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Vertically coupled a-Si:H multimode interference waveguides for multi-layer silicon photonics platform

Vertically coupled a-Si:H multimode interference waveguides for multi-layer silicon photonics platform
Vertically coupled a-Si:H multimode interference waveguides for multi-layer silicon photonics platform
We successfully demonstrated low temperature fabrication process of vertical MMI a:Si-H waveguides for multi-layer photonic integrated circuit. Measured MMI loss of 1.97dB/MMI and vertical light coupling of TE polarization at 1550nm wavelength have been achieved.
Oo, Swe
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Tarazona, Antulio
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Khokhar, Ali
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Reed, Graham
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Peacock, Anna
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Chong, Harold
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Oo, Swe
6495f6da-8f17-4484-98fb-6151b4efbd9a
Tarazona, Antulio
c6ae87c5-c746-4f89-9ff0-9e7b6874e94f
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Peacock, Anna
685d924c-ef6b-401b-a0bd-acf1f8e758fc
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1

Oo, Swe, Tarazona, Antulio, Khokhar, Ali, Reed, Graham, Peacock, Anna and Chong, Harold (2019) Vertically coupled a-Si:H multimode interference waveguides for multi-layer silicon photonics platform. 2019 Conference on Lasers and Electro-Optics, CLEO 2019, San Jose Convention Center, San Jose, United States. 05 - 10 May 2019. (doi:10.1364/CLEO_AT.2019.ATh3I.4).

Record type: Conference or Workshop Item (Other)

Abstract

We successfully demonstrated low temperature fabrication process of vertical MMI a:Si-H waveguides for multi-layer photonic integrated circuit. Measured MMI loss of 1.97dB/MMI and vertical light coupling of TE polarization at 1550nm wavelength have been achieved.

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Accepted/In Press date: 25 February 2019
Published date: May 2019
Venue - Dates: 2019 Conference on Lasers and Electro-Optics, CLEO 2019, San Jose Convention Center, San Jose, United States, 2019-05-05 - 2019-05-10
Learn more about Zepler Institute for Photonics and Nanoelectronics research Learn more about Zepler Institute for Photonics and Nanoelectronics research Learn more about Sustainable Electronic Technologies research

Identifiers

Local EPrints ID: 430783
URI: http://eprints.soton.ac.uk/id/eprint/430783
DOI: doi:10.1364/CLEO_AT.2019.ATh3I.4
PURE UUID: 6fd4b7b7-8e52-4ee2-990d-07443d8390a1
ORCID for Anna Peacock: ORCID iD orcid.org/0000-0002-1940-7172
ORCID for Harold Chong: ORCID iD orcid.org/0000-0002-7110-5761

Catalogue record

Date deposited: 10 May 2019 16:30
Last modified: 16 Mar 2024 03:57

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Contributors

Author: Swe Oo
Author: Antulio Tarazona
Author: Ali Khokhar
Author: Graham Reed
Author: Anna Peacock ORCID iD
Author: Harold Chong ORCID iD

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