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Germanium implanted photonic devices for post-fabrication trimming and programmable circuits

Germanium implanted photonic devices for post-fabrication trimming and programmable circuits
Germanium implanted photonic devices for post-fabrication trimming and programmable circuits

We reviewed our recent developments on the post-fabrication trimming techniques and programmable photonic circuits based on germanium ion implanted silicon waveguides. Annealing of ion implanted silicon can efficiently change the refractive index. This technology has been employed to fine-tune the optical phase, and therefore the operating point of photonic devices, enabling permanent correction of optical phase error induced by fabrication variations. High accuracy phase trimming was achieved with laser annealing and a real-time feedback control system. Erasable waveguides and directional couplers were also demonstrated, which can be used to implement programmable photonic circuits with low power consumption.

Integrated Photonics, ion implantation, laser annealing, Mach-Zehnder interferometer, programmable, ring resonators, silicon photonics, trimming
10823
1-8
SPIE
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Milosević, Milan M.
b28da945-84a5-4317-8896-6d9ea6a69589
Yu, Xingshi
7fb4e039-1fb0-4c2e-8567-43e97e77c997
Chen, Bigeng
e533448b-095e-4a9f-924c-301f4aa3007b
Runge, Antoine F.J.
874cec37-209b-4c7a-97a5-56d05596dd2b
Khokhar, Ali Z.
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Thomson, David J.
17c1626c-2422-42c6-98e0-586ae220bcda
Peacock, Anna C.
685d924c-ef6b-401b-a0bd-acf1f8e758fc
Saito, Shinichi
14a5d20b-055e-4f48-9dda-267e88bd3fdc
Muskens, Otto L.
2284101a-f9ef-4d79-8951-a6cda5bfc7f9
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Milosević, Milan M.
b28da945-84a5-4317-8896-6d9ea6a69589
Yu, Xingshi
7fb4e039-1fb0-4c2e-8567-43e97e77c997
Chen, Bigeng
e533448b-095e-4a9f-924c-301f4aa3007b
Runge, Antoine F.J.
874cec37-209b-4c7a-97a5-56d05596dd2b
Khokhar, Ali Z.
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Thomson, David J.
17c1626c-2422-42c6-98e0-586ae220bcda
Peacock, Anna C.
685d924c-ef6b-401b-a0bd-acf1f8e758fc
Saito, Shinichi
14a5d20b-055e-4f48-9dda-267e88bd3fdc
Muskens, Otto L.
2284101a-f9ef-4d79-8951-a6cda5bfc7f9
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139

Chen, Xia, Milosević, Milan M., Yu, Xingshi, Chen, Bigeng, Runge, Antoine F.J., Khokhar, Ali Z., Mailis, Sakellaris, Thomson, David J., Peacock, Anna C., Saito, Shinichi, Muskens, Otto L. and Reed, Graham T. (2018) Germanium implanted photonic devices for post-fabrication trimming and programmable circuits. In Nanophotonics and Micro/Nano Optics IV. vol. 10823, SPIE. pp. 1-8 . (doi:10.1117/12.2503224).

Record type: Conference or Workshop Item (Paper)

Abstract

We reviewed our recent developments on the post-fabrication trimming techniques and programmable photonic circuits based on germanium ion implanted silicon waveguides. Annealing of ion implanted silicon can efficiently change the refractive index. This technology has been employed to fine-tune the optical phase, and therefore the operating point of photonic devices, enabling permanent correction of optical phase error induced by fabrication variations. High accuracy phase trimming was achieved with laser annealing and a real-time feedback control system. Erasable waveguides and directional couplers were also demonstrated, which can be used to implement programmable photonic circuits with low power consumption.

Full text not available from this repository.

More information

Accepted/In Press date: 1 January 2018
e-pub ahead of print date: 25 October 2018
Published date: 2018
Venue - Dates: Nanophotonics and Micro/Nano Optics IV 2018, Beijing, China, 2018-10-12 - 2018-10-13
Keywords: Integrated Photonics, ion implantation, laser annealing, Mach-Zehnder interferometer, programmable, ring resonators, silicon photonics, trimming

Identifiers

Local EPrints ID: 426998
URI: https://eprints.soton.ac.uk/id/eprint/426998
PURE UUID: f6d0cd35-8d41-4f52-8065-6da578f3e0d1
ORCID for Xia Chen: ORCID iD orcid.org/0000-0002-0994-5401
ORCID for Bigeng Chen: ORCID iD orcid.org/0000-0003-4925-2308
ORCID for Sakellaris Mailis: ORCID iD orcid.org/0000-0001-8100-2670
ORCID for Anna C. Peacock: ORCID iD orcid.org/0000-0002-1940-7172
ORCID for Shinichi Saito: ORCID iD orcid.org/0000-0003-1539-1182
ORCID for Otto L. Muskens: ORCID iD orcid.org/0000-0003-0693-5504

Catalogue record

Date deposited: 20 Dec 2018 17:30
Last modified: 02 Nov 2019 01:38

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