Design and fabrication of a micro-velocity sensor for direct velocity feedback control systems

Gavagni, Marco, Gardonio, Paolo and Elliot, Stephen J. (2006) Design and fabrication of a micro-velocity sensor for direct velocity feedback control systems. Proceedings of the Sixth International Symposium on Active Noise and Vibration Control, ACTIVE 2006, Adelaide, Australia. 18 - 19 Sep 2006. 16pp .

Abstract

The design, fabrication and testing is presented of a micro velocity sensor to be used in combination with a piezoelectric patch actuator to form a closely located sensor–actuator pair for the implementation of direct velocity feedback control loops. The aim of this study is to describe the operation principles and the experimental results of this new sensor built using MEMS (Micro Electro Mechanical System) techniques. By means of an internal velocity feedback control loop, this sensor directly provides an output signal proportional to the velocity at its centre and also provides a low pass filtering effect. These response characteristics make more stable the control system since it improves the collocation and duality properties of the sensor–piezoelectric actuator pair and also attenuate the unwanted higher frequency excitation effects produced by the piezoelectric actuator itself. In this way a simple control system can be built where the micro fabricated sensor is integrated together with a miniaturized amplifier to the piezoelectric patch actuator. Arrays of these control units can then be bonded on thin structures in order to get large damping effects that reduce the overall vibration of the structure at low frequencies.

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