31-41a8-459a-8831-70e29ffe8a73
Chong, Harold M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1

Grech, David, Tarazona, Antulio, De Leon, Maria Theresa, Kiang, Kian S., Zekonyte, Jurgita, Wood, Robert J.K. and Chong, Harold M.H. (2018) A Quasi-Concertina force-displacement MEMS probe for measuring biomechanical properties. Sensors and Actuators A: Physical, 275, 67-74. (doi:10.1016/j.sna.2018.03.031).

Record type: Article

Abstract

In this work the development of a novel Quasi-Concertina (QC) microelectromechanical systems (MEMS) force - displacement (F-D) sensor is presented. The developed sensor has a resolution as small as 5.6 nN and 1.25 nm and a range of as much as 5.5 mN and 1000 μm. The performance of the microfabricated proof-of-concept QC MEMS device is in good agreement with our analytical and numerical estimates. Force sensors with these attributes will enable the mechanical properties of biological phenomena to be continuously measured over large F-D ranges without the need to change the measurement instrument. Thus, this sensor will appeal to biologists, biochemists, life scientists, clinicians, engineers, and physicist researchers working to understand the fundamentals of cell biology, the onset and progression of diseases such as cancer, and for the development of tools for the diagnostics, prophylactics and therapeutics of diseases.

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ALargeF-DRangePiezoQCMEMSSensandAct16Mar18-Soton - Accepted Manuscript
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Accepted/In Press date: 20 March 2018
e-pub ahead of print date: 28 March 2018
Published date: 1 June 2018

Identifiers

Local EPrints ID: 419804
URI: http://eprints.soton.ac.uk/id/eprint/419804
ISSN: 0924-4247
PURE UUID: 8030f04f-132a-4241-9dd2-692f1ba84d1f
ORCID for Kian S. Kiang: ORCID iD orcid.org/0000-0002-7326-909X
ORCID for Robert J.K. Wood: ORCID iD orcid.org/0000-0003-0681-9239
ORCID for Harold M.H. Chong: ORCID iD orcid.org/0000-0002-7110-5761

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Date deposited: 20 Apr 2018 16:30
Last modified: 18 Feb 2021 17:10

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