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Germanium ion implantation for trimming the coupling efficiency of silicon racetrack resonators

Germanium ion implantation for trimming the coupling efficiency of silicon racetrack resonators
Germanium ion implantation for trimming the coupling efficiency of silicon racetrack resonators

In recent years, we have presented results on the development of a variety of silicon photonic devices such as erasable gratings and directional couplers, tunable resonators and Mach-Zehnder interferometers, and programmable photonic circuits using germanium ion implantation and localised laser annealing. In this paper we have carried out experiments to analyse a series of devices that can be fabricated using the same technology, particularly silicon-on-insulator racetrack resonators which are very sensitive to fabrication imperfections. Simulation and experimental results revealed the ability to permanently optimise the coupling efficiency of these structures by selective localised laser annealing.

Annealing, Ion implantation, Racetrack resonators, Silicon-on-insulator, Trimming
10923
1-6
SPIE
Milosević, Milan M.
b28da945-84a5-4317-8896-6d9ea6a69589
Yu, Xingshi
7fb4e039-1fb0-4c2e-8567-43e97e77c997
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Aktas, Ozan
2e90db41-f409-431f-9827-2e2577a52457
Oo, Swe Zin
6495f6da-8f17-4484-98fb-6151b4efbd9a
Khokhar, Ali Z.
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Thomson, David J.
17c1626c-2422-42c6-98e0-586ae220bcda
Chong, Harold M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Peacock, Anna C.
685d924c-ef6b-401b-a0bd-acf1f8e758fc
Saito, Shinichi
14a5d20b-055e-4f48-9dda-267e88bd3fdc
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Reed, Graham T.
Knights, Andrew P.
Milosević, Milan M.
b28da945-84a5-4317-8896-6d9ea6a69589
Yu, Xingshi
7fb4e039-1fb0-4c2e-8567-43e97e77c997
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Aktas, Ozan
2e90db41-f409-431f-9827-2e2577a52457
Oo, Swe Zin
6495f6da-8f17-4484-98fb-6151b4efbd9a
Khokhar, Ali Z.
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Thomson, David J.
17c1626c-2422-42c6-98e0-586ae220bcda
Chong, Harold M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Peacock, Anna C.
685d924c-ef6b-401b-a0bd-acf1f8e758fc
Saito, Shinichi
14a5d20b-055e-4f48-9dda-267e88bd3fdc
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Reed, Graham T.
Knights, Andrew P.

Milosević, Milan M., Yu, Xingshi, Chen, Xia, Aktas, Ozan, Oo, Swe Zin, Khokhar, Ali Z., Thomson, David J., Chong, Harold M.H., Peacock, Anna C., Saito, Shinichi and Reed, Graham T. (2019) Germanium ion implantation for trimming the coupling efficiency of silicon racetrack resonators. Reed, Graham T. and Knights, Andrew P. (eds.) In Silicon Photonics XIV. vol. 10923, SPIE. pp. 1-6 . (doi:10.1117/12.2508805).

Record type: Conference or Workshop Item (Paper)

Abstract

In recent years, we have presented results on the development of a variety of silicon photonic devices such as erasable gratings and directional couplers, tunable resonators and Mach-Zehnder interferometers, and programmable photonic circuits using germanium ion implantation and localised laser annealing. In this paper we have carried out experiments to analyse a series of devices that can be fabricated using the same technology, particularly silicon-on-insulator racetrack resonators which are very sensitive to fabrication imperfections. Simulation and experimental results revealed the ability to permanently optimise the coupling efficiency of these structures by selective localised laser annealing.

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More information

Published date: 4 March 2019
Venue - Dates: Silicon Photonics XIV 2019, San Francisco, United States, 2019-02-04 - 2019-02-06
Keywords: Annealing, Ion implantation, Racetrack resonators, Silicon-on-insulator, Trimming

Identifiers

Local EPrints ID: 431679
URI: https://eprints.soton.ac.uk/id/eprint/431679
PURE UUID: f4230234-06a8-4896-9461-abbebed9841d
ORCID for Xia Chen: ORCID iD orcid.org/0000-0002-0994-5401
ORCID for Ozan Aktas: ORCID iD orcid.org/0000-0002-2255-7761
ORCID for Harold M.H. Chong: ORCID iD orcid.org/0000-0002-7110-5761
ORCID for Anna C. Peacock: ORCID iD orcid.org/0000-0002-1940-7172
ORCID for Shinichi Saito: ORCID iD orcid.org/0000-0003-1539-1182

Catalogue record

Date deposited: 13 Jun 2019 16:30
Last modified: 02 Nov 2019 01:36

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Contributors

Author: Xingshi Yu
Author: Xia Chen ORCID iD
Author: Ozan Aktas ORCID iD
Author: Swe Zin Oo
Author: Ali Z. Khokhar
Author: Anna C. Peacock ORCID iD
Author: Shinichi Saito ORCID iD
Author: Graham T. Reed
Editor: Graham T. Reed
Editor: Andrew P. Knights

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