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Modelling and fabrication of low operation temperature microcages with a polymer/metal/DLC trilayer structure

Luo, J.K., Huang, R., He, J.H., Fu, Y.Q., Flewitt, A.J., Spearing, S.M., Fleck, N.A. and Milne, W.I. (2006) Modelling and fabrication of low operation temperature microcages with a polymer/metal/DLC trilayer structure Sensors and Actuators A: Physical, 132, (1), pp. 346-353. (doi:10.1016/j.sna.2006.03.004).

Record type: Article


Multi-finger microcages with metal/diamond like carbon (DLC) bilayer and polymer/metal/DLC trilayer structures were analyzed, simulated and fabricated. Modelling by finite element analysis showed that a soft polymer can be used together with DLC to form a normally closed microcage which can be opened by 90 degrees angle at a temperature of similar to 400 K, which is much lower than that of a metal/DLC bilayer structure previously demonstrated. The opening temperature for a microcage is independent of the finger dimensions, but is simply determined by the thermal expansion coefficient difference of two materials used. Microcages with SU8/DLC bilayer and SU8/Al/DLC trilayer structures have been fabricated and fully closed microcages with diameters of similar to 40 mu m have been obtained. Initial electrical tests have showed these devices open by more than 90 degrees at a temperature lower than 150 degrees C, roughly in agreement with the theoretical analysis.

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Published date: November 2006
Organisations: Engineering Mats & Surface Engineerg Gp


Local EPrints ID: 42963
ISSN: 0924-4247
PURE UUID: ca3e3a77-e61b-4345-8bb8-596a184b6cc3

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Date deposited: 05 Jan 2007
Last modified: 17 Jul 2017 15:20

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Author: J.K. Luo
Author: R. Huang
Author: J.H. He
Author: Y.Q. Fu
Author: A.J. Flewitt
Author: S.M. Spearing
Author: N.A. Fleck
Author: W.I. Milne

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