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Optical waveguides by germanium ion implantation on silicon-on-insulator platform

Optical waveguides by germanium ion implantation on silicon-on-insulator platform
Optical waveguides by germanium ion implantation on silicon-on-insulator platform

We demonstrated a new type of integrated photonic waveguides formed by Ge ion implantation in the silicon slab on silicon-on-insulator platform. They were successfully fabricated and characterised, and can be potentially erased by laser annealing.

paper Th3C.3
OSA
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Milosević, Milan M.
b28da945-84a5-4317-8896-6d9ea6a69589
Khokhar, Ali Z.
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Thomson, David J.
17c1626c-2422-42c6-98e0-586ae220bcda
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Milosević, Milan M.
b28da945-84a5-4317-8896-6d9ea6a69589
Khokhar, Ali Z.
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Thomson, David J.
17c1626c-2422-42c6-98e0-586ae220bcda
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139

Chen, Xia, Milosević, Milan M., Khokhar, Ali Z., Thomson, David J. and Reed, Graham T. (2018) Optical waveguides by germanium ion implantation on silicon-on-insulator platform. In CLEO Pacific Rim Conference 2018. vol. Part F113-CLEOP, OSA.. (doi:10.1364/CLEOPR.2018.Th3C.3).

Record type: Conference or Workshop Item (Paper)

Abstract

We demonstrated a new type of integrated photonic waveguides formed by Ge ion implantation in the silicon slab on silicon-on-insulator platform. They were successfully fabricated and characterised, and can be potentially erased by laser annealing.

Full text not available from this repository.

More information

Published date: 2018
Additional Information: From the session Germinum Modulators and Ge Photonics (Th3C)
Venue - Dates: Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2018, Hong Kong, China, 2018-07-29 - 2018-08-03

Identifiers

Local EPrints ID: 427598
URI: https://eprints.soton.ac.uk/id/eprint/427598
PURE UUID: 4aa244e1-a8e1-4180-a190-1276acb8a1f8
ORCID for Xia Chen: ORCID iD orcid.org/0000-0002-0994-5401

Catalogue record

Date deposited: 24 Jan 2019 17:30
Last modified: 02 Nov 2019 01:32

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Contributors

Author: Xia Chen ORCID iD
Author: Ali Z. Khokhar
Author: Graham T. Reed

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