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Suspended low-loss germanium waveguides for the longwave-infrared

Suspended low-loss germanium waveguides for the longwave-infrared
Suspended low-loss germanium waveguides for the longwave-infrared
Germanium is a material of high interest for midinfrared (MIR) integrated photonics due to its CMOS compatibility and its wide transparency window covering the 2–15 μm spectral region exceeding the 4 and 8 μm limit of the Silicon-on-Insulator (SOI) platform and Si material respectively. In this Letter, we report suspended germanium waveguides operating at a wavelength of 7.67 μm with a propagation loss of 2.6 ± 0.3 dB/cm. To our knowledge, this is the first demonstration of low-loss suspended germanium waveguides at such a long wavelength. Suspension of the waveguide is achieved by defining holes alongside the core providing access to the buried oxide layer and the underlying Si layer so that they can be wet etched using HF and TMAH respectively. Our MIR waveguides create a new path towards long wavelength sensing in the fingerprint region.
0146-9592
5997-6000
Osman, Ahmed
eb387b50-c718-47df-ac90-97b2efd3e335
Nedeljković, Milos
b64e21c2-1b95-479d-a35c-3456dff8c796
Soler Penadés, Jordi
f18f3619-0d71-4547-95fd-dd38c37b7adb
Wu, Yangbo
000d8846-20f2-4cea-b496-f6f4b73a171f
Qu, Zhibo
ff376b43-4352-4bd2-8420-c1c6cfccd45c
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Debnath, Kapil
aa01749d-524b-4464-b90a-af072e92a02f
Mashanovich, Goran
c806e262-af80-4836-b96f-319425060051
Osman, Ahmed
eb387b50-c718-47df-ac90-97b2efd3e335
Nedeljković, Milos
b64e21c2-1b95-479d-a35c-3456dff8c796
Soler Penadés, Jordi
f18f3619-0d71-4547-95fd-dd38c37b7adb
Wu, Yangbo
000d8846-20f2-4cea-b496-f6f4b73a171f
Qu, Zhibo
ff376b43-4352-4bd2-8420-c1c6cfccd45c
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Debnath, Kapil
aa01749d-524b-4464-b90a-af072e92a02f
Mashanovich, Goran
c806e262-af80-4836-b96f-319425060051

Osman, Ahmed, Nedeljković, Milos, Soler Penadés, Jordi, Wu, Yangbo, Qu, Zhibo, Khokhar, Ali, Debnath, Kapil and Mashanovich, Goran (2018) Suspended low-loss germanium waveguides for the longwave-infrared. Optics Letters, 43 (24), 5997-6000. (doi:10.1364/OL.43.005997).

Record type: Letter

Abstract

Germanium is a material of high interest for midinfrared (MIR) integrated photonics due to its CMOS compatibility and its wide transparency window covering the 2–15 μm spectral region exceeding the 4 and 8 μm limit of the Silicon-on-Insulator (SOI) platform and Si material respectively. In this Letter, we report suspended germanium waveguides operating at a wavelength of 7.67 μm with a propagation loss of 2.6 ± 0.3 dB/cm. To our knowledge, this is the first demonstration of low-loss suspended germanium waveguides at such a long wavelength. Suspension of the waveguide is achieved by defining holes alongside the core providing access to the buried oxide layer and the underlying Si layer so that they can be wet etched using HF and TMAH respectively. Our MIR waveguides create a new path towards long wavelength sensing in the fingerprint region.

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More information

Accepted/In Press date: 30 October 2018
e-pub ahead of print date: 5 November 2018
Published date: 15 December 2018

Identifiers

Local EPrints ID: 425948
URI: https://eprints.soton.ac.uk/id/eprint/425948
ISSN: 0146-9592
PURE UUID: f20fd54e-9196-4566-86a7-9f10f32b6548
ORCID for Ahmed Osman: ORCID iD orcid.org/0000-0001-6575-3861
ORCID for Milos Nedeljković: ORCID iD orcid.org/0000-0002-9170-7911
ORCID for Jordi Soler Penadés: ORCID iD orcid.org/0000-0002-1706-8533

Catalogue record

Date deposited: 07 Nov 2018 17:30
Last modified: 05 Dec 2019 05:01

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