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Design and fabrication of a micro-velocity sensor for direct velocity feedback control systems

Design and fabrication of a micro-velocity sensor for direct velocity feedback control systems
Design and fabrication of a micro-velocity sensor for direct velocity feedback control systems
The design, fabrication and testing is presented of a micro velocity sensor to be used in combination with a piezoelectric patch actuator to form a closely located sensor–actuator pair for the implementation of direct velocity feedback control loops. The aim of this study is to describe the operation principles and the experimental results of this new sensor built using MEMS (Micro Electro Mechanical System) techniques. By means of an internal velocity feedback control loop, this sensor directly provides an output signal proportional to the velocity at its centre and also provides a low pass filtering effect. These response characteristics make more stable the control system since it improves the collocation and duality properties of the sensor–piezoelectric actuator pair and also attenuate the unwanted higher frequency excitation effects produced by the piezoelectric actuator itself. In this way a simple control system can be built where the micro fabricated sensor is integrated together with a miniaturized amplifier to the piezoelectric patch actuator. Arrays of these control units can then be bonded on thin structures in order to get large damping effects that reduce the overall vibration of the structure at low frequencies.
16pp
Gavagni, Marco
bdd3d6ed-d859-4389-9327-82bd32a07d44
Gardonio, Paolo
bae5bf72-ea81-43a6-a756-d7153d2de77a
Elliot, Stephen J.
66539e2e-51e7-4796-86ae-452db98b3ded
Gavagni, Marco
bdd3d6ed-d859-4389-9327-82bd32a07d44
Gardonio, Paolo
bae5bf72-ea81-43a6-a756-d7153d2de77a
Elliot, Stephen J.
66539e2e-51e7-4796-86ae-452db98b3ded

Gavagni, Marco, Gardonio, Paolo and Elliot, Stephen J. (2006) Design and fabrication of a micro-velocity sensor for direct velocity feedback control systems. Proceedings of the Sixth International Symposium on Active Noise and Vibration Control, ACTIVE 2006. 19 - 20 Sep 2006. 16pp .

Record type: Conference or Workshop Item (Paper)

Abstract

The design, fabrication and testing is presented of a micro velocity sensor to be used in combination with a piezoelectric patch actuator to form a closely located sensor–actuator pair for the implementation of direct velocity feedback control loops. The aim of this study is to describe the operation principles and the experimental results of this new sensor built using MEMS (Micro Electro Mechanical System) techniques. By means of an internal velocity feedback control loop, this sensor directly provides an output signal proportional to the velocity at its centre and also provides a low pass filtering effect. These response characteristics make more stable the control system since it improves the collocation and duality properties of the sensor–piezoelectric actuator pair and also attenuate the unwanted higher frequency excitation effects produced by the piezoelectric actuator itself. In this way a simple control system can be built where the micro fabricated sensor is integrated together with a miniaturized amplifier to the piezoelectric patch actuator. Arrays of these control units can then be bonded on thin structures in order to get large damping effects that reduce the overall vibration of the structure at low frequencies.

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More information

Published date: 2006
Additional Information: CD-ROM
Venue - Dates: Proceedings of the Sixth International Symposium on Active Noise and Vibration Control, ACTIVE 2006, 2006-09-19 - 2006-09-20

Identifiers

Local EPrints ID: 42307
URI: https://eprints.soton.ac.uk/id/eprint/42307
PURE UUID: 45431ad0-d549-4cc0-a120-c459db4ed78e

Catalogue record

Date deposited: 05 Dec 2006
Last modified: 13 Mar 2019 21:12

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