Germanium implanted photonic devices for post-fabrication trimming and programmable circuits

Chen, Xia, Milosević, Milan M., Yu, Xingshi, Chen, Bigeng, Runge, Antoine F.J., Khokhar, Ali Z., Mailis, Sakellaris, Thomson, David J., Peacock, Anna C., Saito, Shinichi, Muskens, Otto L. and Reed, Graham T. (2018) Germanium implanted photonic devices for post-fabrication trimming and programmable circuits. In Nanophotonics and Micro/Nano Optics IV. vol. 10823, SPIE. pp. 1-8 . (doi:10.1117/12.2503224).

Abstract

We reviewed our recent developments on the post-fabrication trimming techniques and programmable photonic circuits based on germanium ion implanted silicon waveguides. Annealing of ion implanted silicon can efficiently change the refractive index. This technology has been employed to fine-tune the optical phase, and therefore the operating point of photonic devices, enabling permanent correction of optical phase error induced by fabrication variations. High accuracy phase trimming was achieved with laser annealing and a real-time feedback control system. Erasable waveguides and directional couplers were also demonstrated, which can be used to implement programmable photonic circuits with low power consumption.

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Contributors

Author: Xia Chen

Author: Bigeng Chen

Author: Sakellaris Mailis

Author: Anna C. Peacock

Author: Shinichi Saito

Author: Otto L. Muskens

University divisions

• Quantum, Light and Matter Group
• Zepler Institute for Photonics and Nanoelectronics
• Photonic Systems Circuits and Sensors Group
• Institute for Life Sciences (pre 2018 reorg)
• Electronics & Computer Science (pre 2018 reorg)
• Nanophotonics Group
• Fibre and Systems Group
• Sustainable Electronic Technologies

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