The University of Southampton
University of Southampton Institutional Repository

Gold-compensated high resistivity silicon as low-loss microwave substrate

Gold-compensated high resistivity silicon as low-loss microwave substrate
Gold-compensated high resistivity silicon as low-loss microwave substrate

Deep level doping compensation concept using elemental gold is utilised to create effectively high resistivity silicon substrates for the use in GHz range. Bias-dependent substrate losses associated with parasitic surface conduction is fully suppressed, indicated by the constant attenuation loss of 0.19 dB/mm at 40 GHz for the coplanar waveguides fabricated on the substrates. In addition to that, the incorporation of slow-cooling treatment in the annealing procedure proves that further increase in substrate resistivity can be achieved for Czochralski-grown silicon substrates, rising up its potential as one of the alternative substrates for radio-frequency monolithic microwave integrated circuits applications.

coplanar waveguides, high resistivity silicon, microwave substrate, RFMMIC, substrate loss
37-38
Institute of Electrical and Electronics Engineers Inc.
Hashim, Nur Z.
db57f4b1-daf9-44ab-9045-ddad28771a92
De Groot, Cornelius H.
92cd2e02-fcc4-43da-8816-c86f966be90c
Hashim, Nur Z.
db57f4b1-daf9-44ab-9045-ddad28771a92
De Groot, Cornelius H.
92cd2e02-fcc4-43da-8816-c86f966be90c

Hashim, Nur Z. and De Groot, Cornelius H. (2018) Gold-compensated high resistivity silicon as low-loss microwave substrate. In 2018 Australian Microwave Symposium, AMS 2018 - Conference Proceedings. vol. 2018-January, Institute of Electrical and Electronics Engineers Inc. pp. 37-38 . (doi:10.1109/AUSMS.2018.8346970).

Record type: Conference or Workshop Item (Paper)

Abstract

Deep level doping compensation concept using elemental gold is utilised to create effectively high resistivity silicon substrates for the use in GHz range. Bias-dependent substrate losses associated with parasitic surface conduction is fully suppressed, indicated by the constant attenuation loss of 0.19 dB/mm at 40 GHz for the coplanar waveguides fabricated on the substrates. In addition to that, the incorporation of slow-cooling treatment in the annealing procedure proves that further increase in substrate resistivity can be achieved for Czochralski-grown silicon substrates, rising up its potential as one of the alternative substrates for radio-frequency monolithic microwave integrated circuits applications.

Full text not available from this repository.

More information

Accepted/In Press date: 6 February 2018
Published date: 24 April 2018
Venue - Dates: 2018 Australian Microwave Symposium, AMS 2018, Australia, 2018-02-06 - 2018-02-07
Keywords: coplanar waveguides, high resistivity silicon, microwave substrate, RFMMIC, substrate loss

Identifiers

Local EPrints ID: 423241
URI: http://eprints.soton.ac.uk/id/eprint/423241
PURE UUID: 966daef0-87cc-4cd8-b5ad-981724d55fba
ORCID for Cornelius H. De Groot: ORCID iD orcid.org/0000-0002-3850-7101

Catalogue record

Date deposited: 19 Sep 2018 16:30
Last modified: 07 Oct 2020 01:46

Export record

Altmetrics

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×