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Silica MEMS cantilever arrays

Silica MEMS cantilever arrays
Silica MEMS cantilever arrays
This invited paper covers the development of UV written MEMS cantilevers on silica-on-silicon. The work uses novel fabrication tools including physical micromachining and UV laser direct writing. Each cantilever contains an optical waveguide and by actuating the cantilevers we have demonstrated optical attenuation operation in an array format.
Smith, Peter
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Cooper, Peter
29354b98-c117-4ace-9ca4-1d3ad531485f
Carpenter, Lewis Glynn
0daa548e-0d42-4b06-b914-45bfbec41759
Gates, James
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Mennea, Paolo
d994ba05-bcc1-4be3-8ba1-439fb1535a3f
Smith, Peter
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Cooper, Peter
29354b98-c117-4ace-9ca4-1d3ad531485f
Carpenter, Lewis Glynn
0daa548e-0d42-4b06-b914-45bfbec41759
Gates, James
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Mennea, Paolo
d994ba05-bcc1-4be3-8ba1-439fb1535a3f

Smith, Peter, Cooper, Peter, Carpenter, Lewis Glynn, Gates, James, Holmes, Christopher and Mennea, Paolo (2015) Silica MEMS cantilever arrays. 2015 International Conference on Photonics in Switching, Florence, Italy. 22 - 25 Sep 2015.

Record type: Conference or Workshop Item (Paper)

Abstract

This invited paper covers the development of UV written MEMS cantilevers on silica-on-silicon. The work uses novel fabrication tools including physical micromachining and UV laser direct writing. Each cantilever contains an optical waveguide and by actuating the cantilevers we have demonstrated optical attenuation operation in an array format.

Full text not available from this repository.

More information

Published date: 22 September 2015
Venue - Dates: 2015 International Conference on Photonics in Switching, Florence, Italy, 2015-09-22 - 2015-09-25

Identifiers

Local EPrints ID: 425494
URI: https://eprints.soton.ac.uk/id/eprint/425494
PURE UUID: f0ee16ce-b875-498c-a631-2fc229f893e0
ORCID for Peter Smith: ORCID iD orcid.org/0000-0003-0319-718X
ORCID for James Gates: ORCID iD orcid.org/0000-0001-8671-5987
ORCID for Christopher Holmes: ORCID iD orcid.org/0000-0001-9021-3760

Catalogue record

Date deposited: 22 Oct 2018 16:30
Last modified: 17 Oct 2019 00:38

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