X-ray phase-contrast imaging and metrology through unified modulated pattern analysis
X-ray phase-contrast imaging and metrology through unified modulated pattern analysis
We present a method for x-ray phase-contrast imaging and metrology applications based on the sample-induced modulation and subsequent computational demodulation of a random or periodic reference interference pattern. The proposed unified modulated pattern analysis (UMPA) technique is a versatile approach and allows tuning of signal sensitivity, spatial resolution, and scan time. We characterize the method and demonstrate its potential for high-sensitivity, quantitative phase imaging, and metrology to overcome the limitations of existing methods.
Zdora, Marie-Christine
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Thibault, Pierre
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Zhou, Tunhe
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Koch, Frieder J.
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Romell, Jenny
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Sala, Simone
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Last, Arndt
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Rau, Christoph
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Zanette, Irene
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18 May 2017
Zdora, Marie-Christine
cea26261-9f86-4fa1-9122-2371a3818563
Thibault, Pierre
975a4c7b-6ca9-4958-b362-9eba10ab926b
Zhou, Tunhe
61d8b6b9-abba-4221-a85d-e2f1606972cf
Koch, Frieder J.
ead371b4-e07f-43de-b51b-e158a7389f15
Romell, Jenny
ed71f762-d9e7-4b93-b416-9bec6a456ecf
Sala, Simone
78135997-917f-4720-ac5a-d5d8935c2f89
Last, Arndt
aa092341-5c8a-4279-bff6-5c66902ae6f8
Rau, Christoph
f29342b8-92a1-4855-a20c-3960de6e6053
Zanette, Irene
39ee899c-0aae-4fac-aec6-826f848a8022
Zdora, Marie-Christine, Thibault, Pierre, Zhou, Tunhe, Koch, Frieder J., Romell, Jenny, Sala, Simone, Last, Arndt, Rau, Christoph and Zanette, Irene
(2017)
X-ray phase-contrast imaging and metrology through unified modulated pattern analysis.
Physical Review Letters, 118 (20), [203903].
(doi:10.1103/PhysRevLett.118.203903).
Abstract
We present a method for x-ray phase-contrast imaging and metrology applications based on the sample-induced modulation and subsequent computational demodulation of a random or periodic reference interference pattern. The proposed unified modulated pattern analysis (UMPA) technique is a versatile approach and allows tuning of signal sensitivity, spatial resolution, and scan time. We characterize the method and demonstrate its potential for high-sensitivity, quantitative phase imaging, and metrology to overcome the limitations of existing methods.
Text
PhysRevLett.118.203903
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Accepted/In Press date: 1 May 2017
e-pub ahead of print date: 18 May 2017
Published date: 18 May 2017
Identifiers
Local EPrints ID: 431193
URI: http://eprints.soton.ac.uk/id/eprint/431193
ISSN: 0031-9007
PURE UUID: afadd40d-f3ed-4db2-bd3a-09b6d844c669
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Date deposited: 24 May 2019 16:30
Last modified: 16 Mar 2024 01:51
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Contributors
Author:
Marie-Christine Zdora
Author:
Pierre Thibault
Author:
Tunhe Zhou
Author:
Frieder J. Koch
Author:
Jenny Romell
Author:
Simone Sala
Author:
Arndt Last
Author:
Christoph Rau
Author:
Irene Zanette
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