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Advancing silicon photonics by germanium ion implantation into silicon

Advancing silicon photonics by germanium ion implantation into silicon
Advancing silicon photonics by germanium ion implantation into silicon

We review our recent developments of the trimming techniques for correcting the operating point of ring resonator and Mach-Zehnder Interferometers (MZIs). This technology has been employed to fine-tune the effective index of waveguides, and therefore the operating point of photonic devices, enabling permanent correction of optical phase error induced by fabrication variations. Large resonance wavelength shift of ring resonators was demonstrated, and the shift can be tuned via changing the laser power used for annealing. A higher accuracy trimming technique with a scanning laser was also demonstrated to fine-tune the operating point of integrated MZIs. The effective index change of the optical mode is up to 0.19 in our measurements, which is approximately an order of magnitude improvement compared to previous work, whilst retaining similar excess optical loss.

Annealing, Ion implantation, Mach-Zehnder Interferometer, Ring resonators, Silicon photonics, Trimming
SPIE
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Chen, Xia
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Milošević, Milan M.
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Cao, Wei
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Littlejohns, Callum
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Khokhar, Ali Z.
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Franz, Yohann
edb6208c-9f65-42c4-965e-b6bc54945602
Runge, Antoine F.J.
874cec37-209b-4c7a-97a5-56d05596dd2b
Mailis, Sakellaris
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Thomson, David J.
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Peacock, Anna C.
685d924c-ef6b-401b-a0bd-acf1f8e758fc
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Milošević, Milan M.
b28da945-84a5-4317-8896-6d9ea6a69589
Cao, Wei
6194b5dd-d4e9-40d0-b5fb-b264d72fe594
Littlejohns, Callum
0fd6585d-030d-4d8f-a411-6fc03e083efa
Khokhar, Ali Z.
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Franz, Yohann
edb6208c-9f65-42c4-965e-b6bc54945602
Runge, Antoine F.J.
874cec37-209b-4c7a-97a5-56d05596dd2b
Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Thomson, David J.
17c1626c-2422-42c6-98e0-586ae220bcda
Peacock, Anna C.
685d924c-ef6b-401b-a0bd-acf1f8e758fc

Reed, Graham T., Chen, Xia, Milošević, Milan M., Cao, Wei, Littlejohns, Callum, Khokhar, Ali Z., Franz, Yohann, Runge, Antoine F.J., Mailis, Sakellaris, Thomson, David J. and Peacock, Anna C. (2018) Advancing silicon photonics by germanium ion implantation into silicon. In Smart Photonic and Optoelectronic Integrated Circuits XX. vol. 10536, SPIE.. (doi:10.1117/12.2292199).

Record type: Conference or Workshop Item (Paper)

Abstract

We review our recent developments of the trimming techniques for correcting the operating point of ring resonator and Mach-Zehnder Interferometers (MZIs). This technology has been employed to fine-tune the effective index of waveguides, and therefore the operating point of photonic devices, enabling permanent correction of optical phase error induced by fabrication variations. Large resonance wavelength shift of ring resonators was demonstrated, and the shift can be tuned via changing the laser power used for annealing. A higher accuracy trimming technique with a scanning laser was also demonstrated to fine-tune the operating point of integrated MZIs. The effective index change of the optical mode is up to 0.19 in our measurements, which is approximately an order of magnitude improvement compared to previous work, whilst retaining similar excess optical loss.

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More information

Accepted/In Press date: 1 January 2018
e-pub ahead of print date: 22 February 2018
Published date: 2018
Venue - Dates: Smart Photonic and Optoelectronic Integrated Circuits XX 2018, San Francisco, United States, 2018-01-29 - 2018-02-01
Keywords: Annealing, Ion implantation, Mach-Zehnder Interferometer, Ring resonators, Silicon photonics, Trimming

Identifiers

Local EPrints ID: 427256
URI: https://eprints.soton.ac.uk/id/eprint/427256
PURE UUID: 8027496a-3a76-4a83-aeca-e9fdf6068469
ORCID for Xia Chen: ORCID iD orcid.org/0000-0002-0994-5401
ORCID for Wei Cao: ORCID iD orcid.org/0000-0003-1431-7060
ORCID for Sakellaris Mailis: ORCID iD orcid.org/0000-0001-8100-2670
ORCID for Anna C. Peacock: ORCID iD orcid.org/0000-0002-1940-7172

Catalogue record

Date deposited: 10 Jan 2019 17:30
Last modified: 03 Dec 2019 01:57

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Contributors

Author: Graham T. Reed
Author: Xia Chen ORCID iD
Author: Wei Cao ORCID iD
Author: Callum Littlejohns
Author: Ali Z. Khokhar
Author: Yohann Franz
Author: Antoine F.J. Runge
Author: Anna C. Peacock ORCID iD

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