Advancing silicon photonics by germanium ion implantation into silicon
Advancing silicon photonics by germanium ion implantation into silicon
We review our recent developments of the trimming techniques for correcting the operating point of ring resonator and Mach-Zehnder Interferometers (MZIs). This technology has been employed to fine-tune the effective index of waveguides, and therefore the operating point of photonic devices, enabling permanent correction of optical phase error induced by fabrication variations. Large resonance wavelength shift of ring resonators was demonstrated, and the shift can be tuned via changing the laser power used for annealing. A higher accuracy trimming technique with a scanning laser was also demonstrated to fine-tune the operating point of integrated MZIs. The effective index change of the optical mode is up to 0.19 in our measurements, which is approximately an order of magnitude improvement compared to previous work, whilst retaining similar excess optical loss.
Annealing, Ion implantation, Mach-Zehnder Interferometer, Ring resonators, Silicon photonics, Trimming
Reed, Graham T.
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Chen, Xia
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Milošević, Milan M.
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Cao, Wei
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Littlejohns, Callum
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Khokhar, Ali Z.
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Franz, Yohann
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Runge, Antoine F.J.
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Mailis, Sakellaris
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Thomson, David J.
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Peacock, Anna C.
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2018
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Milošević, Milan M.
b28da945-84a5-4317-8896-6d9ea6a69589
Cao, Wei
5202fa2b-a471-45d4-84e9-9104dffdbbfc
Littlejohns, Callum
d2837f04-0a83-4bf9-acb2-618aa42a0cad
Khokhar, Ali Z.
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Franz, Yohann
edb6208c-9f65-42c4-965e-b6bc54945602
Runge, Antoine F.J.
874cec37-209b-4c7a-97a5-56d05596dd2b
Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Thomson, David J.
17c1626c-2422-42c6-98e0-586ae220bcda
Peacock, Anna C.
685d924c-ef6b-401b-a0bd-acf1f8e758fc
Reed, Graham T., Chen, Xia, Milošević, Milan M., Cao, Wei, Littlejohns, Callum, Khokhar, Ali Z., Franz, Yohann, Runge, Antoine F.J., Mailis, Sakellaris, Thomson, David J. and Peacock, Anna C.
(2018)
Advancing silicon photonics by germanium ion implantation into silicon.
In Smart Photonic and Optoelectronic Integrated Circuits XX.
vol. 10536,
SPIE..
(doi:10.1117/12.2292199).
Record type:
Conference or Workshop Item
(Paper)
Abstract
We review our recent developments of the trimming techniques for correcting the operating point of ring resonator and Mach-Zehnder Interferometers (MZIs). This technology has been employed to fine-tune the effective index of waveguides, and therefore the operating point of photonic devices, enabling permanent correction of optical phase error induced by fabrication variations. Large resonance wavelength shift of ring resonators was demonstrated, and the shift can be tuned via changing the laser power used for annealing. A higher accuracy trimming technique with a scanning laser was also demonstrated to fine-tune the operating point of integrated MZIs. The effective index change of the optical mode is up to 0.19 in our measurements, which is approximately an order of magnitude improvement compared to previous work, whilst retaining similar excess optical loss.
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More information
Accepted/In Press date: 1 January 2018
e-pub ahead of print date: 22 February 2018
Published date: 2018
Venue - Dates:
Smart Photonic and Optoelectronic Integrated Circuits XX 2018, , San Francisco, United States, 2018-01-29 - 2018-02-01
Keywords:
Annealing, Ion implantation, Mach-Zehnder Interferometer, Ring resonators, Silicon photonics, Trimming
Identifiers
Local EPrints ID: 427256
URI: http://eprints.soton.ac.uk/id/eprint/427256
PURE UUID: 8027496a-3a76-4a83-aeca-e9fdf6068469
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Date deposited: 10 Jan 2019 17:30
Last modified: 16 Apr 2024 01:38
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Contributors
Author:
Xia Chen
Author:
Milan M. Milošević
Author:
Wei Cao
Author:
Ali Z. Khokhar
Author:
Yohann Franz
Author:
Antoine F.J. Runge
Author:
Sakellaris Mailis
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