The University of Southampton
University of Southampton Institutional Repository

Real-time monitoring and gradient feedback enable accurate trimming of ion-implanted silicon photonic devices

Real-time monitoring and gradient feedback enable accurate trimming of ion-implanted silicon photonic devices
Real-time monitoring and gradient feedback enable accurate trimming of ion-implanted silicon photonic devices
Fabrication errors pose significant challenges on silicon photonics, promoting postfabrication trimming technologies to ensure device performance. Conventional approaches involve multiple trimming and characterization steps, impacting overall fabrication complexity. Here we demonstrate a highly accurate trimming method combining laser annealing of germanium implanted silicon waveguide and real-time monitoring of device performance. Direct feedback of the trimming process is facilitated by a differential spectroscopic technique based on photomodulation. The resonant wavelength trimming accuracy is better than 0.15 nm for ring resonators with 20-μm radius. We also realize operating point trimming of Mach-Zehnder interferometers with germanium implanted arms.
A phase shift of 1.2π is achieved by annealing a 7-μm implanted segment.
Integrated optics devices, Photonic integrated circuits
1094-4087
24953-24963
Chen, Bigeng
e533448b-095e-4a9f-924c-301f4aa3007b
Yu, Xingshi
7fb4e039-1fb0-4c2e-8567-43e97e77c997
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Milošević, Milan
b28da945-84a5-4317-8896-6d9ea6a69589
Thomson, David
17c1626c-2422-42c6-98e0-586ae220bcda
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Saito, Shinichi
14a5d20b-055e-4f48-9dda-267e88bd3fdc
Muskens, Otto
2284101a-f9ef-4d79-8951-a6cda5bfc7f9
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Chen, Bigeng
e533448b-095e-4a9f-924c-301f4aa3007b
Yu, Xingshi
7fb4e039-1fb0-4c2e-8567-43e97e77c997
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Milošević, Milan
b28da945-84a5-4317-8896-6d9ea6a69589
Thomson, David
17c1626c-2422-42c6-98e0-586ae220bcda
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Saito, Shinichi
14a5d20b-055e-4f48-9dda-267e88bd3fdc
Muskens, Otto
2284101a-f9ef-4d79-8951-a6cda5bfc7f9
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139

Chen, Bigeng, Yu, Xingshi, Chen, Xia, Milošević, Milan, Thomson, David, Khokhar, Ali, Saito, Shinichi, Muskens, Otto and Reed, Graham (2018) Real-time monitoring and gradient feedback enable accurate trimming of ion-implanted silicon photonic devices. Optics Express, 26 (19), 24953-24963. (doi:10.1364/OE.26.024953).

Record type: Article

Abstract

Fabrication errors pose significant challenges on silicon photonics, promoting postfabrication trimming technologies to ensure device performance. Conventional approaches involve multiple trimming and characterization steps, impacting overall fabrication complexity. Here we demonstrate a highly accurate trimming method combining laser annealing of germanium implanted silicon waveguide and real-time monitoring of device performance. Direct feedback of the trimming process is facilitated by a differential spectroscopic technique based on photomodulation. The resonant wavelength trimming accuracy is better than 0.15 nm for ring resonators with 20-μm radius. We also realize operating point trimming of Mach-Zehnder interferometers with germanium implanted arms.
A phase shift of 1.2π is achieved by annealing a 7-μm implanted segment.

Text
oe-26-19-24953 - Version of Record
Available under License Creative Commons Attribution.
Download (2MB)

More information

Accepted/In Press date: 11 August 2018
e-pub ahead of print date: 10 September 2018
Published date: 17 September 2018
Keywords: Integrated optics devices, Photonic integrated circuits

Identifiers

Local EPrints ID: 423186
URI: https://eprints.soton.ac.uk/id/eprint/423186
ISSN: 1094-4087
PURE UUID: 8d881ddb-854e-441c-a49d-da8c8ce614b0
ORCID for Bigeng Chen: ORCID iD orcid.org/0000-0003-4925-2308
ORCID for Xia Chen: ORCID iD orcid.org/0000-0002-0994-5401
ORCID for Shinichi Saito: ORCID iD orcid.org/0000-0003-1539-1182
ORCID for Otto Muskens: ORCID iD orcid.org/0000-0003-0693-5504

Catalogue record

Date deposited: 19 Sep 2018 16:30
Last modified: 03 Dec 2019 01:42

Export record

Altmetrics

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of https://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×