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CMOS nanophotonic sensor with integrated readout system

CMOS nanophotonic sensor with integrated readout system
CMOS nanophotonic sensor with integrated readout system

The measurement of nanophotonic sensors currently requires the use of external measuring equipment for their readout such as an optical spectrum analyser (OSA), spectrophotometer or detectors. This requirement of external laboratory based measuring equipment creates a "chip-in-a-lab" dilemma and hinders the use of nanophotonic sensors in practical applications. Making nanophotonic sensors usable in everyday life requires miniaturization of not only the sensor chip itself but also the equipment used for its measurement. In this paper, we have removed the need of external measuring equipment by monolithically integrating 1D grating structures with a complementary metal-oxide-semiconductor (CMOS) integrated circuit having an array of photodiodes. By doing so, we get a direct electrical read-out of the refractive index changes induced when applying different analytes to grating structures. The gratings are made of CMOS compatible silicon nitride. Employing a nanophotonic sensor made of CMOS compatible material allows fabrication of the integrated sensor chip in a commercial CMOS foundry, enabling mass production for commercialization with low cost. Our results present a significant step towards transforming present laboratory based nanophotonic sensors into practical portable devices to enable applications away from the analytical laboratory. We anticipate the work will have a major impact on technology for personalized medicine, environmental and industrial sensing.

CMOS technology, Detectors, Diffraction gratings, Gratings, Nanophotonics, Optical sensors, Optoelectronics, Photodetectors, Semiconductor device measurement, Sensor systems, Sensors
1530-437X
Shakoor, Abdul
9c438263-d517-40a7-8e25-826928491b64
Cheah, Boon Chong
26966bd4-e527-4c4a-9be7-e9bd8fc16b5d
Al-Rawhani, Mohammed A.
a1ba7121-cc02-4235-9774-67905e5faaed
Grande, Marco
271496e7-7325-48e4-9cde-cd4e21da42f7
Grant, James
030bca0c-2ed8-4b48-a109-09d41b1ed68a
Gouveia, Luiz
999da2d5-38a0-4384-9950-591d7b89714a
Cumming, David R.S.
f48afe3d-a467-48c0-a471-b06d9ddfebc3
Shakoor, Abdul
9c438263-d517-40a7-8e25-826928491b64
Cheah, Boon Chong
26966bd4-e527-4c4a-9be7-e9bd8fc16b5d
Al-Rawhani, Mohammed A.
a1ba7121-cc02-4235-9774-67905e5faaed
Grande, Marco
271496e7-7325-48e4-9cde-cd4e21da42f7
Grant, James
030bca0c-2ed8-4b48-a109-09d41b1ed68a
Gouveia, Luiz
999da2d5-38a0-4384-9950-591d7b89714a
Cumming, David R.S.
f48afe3d-a467-48c0-a471-b06d9ddfebc3

Shakoor, Abdul, Cheah, Boon Chong, Al-Rawhani, Mohammed A., Grande, Marco, Grant, James, Gouveia, Luiz and Cumming, David R.S. (2018) CMOS nanophotonic sensor with integrated readout system. IEEE Sensors Journal. (doi:10.1109/JSEN.2018.2870255).

Record type: Article

Abstract

The measurement of nanophotonic sensors currently requires the use of external measuring equipment for their readout such as an optical spectrum analyser (OSA), spectrophotometer or detectors. This requirement of external laboratory based measuring equipment creates a "chip-in-a-lab" dilemma and hinders the use of nanophotonic sensors in practical applications. Making nanophotonic sensors usable in everyday life requires miniaturization of not only the sensor chip itself but also the equipment used for its measurement. In this paper, we have removed the need of external measuring equipment by monolithically integrating 1D grating structures with a complementary metal-oxide-semiconductor (CMOS) integrated circuit having an array of photodiodes. By doing so, we get a direct electrical read-out of the refractive index changes induced when applying different analytes to grating structures. The gratings are made of CMOS compatible silicon nitride. Employing a nanophotonic sensor made of CMOS compatible material allows fabrication of the integrated sensor chip in a commercial CMOS foundry, enabling mass production for commercialization with low cost. Our results present a significant step towards transforming present laboratory based nanophotonic sensors into practical portable devices to enable applications away from the analytical laboratory. We anticipate the work will have a major impact on technology for personalized medicine, environmental and industrial sensing.

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Accepted/In Press date: 18 September 2018
e-pub ahead of print date: 19 September 2018
Keywords: CMOS technology, Detectors, Diffraction gratings, Gratings, Nanophotonics, Optical sensors, Optoelectronics, Photodetectors, Semiconductor device measurement, Sensor systems, Sensors

Identifiers

Local EPrints ID: 423804
URI: http://eprints.soton.ac.uk/id/eprint/423804
ISSN: 1530-437X
PURE UUID: 87c6e2c4-e412-42cd-8190-04e76e86c27c

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Date deposited: 02 Oct 2018 16:30
Last modified: 06 Oct 2020 19:59

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Contributors

Author: Abdul Shakoor
Author: Boon Chong Cheah
Author: Mohammed A. Al-Rawhani
Author: Marco Grande
Author: James Grant
Author: Luiz Gouveia
Author: David R.S. Cumming

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