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Laser crystallized low-loss polycrystalline silicon waveguides

Laser crystallized low-loss polycrystalline silicon waveguides
Laser crystallized low-loss polycrystalline silicon waveguides
We report the fabrication of low-loss, low temperature deposited polysilicon waveguides via laser crystallization. The process involves pre-patterning amorphous silicon films to confine the thermal energy during the crystallization phase, which helps to control the grain growth and reduce the heat transfer to the surrounding media, making it compatible with CMOS integration. Micro-Raman spectroscopy, Secco etching and X-ray diffraction measurements reveal the high crystalline quality of the processed waveguides with the formation of millimeter long crystal grains. Optical losses as low as 5.3 dB/cm have been measured, indicating their suitability for the development of high-density integrated circuits.
1094-4087
4462-4470
Franz, Yohann
edb6208c-9f65-42c4-965e-b6bc54945602
Runge, Antoine F.J.
874cec37-209b-4c7a-97a5-56d05596dd2b
Oo, Swe Zin
6495f6da-8f17-4484-98fb-6151b4efbd9a
Martinez Jimenez, Gregorio
6f3b34dd-33de-42b0-a69d-56e724da239b
Healy, Noel
eafcdb99-38c2-4432-afbf-03cd816420ec
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Tarazona, Antulio
c6ae87c5-c746-4f89-9ff0-9e7b6874e94f
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Peacock, Anna
685d924c-ef6b-401b-a0bd-acf1f8e758fc
Franz, Yohann
edb6208c-9f65-42c4-965e-b6bc54945602
Runge, Antoine F.J.
874cec37-209b-4c7a-97a5-56d05596dd2b
Oo, Swe Zin
6495f6da-8f17-4484-98fb-6151b4efbd9a
Martinez Jimenez, Gregorio
6f3b34dd-33de-42b0-a69d-56e724da239b
Healy, Noel
eafcdb99-38c2-4432-afbf-03cd816420ec
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Tarazona, Antulio
c6ae87c5-c746-4f89-9ff0-9e7b6874e94f
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Peacock, Anna
685d924c-ef6b-401b-a0bd-acf1f8e758fc

Franz, Yohann, Runge, Antoine F.J., Oo, Swe Zin, Martinez Jimenez, Gregorio, Healy, Noel, Khokhar, Ali, Tarazona, Antulio, Chong, Harold, Mailis, Sakellaris and Peacock, Anna (2019) Laser crystallized low-loss polycrystalline silicon waveguides. Optics Express, 27 (4), 4462-4470. (doi:10.1364/OE.27.004462).

Record type: Article

Abstract

We report the fabrication of low-loss, low temperature deposited polysilicon waveguides via laser crystallization. The process involves pre-patterning amorphous silicon films to confine the thermal energy during the crystallization phase, which helps to control the grain growth and reduce the heat transfer to the surrounding media, making it compatible with CMOS integration. Micro-Raman spectroscopy, Secco etching and X-ray diffraction measurements reveal the high crystalline quality of the processed waveguides with the formation of millimeter long crystal grains. Optical losses as low as 5.3 dB/cm have been measured, indicating their suitability for the development of high-density integrated circuits.

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Accepted/In Press date: 20 December 2018
e-pub ahead of print date: 7 February 2019
Published date: 18 February 2019

Identifiers

Local EPrints ID: 428294
URI: https://eprints.soton.ac.uk/id/eprint/428294
ISSN: 1094-4087
PURE UUID: 912f5b5f-81a8-4e64-914a-a8e103cd3f91
ORCID for Harold Chong: ORCID iD orcid.org/0000-0002-7110-5761
ORCID for Sakellaris Mailis: ORCID iD orcid.org/0000-0001-8100-2670
ORCID for Anna Peacock: ORCID iD orcid.org/0000-0002-1940-7172

Catalogue record

Date deposited: 20 Feb 2019 17:30
Last modified: 14 Mar 2019 01:49

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