Detecting nanometric displacements with optical ruler metrology
Detecting nanometric displacements with optical ruler metrology
We introduce the optical ruler, an electromagnetic analog of a physical ruler, for nanoscale displacement metrology. The optical ruler is a complex electromagnetic field in which singularities serve as the marks on the scale. It is created by the diffraction of light on a metasurface, with singularity marks then revealed by high-magnification interferometric observation. Using a Pancharatnam-Berry phase metasurface, we demonstrate a displacement resolving power of better than 1 nm (λ/800) at a wavelength of 800 nm. We argue that resolving power of ~λ/4000, the typical size of an atom, may be achievable. An optical ruler with dimensions of only a few tens of microns offers applications in nano-metrology, nano-monitoring and nano-fabrication, in particular in the demanding and confined environment of future smart manufacturing tools.
771-775
Yuan, Guanghui
d7af6f06-7da9-41ef-b7f9-cfe09e55fcaa
Zheludev, Nikolai
32fb6af7-97e4-4d11-bca6-805745e40cc6
9 May 2019
Yuan, Guanghui
d7af6f06-7da9-41ef-b7f9-cfe09e55fcaa
Zheludev, Nikolai
32fb6af7-97e4-4d11-bca6-805745e40cc6
Yuan, Guanghui and Zheludev, Nikolai
(2019)
Detecting nanometric displacements with optical ruler metrology.
Science, 364 (6442), .
(doi:10.1126/science.aaw7840).
Abstract
We introduce the optical ruler, an electromagnetic analog of a physical ruler, for nanoscale displacement metrology. The optical ruler is a complex electromagnetic field in which singularities serve as the marks on the scale. It is created by the diffraction of light on a metasurface, with singularity marks then revealed by high-magnification interferometric observation. Using a Pancharatnam-Berry phase metasurface, we demonstrate a displacement resolving power of better than 1 nm (λ/800) at a wavelength of 800 nm. We argue that resolving power of ~λ/4000, the typical size of an atom, may be achievable. An optical ruler with dimensions of only a few tens of microns offers applications in nano-metrology, nano-monitoring and nano-fabrication, in particular in the demanding and confined environment of future smart manufacturing tools.
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optical ruler metrology
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Detecting Nanometric displacements with optical ruler metrology
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Accepted/In Press date: 29 April 2019
e-pub ahead of print date: 9 May 2019
Published date: 9 May 2019
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Local EPrints ID: 430777
URI: http://eprints.soton.ac.uk/id/eprint/430777
ISSN: 0036-8075
PURE UUID: 2fc1d828-7798-4a23-9646-fee531c721d8
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Date deposited: 10 May 2019 16:30
Last modified: 16 Mar 2024 02:43
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Author:
Guanghui Yuan
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