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Design and analysis of an SOI MEMS voltage step-up converter

Design and analysis of an SOI MEMS voltage step-up converter
Design and analysis of an SOI MEMS voltage step-up converter

This paper presents a comprehensive analysis of a MEMS voltage step-up converter for energy harvesting and other low-power applications. The step-up operation is based on isolating the charge of a mechanically variable capacitor and varying the gap between the electrodes by an appropriate method of providing an actuation force. A bi-stable device is discussed and was specifically designed for static energy harvesting. This device features a separate electrostatic actuator element to manipulate the variable capacitor electrodes. Prototypes were then fabricated using a dicing-free silicon-on-insulator process. The devices have been arbitrarily designed to produce an output voltage which is five times the magnitude of the input (M = 5). Due to leakage currents, it was necessary to cascade the MEMS capacitors in parallel to obtain a higher capacitance level. Parasitic fringing capacitances have a substantial impact on the overall capacitance value of the MEMS device and so the measured multiplication level of the devices is limited to M = 2.125. With four devices in parallel, a maximum output voltage of 35.4 V was obtained for a 24 V input was measured. However, a maximum output voltage of ≈60 V is achievable if the capacitance value was further increased by connecting more devices in parallel or if or the load resistance was increased beyond 1 GΩ.

0960-1317
Gleeson, R.
4c84182b-a735-40b0-98d4-5b49fc114b63
Kraft, M.
54927621-738f-4d40-af56-a027f686b59f
White, N. M.
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Gleeson, R.
4c84182b-a735-40b0-98d4-5b49fc114b63
Kraft, M.
54927621-738f-4d40-af56-a027f686b59f
White, N. M.
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Gleeson, R., Kraft, M. and White, N. M. (2013) Design and analysis of an SOI MEMS voltage step-up converter. Journal of Micromechanics and Microengineering, 23 (11), [114017]. (doi:10.1088/0960-1317/23/11/114017).

Record type: Article

Abstract

This paper presents a comprehensive analysis of a MEMS voltage step-up converter for energy harvesting and other low-power applications. The step-up operation is based on isolating the charge of a mechanically variable capacitor and varying the gap between the electrodes by an appropriate method of providing an actuation force. A bi-stable device is discussed and was specifically designed for static energy harvesting. This device features a separate electrostatic actuator element to manipulate the variable capacitor electrodes. Prototypes were then fabricated using a dicing-free silicon-on-insulator process. The devices have been arbitrarily designed to produce an output voltage which is five times the magnitude of the input (M = 5). Due to leakage currents, it was necessary to cascade the MEMS capacitors in parallel to obtain a higher capacitance level. Parasitic fringing capacitances have a substantial impact on the overall capacitance value of the MEMS device and so the measured multiplication level of the devices is limited to M = 2.125. With four devices in parallel, a maximum output voltage of 35.4 V was obtained for a 24 V input was measured. However, a maximum output voltage of ≈60 V is achievable if the capacitance value was further increased by connecting more devices in parallel or if or the load resistance was increased beyond 1 GΩ.

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More information

e-pub ahead of print date: 25 October 2013
Published date: 1 November 2013

Identifiers

Local EPrints ID: 430920
URI: http://eprints.soton.ac.uk/id/eprint/430920
ISSN: 0960-1317
PURE UUID: affe2b84-c8e4-4f8e-96e3-2a2f429f361c
ORCID for N. M. White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 17 May 2019 16:30
Last modified: 20 Jul 2019 01:25

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Contributors

Author: R. Gleeson
Author: M. Kraft
Author: N. M. White ORCID iD

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