This is the dataset of the article of "Real-time monitoring and gradient feedback enable accurate trimming of ion-implanted silicon photonic devices" accepted by Optics Express. Data collector and Creator: Bigeng Chen bc1g16@soton.ac.uk Optoelectronics Research Centre Names of the dataset files (.txt or .opj) correspond to labels of figures or sub-figures in the paper. Fig.1: Laser annealing of Ge-implanted ring resonator with real-time spectrum monitoring. Fig.2: Laser annealing with real-time differential transmission monitoring of Ge-implanted ring resonator. Fig.3: Photomodulation maps of T (a), dT (b) and dT/T (c) from a Ge-implanted segment of a ring with 20-um radius. Fig.4: Laser annealing of the Ge-implanted MZI with real-time monitoring. (a) Experiment schematic of the laser annealing with an illustrated layout of an MZI. DOI:10.5258/SOTON/D0629 Date of Data collection: June 2017 - Aprail 2018 Reference of data collection: 1. B. Chen, R. Bruck, D. Traviss, A. Z. Khokhar, S. Reynolds, D. J. Thomson, G. Z. Mashanovich, G. T. Reed, and O. L. Muskens, "Hybrid Photon-Plasmon Coupling and Ultrafast Control of Nanoantennas on a Silicon Photonic Chip," Nano Lett. 18(1), 610-617 (2018). 2. R. Bruck, B. Mills, B. Troia, D. J. Thomson, F. Y. Gardes, Y. Hu, G. Z. Mashanovich, V. M. N. Passaro, G. T. Reed, and O. L. Muskens, "Device-level characterization of the flow of light in integrated photonic circuits using ultrafast photomodulation spectroscopy," Nat. Photonics 9(1), 54-60 (2015).