Particulate reduction in PLD-grown crystalline films via bi-directional target irradiation
Particulate reduction in PLD-grown crystalline films via bi-directional target irradiation
We present a novel variation of the pulsed laser deposition technique, aimed at reducing the number of particulates produced and consequently the linear propagation loss observed in the resulting crystal waveguides. The approach relies upon configuring the system to effectively provide bi-directional ablation, whereby the incidence angle of the fixed pulsed-laser-beam with respect to the target surface changes sign, depending upon the rotation angle and position of the target. Such an alternating ablation direction is intended to reduce the buildup of undesirable periodic surface structures, such as directional cones, believed to be a major source of particulates within the growing film. We show that targets ablated using this technique have fewer directional structures and a decreased surface roughness. Furthermore, using PLD-grown Y3Ga5O12 as the exemplar crystal film, we compare growths with uni- and bi-directional ablation and demonstrate reduction from ~ 0.9 dB/cm to ~ 0.23 dB/cm in the average waveguide propagation losses via the latter.
Prentice, Jake, Jonathan
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Grant-Jacob, James
c5d144d8-3c43-4195-8e80-edd96bfda91b
Mackenzie, Jacob
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Eason, Robert
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Kurilchik, Sergey
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2 February 2019
Prentice, Jake, Jonathan
a053f4e8-3ebd-4625-a703-fc7b03f54e9c
Grant-Jacob, James
c5d144d8-3c43-4195-8e80-edd96bfda91b
Mackenzie, Jacob
1d82c826-fdbf-425b-ac04-be43ccf12008
Eason, Robert
e38684c3-d18c-41b9-a4aa-def67283b020
Kurilchik, Sergey
0b3cfff0-6d23-4568-bbf6-4204790993de
Prentice, Jake, Jonathan, Grant-Jacob, James, Mackenzie, Jacob, Eason, Robert and Kurilchik, Sergey
(2019)
Particulate reduction in PLD-grown crystalline films via bi-directional target irradiation.
Applied Physics A: Materials Science & Processing, 125.
(doi:10.1007/s00339-019-2456-5).
Abstract
We present a novel variation of the pulsed laser deposition technique, aimed at reducing the number of particulates produced and consequently the linear propagation loss observed in the resulting crystal waveguides. The approach relies upon configuring the system to effectively provide bi-directional ablation, whereby the incidence angle of the fixed pulsed-laser-beam with respect to the target surface changes sign, depending upon the rotation angle and position of the target. Such an alternating ablation direction is intended to reduce the buildup of undesirable periodic surface structures, such as directional cones, believed to be a major source of particulates within the growing film. We show that targets ablated using this technique have fewer directional structures and a decreased surface roughness. Furthermore, using PLD-grown Y3Ga5O12 as the exemplar crystal film, we compare growths with uni- and bi-directional ablation and demonstrate reduction from ~ 0.9 dB/cm to ~ 0.23 dB/cm in the average waveguide propagation losses via the latter.
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In preparation date: 2018
Accepted/In Press date: 28 January 2019
Published date: 2 February 2019
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Local EPrints ID: 426165
URI: http://eprints.soton.ac.uk/id/eprint/426165
ISSN: 0947-8396
PURE UUID: a11dba98-ee23-4324-b935-a79200136ec9
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Date deposited: 15 Nov 2018 17:30
Last modified: 16 Mar 2024 04:05
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