Closed-loop corrective beam shaping for laser processing of curved surfaces
Closed-loop corrective beam shaping for laser processing of curved surfaces
Laser processing is a widely used contactless machining technique, with ultrashort pulses affording the intensity to machine almost any material. However, micro-patterning over curved surfaces can be difficult, as a fixed beam shape will necessarily be skewed when directed at a non-orthogonal sample surface. Here, we show that this aberration can be compensated via closed-loop adaptive beam shaping, via the use of a MEMS device (Texas Instruments digital micromirror device) acting as an intensity spatial light modulator that is used to create a beam intensity profile transformation that takes into account the local surface gradient of the sample. The patterning of 18 µm diameter circular structures over a region of a 3.00 mm diameter titanium sphere has been demonstrated. Inclinations of the surface normal of up to π/2 from the vertical were tested, and the effective range was found to be up to π/5. The MEMs device is also shown to be capable of providing a real-time and precise laser beam repositioning that compensates for the errors in the movement stages.
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Heath, Daniel
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MacKay, Benita S.
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Grant-Jacob, James
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Xie, Yunhui
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Oreffo, Richard
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Eason, Robert
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Mills, Benjamin
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December 2018
Heath, Daniel
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MacKay, Benita S.
318d298f-5b38-43d7-b30d-8cd07f69acd4
Grant-Jacob, James
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Xie, Yunhui
be8b5148-7694-4d1d-89d8-e27dbcbb3a17
Oreffo, Richard
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Eason, Robert
e38684c3-d18c-41b9-a4aa-def67283b020
Mills, Benjamin
05f1886e-96ef-420f-b856-4115f4ab36d0
Heath, Daniel, MacKay, Benita S., Grant-Jacob, James, Xie, Yunhui, Oreffo, Richard, Eason, Robert and Mills, Benjamin
(2018)
Closed-loop corrective beam shaping for laser processing of curved surfaces.
Journal of Micromechanics and Microengineering, 28 (12), .
(doi:10.1088/1361-6439/aae1d5).
Abstract
Laser processing is a widely used contactless machining technique, with ultrashort pulses affording the intensity to machine almost any material. However, micro-patterning over curved surfaces can be difficult, as a fixed beam shape will necessarily be skewed when directed at a non-orthogonal sample surface. Here, we show that this aberration can be compensated via closed-loop adaptive beam shaping, via the use of a MEMS device (Texas Instruments digital micromirror device) acting as an intensity spatial light modulator that is used to create a beam intensity profile transformation that takes into account the local surface gradient of the sample. The patterning of 18 µm diameter circular structures over a region of a 3.00 mm diameter titanium sphere has been demonstrated. Inclinations of the surface normal of up to π/2 from the vertical were tested, and the effective range was found to be up to π/5. The MEMs device is also shown to be capable of providing a real-time and precise laser beam repositioning that compensates for the errors in the movement stages.
Text
Heath et al 2018 J. Micromech. Microeng. 10.1088 1361-6439 aae1d5
- Accepted Manuscript
Text
Heath 2018 J. Micromech. Microeng. 28 127001
- Version of Record
More information
In preparation date: 23 July 2018
Accepted/In Press date: 17 September 2018
e-pub ahead of print date: 17 September 2018
Published date: December 2018
Identifiers
Local EPrints ID: 425695
URI: http://eprints.soton.ac.uk/id/eprint/425695
ISSN: 0960-1317
PURE UUID: 1be2cf97-6d19-4a93-9c4d-e9212a437c43
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Date deposited: 31 Oct 2018 17:30
Last modified: 16 Mar 2024 04:05
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Contributors
Author:
Daniel Heath
Author:
Benita S. MacKay
Author:
James Grant-Jacob
Author:
Yunhui Xie
Author:
Richard Oreffo
Author:
Robert Eason
Author:
Benjamin Mills
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