Suspended low-loss germanium waveguides for the longwave-infrared
Suspended low-loss germanium waveguides for the longwave-infrared
Germanium is a material of high interest for midinfrared (MIR) integrated photonics due to its CMOS compatibility and its wide transparency window covering the 2–15 μm spectral region exceeding the 4 and 8 μm limit of the Silicon-on-Insulator (SOI) platform and Si material respectively. In this Letter, we report suspended germanium waveguides operating at a wavelength of 7.67 μm with a propagation loss of 2.6 ± 0.3 dB/cm. To our knowledge, this is the first demonstration of low-loss suspended germanium waveguides at such a long wavelength. Suspension of the waveguide is achieved by defining holes alongside the core providing access to the buried oxide layer and the underlying Si layer so that they can be wet etched using HF and TMAH respectively. Our MIR waveguides create a new path towards long wavelength sensing in the fingerprint region.
5997-6000
Osman, Ahmed
eb387b50-c718-47df-ac90-97b2efd3e335
Nedeljković, Miloš
b64e21c2-1b95-479d-a35c-3456dff8c796
Soler Penadés, Jordi
f18f3619-0d71-4547-95fd-dd38c37b7adb
Wu, Yangbo
000d8846-20f2-4cea-b496-f6f4b73a171f
Qu, Zhibo
ff376b43-4352-4bd2-8420-c1c6cfccd45c
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Debnath, Kapil
aa01749d-524b-4464-b90a-af072e92a02f
Mashanovich, Goran
c806e262-af80-4836-b96f-319425060051
15 December 2018
Osman, Ahmed
eb387b50-c718-47df-ac90-97b2efd3e335
Nedeljković, Miloš
b64e21c2-1b95-479d-a35c-3456dff8c796
Soler Penadés, Jordi
f18f3619-0d71-4547-95fd-dd38c37b7adb
Wu, Yangbo
000d8846-20f2-4cea-b496-f6f4b73a171f
Qu, Zhibo
ff376b43-4352-4bd2-8420-c1c6cfccd45c
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Debnath, Kapil
aa01749d-524b-4464-b90a-af072e92a02f
Mashanovich, Goran
c806e262-af80-4836-b96f-319425060051
Osman, Ahmed, Nedeljković, Miloš, Soler Penadés, Jordi, Wu, Yangbo, Qu, Zhibo, Khokhar, Ali, Debnath, Kapil and Mashanovich, Goran
(2018)
Suspended low-loss germanium waveguides for the longwave-infrared.
Optics Letters, 43 (24), .
(doi:10.1364/OL.43.005997).
Abstract
Germanium is a material of high interest for midinfrared (MIR) integrated photonics due to its CMOS compatibility and its wide transparency window covering the 2–15 μm spectral region exceeding the 4 and 8 μm limit of the Silicon-on-Insulator (SOI) platform and Si material respectively. In this Letter, we report suspended germanium waveguides operating at a wavelength of 7.67 μm with a propagation loss of 2.6 ± 0.3 dB/cm. To our knowledge, this is the first demonstration of low-loss suspended germanium waveguides at such a long wavelength. Suspension of the waveguide is achieved by defining holes alongside the core providing access to the buried oxide layer and the underlying Si layer so that they can be wet etched using HF and TMAH respectively. Our MIR waveguides create a new path towards long wavelength sensing in the fingerprint region.
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Suspended low-loss germanium waveguides for the longwave-infrared
- Accepted Manuscript
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ol-43-24-5997
- Version of Record
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Accepted/In Press date: 30 October 2018
e-pub ahead of print date: 5 November 2018
Published date: 15 December 2018
Identifiers
Local EPrints ID: 425948
URI: http://eprints.soton.ac.uk/id/eprint/425948
ISSN: 0146-9592
PURE UUID: f20fd54e-9196-4566-86a7-9f10f32b6548
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Date deposited: 07 Nov 2018 17:30
Last modified: 29 Oct 2024 02:45
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Contributors
Author:
Ahmed Osman
Author:
Miloš Nedeljković
Author:
Jordi Soler Penadés
Author:
Yangbo Wu
Author:
Zhibo Qu
Author:
Ali Khokhar
Author:
Kapil Debnath
Author:
Goran Mashanovich
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