Low-temperature NH3-free silicon nitride platforms for integrated photonics
Low-temperature NH3-free silicon nitride platforms for integrated photonics
We demonstrate 3 platforms based on silicon nitride layers processed at 350°C and tailored to have different refractive indices. With these platforms, we have successfully fabricated low loss waveguides at telecom wavelengths, temperature tolerant (de)multiplexing devices, nonlinear waveguides, photonic crystal cavities and waveguides.
119-120
Domínguez Bucio, T.
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Scholl, S.L.
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Ilie, S.T.
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Lacava, C.
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Debnath, K.
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Khokhar, A.Z.
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Banakar, M.
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Sotto, M.
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Grabska, K.M.
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Clementi, M.
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Bajoni, D.
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Galli, M.
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Saito, S.
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Petropoulos, P.
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Gardes, F.Y.
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1 October 2018
Domínguez Bucio, T.
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Scholl, S.L.
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Ilie, S.T.
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Lacava, C.
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Debnath, K.
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Khokhar, A.Z.
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Banakar, M.
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Sotto, M.
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Grabska, K.M.
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Clementi, M.
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Bajoni, D.
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Galli, M.
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Saito, S.
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Petropoulos, P.
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Gardes, F.Y.
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Domínguez Bucio, T., Scholl, S.L., Ilie, S.T., Lacava, C., Debnath, K., Khokhar, A.Z., Banakar, M., Sotto, M., Grabska, K.M., Clementi, M., Bajoni, D., Galli, M., Saito, S., Petropoulos, P. and Gardes, F.Y.
(2018)
Low-temperature NH3-free silicon nitride platforms for integrated photonics.
In 2018 IEEE 15th International Conference on Group IV Photonics, GFP 2018.
vol. 2018-August,
IEEE.
.
(doi:10.1109/GROUP4.2018.8478748).
Record type:
Conference or Workshop Item
(Paper)
Abstract
We demonstrate 3 platforms based on silicon nitride layers processed at 350°C and tailored to have different refractive indices. With these platforms, we have successfully fabricated low loss waveguides at telecom wavelengths, temperature tolerant (de)multiplexing devices, nonlinear waveguides, photonic crystal cavities and waveguides.
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Accepted/In Press date: 31 August 2018
Published date: 1 October 2018
Venue - Dates:
15th International Conference on Group IV Photonics (GFP), , Cancun, Mexico, 2018-08-29 - 2018-08-31
Identifiers
Local EPrints ID: 425192
URI: http://eprints.soton.ac.uk/id/eprint/425192
ISSN: 1949-209X
PURE UUID: 6b5716d9-5d24-48a3-974a-780f3b1f7bba
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Date deposited: 11 Oct 2018 16:30
Last modified: 18 Mar 2024 03:47
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Contributors
Author:
T. Domínguez Bucio
Author:
S.L. Scholl
Author:
S.T. Ilie
Author:
C. Lacava
Author:
K. Debnath
Author:
A.Z. Khokhar
Author:
M. Banakar
Author:
M. Sotto
Author:
K.M. Grabska
Author:
M. Clementi
Author:
D. Bajoni
Author:
M. Galli
Author:
S. Saito
Author:
P. Petropoulos
Author:
F.Y. Gardes
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