Germanium implanted photonic devices for post-fabrication trimming and programmable circuits
Germanium implanted photonic devices for post-fabrication trimming and programmable circuits
We reviewed our recent developments on the post-fabrication trimming techniques and programmable photonic circuits based on germanium ion implanted silicon waveguides. Annealing of ion implanted silicon can efficiently change the refractive index. This technology has been employed to fine-tune the optical phase, and therefore the operating point of photonic devices, enabling permanent correction of optical phase error induced by fabrication variations. High accuracy phase trimming was achieved with laser annealing and a real-time feedback control system. Erasable waveguides and directional couplers were also demonstrated, which can be used to implement programmable photonic circuits with low power consumption.
Integrated Photonics, ion implantation, laser annealing, Mach-Zehnder interferometer, programmable, ring resonators, silicon photonics, trimming
1-8
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Milošević, Milan M.
b28da945-84a5-4317-8896-6d9ea6a69589
Yu, Xingshi
7fb4e039-1fb0-4c2e-8567-43e97e77c997
Chen, Bigeng
e533448b-095e-4a9f-924c-301f4aa3007b
Runge, Antoine F.J.
874cec37-209b-4c7a-97a5-56d05596dd2b
Khokhar, Ali Z.
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Thomson, David J.
17c1626c-2422-42c6-98e0-586ae220bcda
Peacock, Anna C.
685d924c-ef6b-401b-a0bd-acf1f8e758fc
Saito, Shinichi
14a5d20b-055e-4f48-9dda-267e88bd3fdc
Muskens, Otto L.
2284101a-f9ef-4d79-8951-a6cda5bfc7f9
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
2018
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Milošević, Milan M.
b28da945-84a5-4317-8896-6d9ea6a69589
Yu, Xingshi
7fb4e039-1fb0-4c2e-8567-43e97e77c997
Chen, Bigeng
e533448b-095e-4a9f-924c-301f4aa3007b
Runge, Antoine F.J.
874cec37-209b-4c7a-97a5-56d05596dd2b
Khokhar, Ali Z.
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Thomson, David J.
17c1626c-2422-42c6-98e0-586ae220bcda
Peacock, Anna C.
685d924c-ef6b-401b-a0bd-acf1f8e758fc
Saito, Shinichi
14a5d20b-055e-4f48-9dda-267e88bd3fdc
Muskens, Otto L.
2284101a-f9ef-4d79-8951-a6cda5bfc7f9
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Chen, Xia, Milošević, Milan M., Yu, Xingshi, Chen, Bigeng, Runge, Antoine F.J., Khokhar, Ali Z., Mailis, Sakellaris, Thomson, David J., Peacock, Anna C., Saito, Shinichi, Muskens, Otto L. and Reed, Graham T.
(2018)
Germanium implanted photonic devices for post-fabrication trimming and programmable circuits.
In Nanophotonics and Micro/Nano Optics IV.
vol. 10823,
SPIE.
.
(doi:10.1117/12.2503224).
Record type:
Conference or Workshop Item
(Paper)
Abstract
We reviewed our recent developments on the post-fabrication trimming techniques and programmable photonic circuits based on germanium ion implanted silicon waveguides. Annealing of ion implanted silicon can efficiently change the refractive index. This technology has been employed to fine-tune the optical phase, and therefore the operating point of photonic devices, enabling permanent correction of optical phase error induced by fabrication variations. High accuracy phase trimming was achieved with laser annealing and a real-time feedback control system. Erasable waveguides and directional couplers were also demonstrated, which can be used to implement programmable photonic circuits with low power consumption.
This record has no associated files available for download.
More information
Accepted/In Press date: 1 January 2018
e-pub ahead of print date: 25 October 2018
Published date: 2018
Venue - Dates:
Nanophotonics and Micro/Nano Optics IV 2018, , Beijing, China, 2018-10-12 - 2018-10-13
Keywords:
Integrated Photonics, ion implantation, laser annealing, Mach-Zehnder interferometer, programmable, ring resonators, silicon photonics, trimming
Identifiers
Local EPrints ID: 426998
URI: http://eprints.soton.ac.uk/id/eprint/426998
PURE UUID: f6d0cd35-8d41-4f52-8065-6da578f3e0d1
Catalogue record
Date deposited: 20 Dec 2018 17:30
Last modified: 18 Mar 2024 03:23
Export record
Altmetrics
Contributors
Author:
Xia Chen
Author:
Milan M. Milošević
Author:
Xingshi Yu
Author:
Bigeng Chen
Author:
Antoine F.J. Runge
Author:
Ali Z. Khokhar
Author:
Sakellaris Mailis
Author:
Shinichi Saito
Download statistics
Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.
View more statistics