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Low-temperature NH3-free silicon nitride platforms for integrated photonics

Low-temperature NH3-free silicon nitride platforms for integrated photonics
Low-temperature NH3-free silicon nitride platforms for integrated photonics
We demonstrate 3 platforms based on silicon nitride layers processed at 350°C and tailored to have different refractive indices. With these platforms, we have successfully fabricated low loss waveguides at telecom wavelengths, temperature tolerant (de)multiplexing devices, nonlinear waveguides, photonic crystal cavities and waveguides.
1949-209X
119-120
IEEE
Domínguez Bucio, T.
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Scholl, S.L.
e532e171-8ea3-4576-8843-17d96a3995d4
Ilie, S.T.
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Lacava, C.
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Debnath, K.
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Khokhar, A.Z.
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Banakar, M.
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Sotto, M.
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Grabska, K.M.
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Clementi, M.
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Bajoni, D.
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Galli, M.
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Saito, S.
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Petropoulos, P.
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Gardes, F.Y.
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Domínguez Bucio, T.
83b57799-c566-473c-9b53-92e9c50b4287
Scholl, S.L.
e532e171-8ea3-4576-8843-17d96a3995d4
Ilie, S.T.
9ff80b2a-1998-41dd-9eed-7b010cbbf3a9
Lacava, C.
a0a31a27-23ac-4a73-8bb4-2f02368fb8bd
Debnath, K.
aa01749d-524b-4464-b90a-af072e92a02f
Khokhar, A.Z.
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Banakar, M.
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Sotto, M.
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Grabska, K.M.
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Clementi, M.
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Bajoni, D.
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Galli, M.
41c79ab7-2f77-4180-b38d-3aa0fb6bca21
Saito, S.
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Petropoulos, P.
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Gardes, F.Y.
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Domínguez Bucio, T., Scholl, S.L., Ilie, S.T., Lacava, C., Debnath, K., Khokhar, A.Z., Banakar, M., Sotto, M., Grabska, K.M., Clementi, M., Bajoni, D., Galli, M., Saito, S., Petropoulos, P. and Gardes, F.Y. (2018) Low-temperature NH3-free silicon nitride platforms for integrated photonics. In 2018 IEEE 15th International Conference on Group IV Photonics, GFP 2018. vol. 2018-August, IEEE. pp. 119-120 . (doi:10.1109/GROUP4.2018.8478748).

Record type: Conference or Workshop Item (Paper)

Abstract

We demonstrate 3 platforms based on silicon nitride layers processed at 350°C and tailored to have different refractive indices. With these platforms, we have successfully fabricated low loss waveguides at telecom wavelengths, temperature tolerant (de)multiplexing devices, nonlinear waveguides, photonic crystal cavities and waveguides.

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More information

Accepted/In Press date: 31 August 2018
Published date: 1 October 2018
Venue - Dates: 15th International Conference on Group IV Photonics, Cancun, Mexico, 2018-08-29 - 2018-08-31

Identifiers

Local EPrints ID: 425192
URI: https://eprints.soton.ac.uk/id/eprint/425192
ISSN: 1949-209X
PURE UUID: 6b5716d9-5d24-48a3-974a-780f3b1f7bba
ORCID for T. Domínguez Bucio: ORCID iD orcid.org/0000-0002-3664-1403
ORCID for S.L. Scholl: ORCID iD orcid.org/0000-0003-2646-7293
ORCID for C. Lacava: ORCID iD orcid.org/0000-0002-9950-8642
ORCID for S. Saito: ORCID iD orcid.org/0000-0003-1539-1182
ORCID for P. Petropoulos: ORCID iD orcid.org/0000-0002-1576-8034

Catalogue record

Date deposited: 11 Oct 2018 16:30
Last modified: 15 May 2019 00:24

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Contributors

Author: S.L. Scholl ORCID iD
Author: S.T. Ilie
Author: C. Lacava ORCID iD
Author: K. Debnath
Author: A.Z. Khokhar
Author: M. Banakar
Author: M. Sotto
Author: K.M. Grabska
Author: M. Clementi
Author: D. Bajoni
Author: M. Galli
Author: S. Saito ORCID iD
Author: P. Petropoulos ORCID iD
Author: F.Y. Gardes

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