Chen, Xia, Milosević, Milan M., Yu, Xingshi, Chen, Bigeng, Runge, Antoine F.J., Khokhar, Ali Z., Mailis, Sakellaris, Thomson, David J., Peacock, Anna C., Saito, Shinichi, Muskens, Otto L. and Reed, Graham T. (2018) Germanium implanted photonic devices for post-fabrication trimming and programmable circuits. In Nanophotonics and Micro/Nano Optics IV. vol. 10823, SPIE. pp. 1-8 . (doi:10.1117/12.2503224).
Abstract
We reviewed our recent developments on the post-fabrication trimming techniques and programmable photonic circuits based on germanium ion implanted silicon waveguides. Annealing of ion implanted silicon can efficiently change the refractive index. This technology has been employed to fine-tune the optical phase, and therefore the operating point of photonic devices, enabling permanent correction of optical phase error induced by fabrication variations. High accuracy phase trimming was achieved with laser annealing and a real-time feedback control system. Erasable waveguides and directional couplers were also demonstrated, which can be used to implement programmable photonic circuits with low power consumption.
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- Current Faculties > Faculty of Engineering and Physical Sciences > School of Physics and Astronomy > Quantum, Light and Matter Group
School of Physics and Astronomy > Quantum, Light and Matter Group - Current Faculties > Faculty of Engineering and Physical Sciences > Zepler Institute for Photonics and Nanoelectronics
Zepler Institute for Photonics and Nanoelectronics - Current Faculties > Faculty of Engineering and Physical Sciences > Zepler Institute for Photonics and Nanoelectronics > Nanophotonics Group > Photonic Systems Circuits and Sensors Group
Zepler Institute for Photonics and Nanoelectronics > Nanophotonics Group > Photonic Systems Circuits and Sensors Group - Faculties (pre 2018 reorg) > Faculty of Natural and Environmental Sciences (pre 2018 reorg) > Institute for Life Sciences (pre 2018 reorg)
Current Faculties > Faculty of Environmental and Life Sciences > Institute for Life Sciences > Institute for Life Sciences (pre 2018 reorg)
Institute for Life Sciences > Institute for Life Sciences (pre 2018 reorg) - Faculties (pre 2018 reorg) > Faculty of Physical Sciences and Engineering (pre 2018 reorg) > Electronics & Computer Science (pre 2018 reorg)
Current Faculties > Faculty of Engineering and Physical Sciences > School of Electronics and Computer Science > Electronics & Computer Science (pre 2018 reorg)
School of Electronics and Computer Science > Electronics & Computer Science (pre 2018 reorg) - Current Faculties > Faculty of Engineering and Physical Sciences > Zepler Institute for Photonics and Nanoelectronics > Nanophotonics Group
Zepler Institute for Photonics and Nanoelectronics > Nanophotonics Group - Current Faculties > Faculty of Engineering and Physical Sciences > Zepler Institute for Photonics and Nanoelectronics > Fibre and Systems Group
Zepler Institute for Photonics and Nanoelectronics > Fibre and Systems Group - Current Faculties > Faculty of Engineering and Physical Sciences > School of Electronics and Computer Science > Sustainable Electronic Technologies
School of Electronics and Computer Science > Sustainable Electronic Technologies
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