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HWCVD a-Si:H interlayer slope waveguide coupler for multilayer silicon photonics platform

HWCVD a-Si:H interlayer slope waveguide coupler for multilayer silicon photonics platform
HWCVD a-Si:H interlayer slope waveguide coupler for multilayer silicon photonics platform
We present an interlayer slope waveguide, designed to guide light from one level to another level in a multilayer silicon photonics platform. The waveguide is fabricated using HWCVD a-Si:H at 350ºC. Measured loss of 0.5 dB/slope was obtained at a wavelength of 1550 nm and for TE mode polarization.
47-48
Petra, Rafidah
578011d0-6b70-412e-abb7-d04acce3ac4a
Oo, Swe
6495f6da-8f17-4484-98fb-6151b4efbd9a
Tarazona, Antulio
c6ae87c5-c746-4f89-9ff0-9e7b6874e94f
Cernansky, Robert
8ccb162e-f8ee-4209-a5aa-e9a79e80b919
Reynolds, Scott
79120bae-f620-433a-9360-71973dbc4222
Thomson, David
17c1626c-2422-42c6-98e0-586ae220bcda
Khokhar, A.Z.
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Politi, Alberto
cf75c0a8-d34d-4cbe-b9d5-e408c0edeeec
Mashanovich, Goran
c806e262-af80-4836-b96f-319425060051
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Chong, H.M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Petra, Rafidah
578011d0-6b70-412e-abb7-d04acce3ac4a
Oo, Swe
6495f6da-8f17-4484-98fb-6151b4efbd9a
Tarazona, Antulio
c6ae87c5-c746-4f89-9ff0-9e7b6874e94f
Cernansky, Robert
8ccb162e-f8ee-4209-a5aa-e9a79e80b919
Reynolds, Scott
79120bae-f620-433a-9360-71973dbc4222
Thomson, David
17c1626c-2422-42c6-98e0-586ae220bcda
Khokhar, A.Z.
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Politi, Alberto
cf75c0a8-d34d-4cbe-b9d5-e408c0edeeec
Mashanovich, Goran
c806e262-af80-4836-b96f-319425060051
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Chong, H.M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1

Petra, Rafidah, Oo, Swe, Tarazona, Antulio, Cernansky, Robert, Reynolds, Scott, Thomson, David, Khokhar, A.Z., Politi, Alberto, Mashanovich, Goran, Reed, Graham and Chong, H.M.H. (2017) HWCVD a-Si:H interlayer slope waveguide coupler for multilayer silicon photonics platform. 14th International Conference on Group IV Photonics, GFP 2017, Berlin, Germany. 23 - 25 Aug 2017. pp. 47-48 . (doi:10.1109/GROUP4.2017.8082189).

Record type: Conference or Workshop Item (Paper)

Abstract

We present an interlayer slope waveguide, designed to guide light from one level to another level in a multilayer silicon photonics platform. The waveguide is fabricated using HWCVD a-Si:H at 350ºC. Measured loss of 0.5 dB/slope was obtained at a wavelength of 1550 nm and for TE mode polarization.

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More information

Published date: 25 August 2017
Venue - Dates: 14th International Conference on Group IV Photonics, GFP 2017, Berlin, Germany, 2017-08-23 - 2017-08-25

Identifiers

Local EPrints ID: 431696
URI: https://eprints.soton.ac.uk/id/eprint/431696
PURE UUID: 4233cb31-0499-406c-bcc4-ac8e2ab23b43
ORCID for Alberto Politi: ORCID iD orcid.org/0000-0002-3668-9474
ORCID for H.M.H. Chong: ORCID iD orcid.org/0000-0002-7110-5761

Catalogue record

Date deposited: 13 Jun 2019 16:30
Last modified: 20 Jul 2019 00:51

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