An all screen-printed free-standing piezoelectric diaphragm for application on textile
An all screen-printed free-standing piezoelectric diaphragm for application on textile
This paper reports the fabrication, characterization, and testing of free-standing diaphragm structure fabricated solely using the screen-printing method. Two different design structure which is circular and square diaphragm was tested. Unlike, cantilever and encastre beam, the diaphragm structure has all the periphery clamped which may result in difficulty in removing the sacrificial layer to enable the free-standing structure. The free-standing diaphragm structure was tested as a buzzer and the highest SPL level of 74 decibel was recorded between 12 kHz to 19 kHz.
Diaphragm structure, Free-standing, Low temperature process, Piezoelectric, Screen-printing, Textile
1-4
Jamel, Nursabirah
c61907af-a673-4bc6-b1d5-a2976ce92c79
Torah, Russel
7147b47b-db01-4124-95dc-90d6a9842688
Yang, Kai
f1c9b81d-e821-47eb-a69e-b3bc419de9c7
Tudor, John
46eea408-2246-4aa0-8b44-86169ed601ff
Beeby, Steve P.
ba565001-2812-4300-89f1-fe5a437ecb0d
25 June 2018
Jamel, Nursabirah
c61907af-a673-4bc6-b1d5-a2976ce92c79
Torah, Russel
7147b47b-db01-4124-95dc-90d6a9842688
Yang, Kai
f1c9b81d-e821-47eb-a69e-b3bc419de9c7
Tudor, John
46eea408-2246-4aa0-8b44-86169ed601ff
Beeby, Steve P.
ba565001-2812-4300-89f1-fe5a437ecb0d
Jamel, Nursabirah, Torah, Russel, Yang, Kai, Tudor, John and Beeby, Steve P.
(2018)
An all screen-printed free-standing piezoelectric diaphragm for application on textile.
In Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018.
IEEE.
.
(doi:10.1109/DTIP.2018.8394208).
Record type:
Conference or Workshop Item
(Paper)
Abstract
This paper reports the fabrication, characterization, and testing of free-standing diaphragm structure fabricated solely using the screen-printing method. Two different design structure which is circular and square diaphragm was tested. Unlike, cantilever and encastre beam, the diaphragm structure has all the periphery clamped which may result in difficulty in removing the sacrificial layer to enable the free-standing structure. The free-standing diaphragm structure was tested as a buzzer and the highest SPL level of 74 decibel was recorded between 12 kHz to 19 kHz.
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More information
Accepted/In Press date: 9 February 2018
e-pub ahead of print date: 22 June 2018
Published date: 25 June 2018
Venue - Dates:
20th Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, , Roma, Italy, 2018-05-22 - 2018-05-25
Keywords:
Diaphragm structure, Free-standing, Low temperature process, Piezoelectric, Screen-printing, Textile
Identifiers
Local EPrints ID: 422928
URI: http://eprints.soton.ac.uk/id/eprint/422928
PURE UUID: f39dca7c-173b-4b90-bf79-ed0d25c83e24
Catalogue record
Date deposited: 08 Aug 2018 16:30
Last modified: 16 Mar 2024 04:03
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