Sánchez-Postigo, Alejandro, Wangüemert-Pérez, Juan Gonzalo, Soler Penadés, Jordi, Ortega-Moñux, Alejandro, Nedeljković, Miloš, Halir, Robert, El Mokhtari Mimun, Faysal, Cheng, Yolanda Xu, Qu, Zhibo, Khokhar, Ali Z., Osman, Ahmed, Cao, Wei, Littlejohns, Callum G., Cheben, Pavel, Mashanovich, Goran Z. and Molina-Fernández, Íñigo (2019) Mid-infrared suspended waveguide platform and building blocks. IET Optoelectronics, 13 (2), 55-61. (doi:10.1049/iet-opt.2018.5067).
Abstract
In this work, the authors present their recent progress in the development of a platform for the mid-infrared wavelength range, based on suspended silicon waveguides with subwavelength metamaterial cladding. The platform has some intrinsic advantages, which make it a very promising candidate for sensing applications in the molecular fingerprint region. Specifically, it can cover the full transparency window of silicon (up to a wavelength of 8 μm), only requires one lithographic etch-step and can be designed for strong light-matter interaction. Design rules, practical aspects of the fabrication process and experimental results of a complete set of elemental building blocks operating at two very different wavelengths, 3.8 and 7.7 μm, are discussed. Propagation losses as low as 0.82 dB/cm at λ0 = 3.8 μm and 3.1 dB/cm at λ0 = 7.7 μm are attained for the interconnecting waveguides.
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