Domínguez Bucio, T., Scholl, S.L., Ilie, S.T., Lacava, C., Debnath, K., Khokhar, A.Z., Banakar, M., Sotto, M., Grabska, K.M., Clementi, M., Bajoni, D., Galli, M., Saito, S., Petropoulos, P. and Gardes, F.Y. (2018) Low-temperature NH3-free silicon nitride platforms for integrated photonics. In 2018 IEEE 15th International Conference on Group IV Photonics, GFP 2018. vol. 2018-August, IEEE. pp. 119-120 . (doi:10.1109/GROUP4.2018.8478748).
Abstract
We demonstrate 3 platforms based on silicon nitride layers processed at 350°C and tailored to have different refractive indices. With these platforms, we have successfully fabricated low loss waveguides at telecom wavelengths, temperature tolerant (de)multiplexing devices, nonlinear waveguides, photonic crystal cavities and waveguides.
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