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A novel high-densitivity butterfly gyroscope driven by horizontal driving force

A novel high-densitivity butterfly gyroscope driven by horizontal driving force
A novel high-densitivity butterfly gyroscope driven by horizontal driving force

Sensitivity is an important performance index of micro-machined gyroscope, and driving amplitude and initial capacitance gap are related to the signal-noise ratio as well as the sensitivity of gyroscope. The traditional butterfly gyroscope in our research group will generate both horizontal and vertical driving amplitude when driven in driving mode. So, the signal-noise ratio is subjected to the vertical driving displacement and initial capacitance gap, which, to a great extent, limits its sensitivity. In this paper, a novel high-sensitivity butterfly gyroscope with rectangle vibration beam was proposed, which will generate almost only horizontal displacement due to the structural characteristics when driven by horizontal driving force. Therefore, the proposed structure can not only increase the driving amplitude, but also reduce the initial capacitance gap, so as to enhance the signal-noise ratio as well as sensitivity of the gyroscope. After the structural design and manufacture processing, the performance of the proposed butterfly gyroscope was tested, and the angle random walk (ARW) is measured to be 1.244deg/√h, and the bias stability reached 3.58deg/h.

butterfly micro-machined gyroscope, driving amplitude, rectangle vibration beam, signal-noise ratio
1530-437X
Qiang, Xu
99d0fab1-d637-46b2-8f57-5c298eb372a5
Dingbang, Xiao
50db3f06-ffb4-4688-8b12-c71ec2596e14
Zhanqiang, Hou
0d3df118-2737-44b5-bb0b-eca402976707
Ming, Zhuo
c081f434-1127-4e29-8ad3-9a8dc4e4ae3f
Wenyin, Li
fdc3e1e8-2e7e-46b0-a1a1-6659ff8228f4
Xiangming, Xu
4e94142c-c4ed-4d05-8c49-49edab3d0251
Xuezhong, Wu
7585b0b0-7919-43a4-b382-b59eca7086ae
Qiang, Xu
99d0fab1-d637-46b2-8f57-5c298eb372a5
Dingbang, Xiao
50db3f06-ffb4-4688-8b12-c71ec2596e14
Zhanqiang, Hou
0d3df118-2737-44b5-bb0b-eca402976707
Ming, Zhuo
c081f434-1127-4e29-8ad3-9a8dc4e4ae3f
Wenyin, Li
fdc3e1e8-2e7e-46b0-a1a1-6659ff8228f4
Xiangming, Xu
4e94142c-c4ed-4d05-8c49-49edab3d0251
Xuezhong, Wu
7585b0b0-7919-43a4-b382-b59eca7086ae

Qiang, Xu, Dingbang, Xiao, Zhanqiang, Hou, Ming, Zhuo, Wenyin, Li, Xiangming, Xu and Xuezhong, Wu (2018) A novel high-densitivity butterfly gyroscope driven by horizontal driving force. IEEE Sensors Journal. (doi:10.1109/JSEN.2018.2886019).

Record type: Article

Abstract

Sensitivity is an important performance index of micro-machined gyroscope, and driving amplitude and initial capacitance gap are related to the signal-noise ratio as well as the sensitivity of gyroscope. The traditional butterfly gyroscope in our research group will generate both horizontal and vertical driving amplitude when driven in driving mode. So, the signal-noise ratio is subjected to the vertical driving displacement and initial capacitance gap, which, to a great extent, limits its sensitivity. In this paper, a novel high-sensitivity butterfly gyroscope with rectangle vibration beam was proposed, which will generate almost only horizontal displacement due to the structural characteristics when driven by horizontal driving force. Therefore, the proposed structure can not only increase the driving amplitude, but also reduce the initial capacitance gap, so as to enhance the signal-noise ratio as well as sensitivity of the gyroscope. After the structural design and manufacture processing, the performance of the proposed butterfly gyroscope was tested, and the angle random walk (ARW) is measured to be 1.244deg/√h, and the bias stability reached 3.58deg/h.

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08571244 - Accepted Manuscript
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More information

Accepted/In Press date: 2018
e-pub ahead of print date: 10 December 2018
Keywords: butterfly micro-machined gyroscope, driving amplitude, rectangle vibration beam, signal-noise ratio

Identifiers

Local EPrints ID: 426952
URI: http://eprints.soton.ac.uk/id/eprint/426952
ISSN: 1530-437X
PURE UUID: 092a1653-2e88-4153-9a7f-8e0b33d5b90d

Catalogue record

Date deposited: 19 Dec 2018 17:30
Last modified: 19 Jul 2019 16:47

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