Gold-compensated high resistivity silicon as low-loss microwave substrate
Gold-compensated high resistivity silicon as low-loss microwave substrate
Deep level doping compensation concept using elemental gold is utilised to create effectively high resistivity silicon substrates for the use in GHz range. Bias-dependent substrate losses associated with parasitic surface conduction is fully suppressed, indicated by the constant attenuation loss of 0.19 dB/mm at 40 GHz for the coplanar waveguides fabricated on the substrates. In addition to that, the incorporation of slow-cooling treatment in the annealing procedure proves that further increase in substrate resistivity can be achieved for Czochralski-grown silicon substrates, rising up its potential as one of the alternative substrates for radio-frequency monolithic microwave integrated circuits applications.
coplanar waveguides, high resistivity silicon, microwave substrate, RFMMIC, substrate loss
37-38
Hashim, Nur Z.
db57f4b1-daf9-44ab-9045-ddad28771a92
De Groot, Cornelius H.
92cd2e02-fcc4-43da-8816-c86f966be90c
24 April 2018
Hashim, Nur Z.
db57f4b1-daf9-44ab-9045-ddad28771a92
De Groot, Cornelius H.
92cd2e02-fcc4-43da-8816-c86f966be90c
Hashim, Nur Z. and De Groot, Cornelius H.
(2018)
Gold-compensated high resistivity silicon as low-loss microwave substrate.
In 2018 Australian Microwave Symposium, AMS 2018 - Conference Proceedings.
vol. 2018-January,
IEEE.
.
(doi:10.1109/AUSMS.2018.8346970).
Record type:
Conference or Workshop Item
(Paper)
Abstract
Deep level doping compensation concept using elemental gold is utilised to create effectively high resistivity silicon substrates for the use in GHz range. Bias-dependent substrate losses associated with parasitic surface conduction is fully suppressed, indicated by the constant attenuation loss of 0.19 dB/mm at 40 GHz for the coplanar waveguides fabricated on the substrates. In addition to that, the incorporation of slow-cooling treatment in the annealing procedure proves that further increase in substrate resistivity can be achieved for Czochralski-grown silicon substrates, rising up its potential as one of the alternative substrates for radio-frequency monolithic microwave integrated circuits applications.
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More information
Accepted/In Press date: 6 February 2018
Published date: 24 April 2018
Venue - Dates:
2018 Australian Microwave Symposium, AMS 2018, , Brisbane, Australia, 2018-02-06 - 2018-02-07
Keywords:
coplanar waveguides, high resistivity silicon, microwave substrate, RFMMIC, substrate loss
Identifiers
Local EPrints ID: 423241
URI: http://eprints.soton.ac.uk/id/eprint/423241
PURE UUID: 966daef0-87cc-4cd8-b5ad-981724d55fba
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Date deposited: 19 Sep 2018 16:30
Last modified: 16 Mar 2024 03:23
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Author:
Nur Z. Hashim
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