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Conductive-bridge memory cells based on a nanoporous electrodeposited GeSbTe alloy

Conductive-bridge memory cells based on a nanoporous electrodeposited GeSbTe alloy
Conductive-bridge memory cells based on a nanoporous electrodeposited GeSbTe alloy

We report on the fabrication of memory devices based on a nanoporous GeSbTe layer electrodeposited inbetween TiN and Ag electrodes. It is shown that devices can operate along two distinct electrical modes consisting of a volatile or a non-volatile resistance switching mode upon appropriate preconditioning procedures. Based on electrical measurements conducted in both switching modes and physical analysis performed on a device after electrical stress, resistance switching is attributed to the formation/dissolution of a conductive filament from the Ag electrode into the GST layer whereas the volatile/non-volatile resistance switching is attributed to the presence of an interface layer between the GST and the Ag top electrode. Due to their simple, low-cost and low-temperature fabrication procedure, these devices could be advantageously exploited in flexible electronic applications or embedded into the back-end of line CMOS technology.

chalcogenide, conductive-bridge random access memories, electrodeposition, GeSbTe, non-volatile memory, redox-based resistive switching memories, volatile memory
0957-4484
Rebora, Charles
fd8ac3ad-dc03-453a-a3fc-3239e004a879
Huang, Ruomeng
55c6fba5-0275-4471-af5c-fb0dd2daaa64
Kissling, Gabriela P.
b9ad7a6b-70b9-48b6-ac03-a189278dd2d9
Bocquet, Marc
0a09698f-f798-477c-9950-b931b58f1905
Groot, Kees De
92cd2e02-fcc4-43da-8816-c86f966be90c
Favre, Luc
ee0770da-d113-46db-85e4-06a1dafd79b1
Grosso, David
a116d4fa-5afe-418c-8a72-dc177e4a3908
Deleruyelle, Damien
cd14e865-4429-4c1f-a86b-75df79bd405b
Putero, Magali
2d9990cd-9f00-4447-a9be-9249f55a89ab
Rebora, Charles
fd8ac3ad-dc03-453a-a3fc-3239e004a879
Huang, Ruomeng
55c6fba5-0275-4471-af5c-fb0dd2daaa64
Kissling, Gabriela P.
b9ad7a6b-70b9-48b6-ac03-a189278dd2d9
Bocquet, Marc
0a09698f-f798-477c-9950-b931b58f1905
Groot, Kees De
92cd2e02-fcc4-43da-8816-c86f966be90c
Favre, Luc
ee0770da-d113-46db-85e4-06a1dafd79b1
Grosso, David
a116d4fa-5afe-418c-8a72-dc177e4a3908
Deleruyelle, Damien
cd14e865-4429-4c1f-a86b-75df79bd405b
Putero, Magali
2d9990cd-9f00-4447-a9be-9249f55a89ab

Rebora, Charles, Huang, Ruomeng, Kissling, Gabriela P., Bocquet, Marc, Groot, Kees De, Favre, Luc, Grosso, David, Deleruyelle, Damien and Putero, Magali (2018) Conductive-bridge memory cells based on a nanoporous electrodeposited GeSbTe alloy. Nanotechnology, 30 (2), [025202]. (doi:10.1088/1361-6528/aae6db).

Record type: Article

Abstract

We report on the fabrication of memory devices based on a nanoporous GeSbTe layer electrodeposited inbetween TiN and Ag electrodes. It is shown that devices can operate along two distinct electrical modes consisting of a volatile or a non-volatile resistance switching mode upon appropriate preconditioning procedures. Based on electrical measurements conducted in both switching modes and physical analysis performed on a device after electrical stress, resistance switching is attributed to the formation/dissolution of a conductive filament from the Ag electrode into the GST layer whereas the volatile/non-volatile resistance switching is attributed to the presence of an interface layer between the GST and the Ag top electrode. Due to their simple, low-cost and low-temperature fabrication procedure, these devices could be advantageously exploited in flexible electronic applications or embedded into the back-end of line CMOS technology.

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More information

Accepted/In Press date: 9 October 2018
e-pub ahead of print date: 9 October 2018
Published date: 1 November 2018
Keywords: chalcogenide, conductive-bridge random access memories, electrodeposition, GeSbTe, non-volatile memory, redox-based resistive switching memories, volatile memory

Identifiers

Local EPrints ID: 427310
URI: http://eprints.soton.ac.uk/id/eprint/427310
ISSN: 0957-4484
PURE UUID: 65f74390-c418-42b5-a15d-5db8cda7a06a
ORCID for Gabriela P. Kissling: ORCID iD orcid.org/0000-0003-4701-7160
ORCID for Kees De Groot: ORCID iD orcid.org/0000-0002-3850-7101

Catalogue record

Date deposited: 11 Jan 2019 17:30
Last modified: 06 Jun 2024 01:40

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Contributors

Author: Charles Rebora
Author: Ruomeng Huang
Author: Gabriela P. Kissling ORCID iD
Author: Marc Bocquet
Author: Kees De Groot ORCID iD
Author: Luc Favre
Author: David Grosso
Author: Damien Deleruyelle
Author: Magali Putero

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